Ithreyi Lokulayisha le-PECVD Ithreyi Lokufaka I-Graphite

I-PECVD Ilayisha Ithreyi Lokufaka I-Graphite Ithreyi Isithombe Esifakiwe

Incazelo emfushane:

I-PECVD Loading Tray ye-VET Energy yakhelwe ukuhlinzeka ngokusekelwa okuphephile nokulinganayo kwama-wafer ngesikhathi sokufakwa, okuthuthukisa ukuhambisana kanye nekhwalithi yenqubo yokufakwa. Ngokumelana kwayo nokushisa okuhle kakhulu, i-Graphite Tray isiza ukugcina indawo elawulwayo ngaphakathi kwamakamelo e-PECVD, ukunciphisa ingozi yokungcola nokuqinisekisa ukusebenza kahle kwenqubo.

Sithumelele i-imeyili Landa njenge-PDF

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

Ithreyi yokulayisha ye-VET Energy PECVD iyisithwali esinembile esenzelwe inqubo ye-PECVD (i-plasma enhanced chemical vapor deposition). Le threyi ye-graphite yokufaka esezingeni eliphezulu yenziwe ngezinto ze-graphite ezihlanzekile kakhulu nezinobukhulu obuphezulu. Inokumelana okuhle kakhulu nokushisa okuphezulu, ukumelana nokugqwala, ukuzinza kobukhulu kanye nezinye izici. Inganikeza ipulatifomu yesithwali esizinzile senqubo ye-PECVD futhi iqinisekise ukufana kanye nokuba bushelelezi kokufakwa kwefilimu.

Amathreyi okulayisha e-VET Energy PECVD asetshenziswa kabanzi kuma-semiconductor, photovoltaic, LED kanye neminye imikhakha. Isibonelo:

▪ I-semiconductor: Inqubo ye-PECVD yezinto ze-semiconductor ezifana nama-silicon wafers kanye nama-epitaxial wafers.

▪ I-Photovoltaic: Inqubo ye-PECVD yamafilimu amancane eseli lelanga.

▪ I-LED: Inqubo ye-PECVD yama-chip e-LED.

Izinzuzo Zomkhiqizo

▪Thuthukisa ikhwalithi yefilimu:Qinisekisa ukuthi ifilimu ifakwa ngendlela efanayo futhi uthuthukise ikhwalithi yefilimu.

▪Yandisa isikhathi sokuphila kwemishini:Ukumelana nokugqwala okuhle kakhulu, kwandisa impilo yesevisi yemishini ye-PECVD.

▪Nciphisa izindleko zokukhiqiza:Amathileyi e-graphite asezingeni eliphezulu anganciphisa izinga lokungcola futhi anciphise izindleko zokukhiqiza.

Izinto ze-graphite ezivela ku-SGL:

Ipharamitha evamile: R6510
Inkomba	Izinga lokuhlola	Inani	Iyunithi
Usayizi omaphakathi wokusanhlamvu	I-ISO 13320	10	μm
Ubuningi obukhulu	I-DIN IEC 60413/204	1.83	g/cm³
Imbobo evulekile	I-DIN66133	10	%
Usayizi wembobo ephakathi	I-DIN66133	1.8	μm
Ukuvunyelwa komoya	I-DIN 51935	0.06	cm²/s
Ukuqina kweRockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukumelana okuqondile kukagesi	I-DIN IEC 60413/402	13	μΩm
Amandla okugobeka	I-DIN IEC 60413/501	60	I-MPa
Amandla okucindezela	I-DIN 51910	130	I-MPa
I-modulus kaYoung	I-DIN 51915	11.5×10³	I-MPa
Ukwanda Okushisayo (20-200℃)	I-DIN 51909	4.2X10^-6	K^-1
Ukushisa (20℃)	I-DIN 51908	105	Wm^-1K^-1

Yenzelwe ngqo ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, isekela ukucutshungulwa kwe-wafer enkulu ye-G12. Umklamo wenkampani yokuthwala olungiselelwe kahle ukhulisa kakhulu umkhiqizo, okwenza kube lula ukukhiqizwa okuphezulu kanye nezindleko zokukhiqiza eziphansi.

Into	Uhlobo	Inombolo yesithwali se-wafer
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156	Isikebhe samagrephite esingu-156-13	144
	Isikebhe samagrephite esingu-156-19	216
	Isikebhe samagrephite esingu-156-21	240
	Isikebhe se-graphite esingu-156-23	308
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125	Isikebhe samagrephite esingu-125-15	196
	Isikebhe samagrephite esingu-125-19	252
	Isikebhe se-grphite esingu-125-21	280