Isikebhe se-Quartz Esihlanzekile Kakhulu Sokucubungula I-Wafer

Isikebhe se-Quartz Waferiyithuluzi eliyisihluthulelo lokuthwala ekukhiqizweni kwe-semiconductor, ekukhiqizweni kwamaseli e-photovoltaic kanye nocwaningo oluthuthukisiwe kanye nentuthuko yezinto ezibonakalayo, eyenzelwe ukudluliselwa kwe-wafer okuzinzile kanye nokubekwa ezinqubweni zokushisa okuphezulu. Lo mkhiqizo wenziwe nge-silica ehlanganisiwe ehlanzekile kakhulu (i-SiO2), enokumelana okuhle kakhulu nokushisa, ukuzinza kwamakhemikhali kanye nezici zokungcoliswa kwensimbi okuphansi kakhulu, efanelekile ku-furnace yokusabalalisa, i-oxidation furnace, i-PECVD/LPCVD kanye neminye imishini, esetshenziswa kabanzi ekumbozweni kwe-wafer, ukufakwa kwe-ion, ukufakelwa kwezinga lokushisa eliphezulu kanye neminye izinqubo eziyinhloko.

Izinzuzo Eziyinhloko Zesikebhe Se-quartz Se-VET Energy:

• Izinto zokuhlanzeka okuphezulu kakhulu
  Ubumsulwa ≥99.99%: Okuqukethwe kokungcola (Na, K, Fe, njll.) <5ppm, okugwema ukungcola kwe-wafer nokuqinisekisa ukuvunwa kwe-chip.
  Imvula ephansi kanye nokumuncwa: ubuso bucwebezelisiwe kakhulu (Ra≤0.4μm) ukuze kuncishiswe ukunamathela kwezinhlayiya kanye nezinsalela zegesi.
• Ukuqina kokushisa okuphezulu
  Umkhawulo Wokushisa: Izinga lokushisa lokusebenza isikhathi eside elingu-1100℃, isiqongo sesikhathi esifushane esingu-1300℃, akukho ukuguquguquka, akukho kristalu yemvula.
  I-coefficient yokwanda kokushisa ephansi (5.5x10-7/℃), ukumelana okuhle kakhulu kokushaqeka kokushisa, okuvumelana nokwenyuka kwezinga lokushisa okusheshayo kanye nenqubo yokuwa (isb. i-RTP rapid annealing).
• Umklamo wesakhiwo onembile
  Ukunemba kwesikhala±0.1mm: ukufanisa ama-wafer angu-2”kuya kwangu-12”, iphutha lokufana kwesikhala <0.05mm, ukuqinisekisa ukuthi ama-wafer awanayo i-offset.
  Umthamo womthwalo ophezulu: Umthwalo omkhulu wama-wafer angu-50 (ngokwe-wafers angu-12”) esikebheni esisodwa, osekela ukudluliselwa okuzinzile kwama-wafers amancane (≥100um).
• Ukungasebenzi kahle kwamakhemikhali
  Ukumelana nokugqwala: Kumelana ne-asidi (ngaphandle kwe-HF), ukugqwala kwe-alkali kanye ne-organic solvent, kuhambisana nenqubo yokuhlanza i-CMP.
  Ukuqina kwegesi okuhle kakhulu: Izinga lokuvuza <5x10-10 Pa.m3/s, lifanelekela izindawo zokuhlanza umoya kanye negesi evikelayo.
• Impilo ende kanye nokugcinwa kwayo
  Isikhathi sokuphila ≥ imijikelezo engu-5000 (izimo zokusebenza ezijwayelekile), indawo ingahlanzwa futhi isetshenziswe ngokuphindaphindiwe, kunciphisa izindleko zizonke.
  Umklamo we-Modular: usekela ukushintshwa okungaphelele (isb. izinyo lesikebhe esisodwa), kunciphisa isikhathi sokungasebenzi.

Sinikeza izindawo ezicacile neziqandisiwe ngokuvumelana nezidingo zamakhasimende:

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizweni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa i-graphite, i-silicon carbide, izinto zobumba, ukwelashwa kwendawo efana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll., le mikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lobuchwepheshe livela ezikhungweni zocwaningo zasekhaya eziphezulu, futhi lithuthukise ubuchwepheshe obuningi obunelungelo lobunikazi ukuqinisekisa ukusebenza komkhiqizo kanye nekhwalithi, linganikeza amakhasimende izixazululo zezinto zobuchwepheshe.