Iyini i-Quartz Wafer Boat?

Isikebhe se-quartz esithambileiyithuluzi elikhethekile elisetshenziswa enqubweni yokukhiqiza i-semiconductor, ikakhulukazi ukuthwala nokuthutha ama-wafer e-silicon ezindaweni ezishisa kakhulu. Ngenxa yokumelana kwayo okuhle kakhulu nokushisa okuphezulu kanye nokuqina kwamakhemikhali, izikebhe ze-quartz wafer zisetshenziswa kabanzi ezidingweni eziningi zenqubo yokunemba okuphezulu kanye nobuchwepheshe obuphezulu. Ngokuvamile yenziwe ngezinto ze-quartz ezihlanzekile kakhulu (i-SiO2), ezingagcini nje ngokuba nokuzinza okuhle kokushisa emazingeni okushisa aphezulu kodwa futhi ezigcina ukuzinza kwamakhemikhali, zivimbela amagesi asabelayo noma amakhemikhali ukuthi angangcolisi i-wafer.
Enkambisweni yokukhiqizwa kwe-semiconductor, ikakhulukazi ku-photolithography, i-thin film deposition, i-etching nezinye izinqubo, ama-wafer adinga ukucutshungulwa emazingeni okushisa aphezulu futhi avame ukudinga ukusabela ezindaweni ezikhethekile. Phakathi nale nqubo, isikebhe se-wafer, njengesithwali, singasekela futhi sithuthe ama-wafer ngokuzinzile, siqinisekise ukuthi ubuso be-wafer abungcoliswanga futhi sinciphise umonakalo ngezinga elikhulu.

Isicelo

1. Ukukhiqizwa kwe-semiconductor
Imboni ye-semiconductor iyinkambu eyinhloko yokusetshenziswa kwezikebhe ze-quartz wafer. Izikebhe ze-wafer zivame ukusetshenziswa ekukhiqizeni amasekethe ahlanganisiwe (i-IC), kufaka phakathi ukufakwa kwefilimu encane (njengokufakwa kwe-chemical vapor kanye nokufakwa kwe-physical vapor) kanye nezinqubo zokushisa okuphezulu njenge-oxidation kanye ne-annealing. Phakathi nalezi zinqubo, isikebhe se-wafer sinesibopho sokuthutha ama-wafer ngokulinganayo ku-reactor nokuqinisekisa ukuthi afudunyezwa ngokulinganayo kuyo yonke inqubo.
2. Ukufakwa komphunga wamakhemikhali (i-CVD)
Enqubweni ye-CVD, izikebhe ze-quartz wafer zingathutha ama-wafers ngokuqina emazingeni okushisa aphezulu ukuqinisekisa ukufana kwama-deposits nokunciphisa ukungcola kwamakhemikhali. Ngenxa yezakhiwo zezinto ezibonakalayo zesikebhe se-wafer, singagwema ngempumelelo ukuphazamiseka kokusabela kwamakhemikhali ngesikhathi senqubo ye-CVD, ngaleyo ndlela siqinisekise ikhwalithi yama-wafers.
3. Inqubo yokuhlanganisa
I-Annealing iwumsebenzi ovamile enkambisweni yokukhiqiza i-semiconductor, ohilela ukushisa i-wafer ukuze kukhishwe ukucindezeleka kwangaphakathi noma kulungiswe amaphutha athile. Izikebhe ze-quartz wafer zisetshenziswa kule nqubo ukuthwala ama-wafer nokuqinisekisa ukuthi athola ukwelashwa kokushisa okufanayo esithandweni.
4. Ukukhula kwekristalu
Ekukhiqizweni kwezinto ezithile ezithuthukisiwe, izikebhe ze-quartz wafer zingasetshenziswa nasezinqubweni zokukhula kwekristalu, ikakhulukazi ekukhuleni kwamakristalu angawodwa e-silicon nezinye izinto ze-semiconductor. Kulezi zinhlelo zokusebenza, ukumelana nokushisa okuphezulu kanye nokuqina kwamakhemikhali kwezikebhe ze-quartz kubaluleke kakhulu.

Ukwakhiwa kwezikebhe ze-quartz wafer kudinga ukuhlangabezana nezidingo eziningi:

• Ukuqina kwezinga lokushisa eliphezulu:Izinga lokuncibilika kwezinto ze-quartz lingaphezu kuka-1600°C, okwenza likwazi ukugcina ukuzinza ngokomzimba nangokwekhemikhali ezindaweni ezishisa kakhulu.
• Ukumelana nokushaqeka kokushisa:I-Quartz inokumelana okuhle kakhulu nokushisa, ingazivumelanisa ngokushesha nokushintsha kwezinga lokushisa, futhi ayivami ukuqhekeka.
• l Ayinawo ukungcola:I-Quartz iyinto emsulwa kakhulu engavimbela ukungcoliswa kobuso be-wafer. Enqubweni yokukhiqiza i-semiconductor, noma yikuphi ukungcola okuncane kungaholela ekuphazamisekeni komkhiqizo, ngakho-ke ukukhethwa kwezinto ze-quartz kubaluleke kakhulu.

