Quartz Wafer Nkoj yog dab tsi?

Quartz wafer nkojyog ib qho cuab yeej tshwj xeeb siv rau hauv cov txheej txheem tsim khoom semiconductor, feem ntau yog rau kev nqa thiab thauj cov silicon wafers hauv qhov chaw kub siab. Vim nws qhov kev tiv thaiv kub siab zoo heev thiab kev ruaj khov tshuaj lom neeg, cov nkoj quartz wafer tau siv dav hauv ntau qhov kev xav tau siab thiab cov txheej txheem thev naus laus zis siab. Nws feem ntau yog ua los ntawm cov khoom siv quartz siab (SiO2), uas tsis tsuas yog muaj kev ruaj khov thermal zoo ntawm qhov kub siab tab sis kuj tswj kev ruaj khov tshuaj lom neeg, tiv thaiv cov pa roj lossis tshuaj lom neeg los ntawm kev ua qias tuaj rau wafer.
Hauv cov txheej txheem ntawm kev tsim khoom semiconductor, tshwj xeeb tshaj yog hauv photolithography, zaj duab xis nyias nyias, etching thiab lwm yam txheej txheem, wafers yuav tsum tau ua tiav ntawm qhov kub siab thiab feem ntau xav tau cov tshuaj tiv thaiv hauv cov huab cua tshwj xeeb. Thaum lub sijhawm no, lub nkoj wafer, ua tus nqa khoom, tuaj yeem txhawb nqa thiab thauj cov wafers ruaj khov, xyuas kom meej tias qhov chaw wafer tsis muaj kuab paug thiab txo qhov kev puas tsuaj rau qhov loj tshaj plaws.

Daim Ntawv Thov

1. Kev tsim khoom siv semiconductor
Kev lag luam semiconductor yog qhov chaw siv tseem ceeb ntawm cov nkoj quartz wafer. Cov nkoj wafer feem ntau siv rau hauv kev tsim cov circuits sib xyaw (IC), suav nrog cov zaj duab xis nyias (xws li cov pa tshuaj lom neeg thiab cov pa tshuaj lom neeg) nrog rau cov txheej txheem kub siab xws li oxidation thiab annealing. Thaum lub sijhawm cov txheej txheem no, lub nkoj wafer yog lub luag haujlwm rau kev thauj cov wafers hauv lub reactor thiab xyuas kom meej tias lawv tau cua sov sib npaug thoob plaws hauv cov txheej txheem.
2. Kev tso pa tshuaj lom neeg (CVD)
Hauv cov txheej txheem CVD, cov nkoj wafer quartz tuaj yeem thauj cov wafers ruaj khov ntawm qhov kub siab kom ntseeg tau tias muaj kev sib npaug ntawm cov nyiaj tso cia thiab txo cov tshuaj lom neeg. Vim yog cov khoom siv ntawm cov nkoj wafer, nws tuaj yeem zam kev cuam tshuam ntawm cov tshuaj lom neeg thaum lub sijhawm CVD, yog li ua kom ntseeg tau tias qhov zoo ntawm cov wafers.
3. Cov txheej txheem annealing
Kev ua kom kub yog ib qho kev ua haujlwm ib txwm muaj hauv cov txheej txheem tsim khoom semiconductor, uas cuam tshuam nrog kev ua kom sov lub wafer kom tso tawm kev ntxhov siab sab hauv lossis kho qee qhov tsis zoo. Cov nkoj wafer quartz siv rau hauv cov txheej txheem no los nqa cov wafers thiab xyuas kom meej tias lawv tau txais kev kho cua sov sib xws hauv lub cub tawg.
4. Kev loj hlob ntawm cov siv lead ua
Hauv kev tsim cov ntaub ntawv qib siab, cov nkoj quartz wafer kuj tseem siv tau rau hauv cov txheej txheem loj hlob ntawm cov siv lead ua, tshwj xeeb tshaj yog hauv kev loj hlob ntawm cov siv lead ua silicon thiab lwm yam khoom siv semiconductor. Hauv cov ntawv thov no, qhov kub thiab txias thiab kev ruaj khov ntawm cov nkoj quartz yog qhov tseem ceeb heev.

Kev tsim cov nkoj quartz wafer yuav tsum ua kom tau raws li ntau yam kev xav tau:

• Kev ruaj khov kub siab:Lub ntsiab lus yaj ntawm cov khoom siv quartz yog siab dua 1600 ° C, uas ua rau nws tswj tau lub cev thiab tshuaj lom neeg ruaj khov hauv qhov chaw kub siab.
• Kev tiv thaiv thermal poob siab:Quartz muaj kev tiv thaiv thermal zoo heev, tuaj yeem hloov kho sai rau qhov kub thiab txias, thiab tsis yooj yim tawg.
• l Tsis muaj kuab paug:Quartz yog ib yam khoom ntshiab heev uas tuaj yeem tiv thaiv kev ua qias tuaj ntawm qhov chaw ntawm wafer. Hauv cov txheej txheem tsim khoom semiconductor, txhua yam kev ua qias tuaj yeem ua rau muaj qhov tsis zoo ntawm cov khoom, yog li kev xaiv cov khoom siv quartz yog qhov tseem ceeb heev.

Yuav ua li cas xaiv Quartz Wafer Nkoj?

1. Tus lej thiab qhov loj ntawm cov wafers
Cov txheej txheem tsim khoom sib txawv muaj cov kev cai sib txawv rau cov nkoj wafer. Feem ntau, qhov loj ntawm lub nkoj wafer, tus naj npawb ntawm qhov, thiab lwm yam yuav tsum tau txiav txim siab raws li qhov loj thiab ntau ntawm cov wafers uas yuav tsum tau ua. Ntau dhau wafers yuav cuam tshuam rau kev faib cua sov thiab kev sib xws, yog li xav tau kev txiav txim siab meej thaum tsim thiab xaiv.
2. Cov khoom siv quartz siab purity
Vim yog qhov yuav tsum tau ua kom huv si heev hauv cov txheej txheem tsim khoom semiconductor, kev xaiv cov khoom siv quartz uas muaj purity siab yog qhov tseem ceeb heev. Quartz uas muaj purity qis dua tuaj yeem ua rau cov wafers qias neeg, ua rau cov khoom zoo poob qis.
3. Kev tiv thaiv thermal poob siab
Hauv qee cov txheej txheem, cov nkoj wafer yuav tsum tau hloov pauv ntawm qhov kub thiab txias sib txawv, yog li kev tiv thaiv thermal shock yog qhov tseem ceeb heev. Cov khoom siv quartz nws tus kheej muaj kev tiv thaiv thermal shock zoo, tab sis kev tiv thaiv thermal shock ntawm cov nkoj quartz wafer tsim los ntawm cov chaw tsim khoom sib txawv yuav txawv.
4. Kev tiv thaiv corrosion thiab tshuaj lom neeg ruaj khov
Cov tshuaj reagents siv rau hauv kev tsim khoom semiconductor feem ntau yog corrosive heev, yog li quartz wafer nkoj yuav tsum muaj kev ruaj khov tshuaj lom neeg siab kom tsis txhob muaj kev cuam tshuam nrog cov tshuaj lom neeg no.
5. Tus nqi thiab lub neej ntev
Vim tias cov nkoj thauj khoom quartz wafer ua haujlwm hauv qhov chaw kub siab, lawv feem ntau ntsib kev hnav thiab tsim kua muag. Yog li ntawd, lawv lub neej kev pabcuam kuj yog ib qho tseem ceeb uas yuav tsum tau xav txog. Kev xaiv lub nkoj wafer uas pheej yig tuaj yeem txo cov nqi khiav lag luam mus sij hawm ntev.

 Yuav Ua Li Cas Thiaj Tswj Tau Lub Nkoj Quartz Wafer?

1. Huv si
Thaum lub sijhawm siv, cov nkoj quartz wafer yuav khaws qee cov tshuaj lom neeg lossis cov khoom me me, uas yuav cuam tshuam rau qhov zoo ntawm cov wafers. Yog li ntawd, nws yog ib qho tseem ceeb heev uas yuav tsum ntxuav lub nkoj wafer tsis tu ncua. Cov txheej txheem ntxuav feem ntau suav nrog kev siv cov tshuaj ntxuav ultrasonic, kev ntxuav kua qaub, thiab cov tshuaj ntxuav kom huv, thiab lwm yam.
2. Tshawb xyuas seb puas muaj qhov tawg thiab puas tsuaj
Vim tias cov nkoj quartz wafer raug rau qhov kub thiab txias heev thiab kev nyuaj siab ntawm lub tshuab, tej zaum yuav muaj kab nrib pleb lossis hnav tom qab siv ntev. Tshawb xyuas qhov kev ua haujlwm ntawm lub nkoj wafer tas li thiab hloov cov khoom puas tsuaj raws sijhawm kom tsis txhob muaj teeb meem thaum lub sijhawm tsim khoom.
3. Tiv thaiv kom tsis txhob kub dhau
Txawm hais tias quartz muaj kev tiv thaiv thermal shock zoo, nws tseem yuav raug puas tsuaj rau qee qhov xwm txheej hnyav. Yog li ntawd, thaum ua haujlwm, nws yog qhov tsim nyog yuav tsum tau them sai sai kom tsis txhob muaj qhov kub siab dhau thiab thermal shock.