Ungakhetha kanjani i-Quartz Wafer Boat?

1. Inani nosayizi wama-wafer
Izinqubo ezahlukene zokukhiqiza zinezidingo ezahlukene zezikebhe ze-wafer. Ngokuvamile, usayizi wesikebhe se-wafer, inani lezikhala, njll. kudingeka kunqunywe ngokusekelwe kusayizi kanye nenani lama-wafer okufanele acutshungulwe. Ama-wafer amaningi kakhulu angathinta ukusatshalaliswa kokushisa kanye nokufana, ngakho-ke kudingeka ukucatshangelwa okunembile ngesikhathi sokuklama nokukhetha.
2. Izinto ze-quartz ezihlanzekile kakhulu
Ngenxa yezidingo zokuhlanzeka eziphakeme kakhulu enkambisweni yokukhiqiza i-semiconductor, ukukhethwa kwezinto ze-quartz ezihlanzekile kakhulu kubaluleke kakhulu. I-quartz ehlanzekile kancane ingangcolisa ama-wafer, okuholela ekwehleni kwekhwalithi yomkhiqizo.
3. Ukumelana nokushaqeka okushisayo
Kwezinye izinqubo, izikebhe ze-wafer zidinga ukushintshashintsha njalo phakathi kwezimo zokushisa ezahlukene, ngakho-ke ukumelana nokushaqeka kokushisa kubaluleke kakhulu. Izinto ze-quartz ngokwazo zinokumelana okuhle nokushaqeka kokushisa, kodwa ukumelana nokushaqeka kokushisa kwezikebhe ze-wafer ze-quartz ezikhiqizwa abakhiqizi abahlukene kungahluka.
4. Ukumelana nokugqwala kanye nokuqina kwamakhemikhali
Ama-reagent amakhemikhali asetshenziswa ekukhiqizweni kwe-semiconductor avame ukubola kakhulu, ngakho-ke izikebhe ze-quartz wafer zidinga ukuba nokuqina okuphezulu kwamakhemikhali ukuze zigweme ukusabela ngalezi zinto zamakhemikhali.
5. Izindleko kanye Nobude Besikhathi Sokuphila
Njengoba izithwali ze-quartz wafer zisebenza ezindaweni ezishisa kakhulu, zivame ukubhekana nokuguguleka ngokomzimba. Ngakho-ke, impilo yazo yokusebenza nayo iyisici okudingeka sicatshangelwe. Ukukhetha isikebhe se-wafer esingabizi kakhulu kunganciphisa ngempumelelo izindleko zokusebenza zesikhathi eside.

 Ungawugcina Kanjani Umkhumbi We-Quartz Wafer?

1. Hlanza
Ngesikhathi senqubo yokusetshenziswa, izikebhe ze-quartz wafer zingase ziqoqe izinto ezithile zamakhemikhali noma izinhlayiya ezincane, okungase kuthinte ikhwalithi yama-wafer. Ngakho-ke, kubaluleke kakhulu ukuhlanza isikebhe se-wafer njalo. Izindlela zokuhlanza ezivamile zifaka phakathi ukusebenzisa izihlanzi ze-ultrasonic, ukugeza nge-asidi, kanye nezixazululo zokuhlanza, njll.
2. Hlola imifantu kanye nomonakalo
Ngenxa yokuthi izikebhe ze-quartz wafer zibhekene nokushisa okuphezulu kakhulu kanye nokucindezeleka kwemishini, kungase kube nemifantu noma ukuguguleka ngemva kokusetshenziswa isikhathi eside. Hlola njalo ubuqotho besakhiwo sesikebhe se-wafer bese ushintsha izingxenye ezonakele ngesikhathi esifanele ukuze ugweme izinkinga ngesikhathi senqubo yokukhiqiza.
3. Vimbela ukushisa ngokweqile
Nakuba i-quartz inokumelana okuhle nokushaqeka kokushisa, ingase yonakale ngaphansi kwezimo ezithile ezimbi kakhulu. Ngakho-ke, lapho isebenza, kubalulekile ukunaka ukugwema amazinga okushisa aphezulu kakhulu kanye nokushaqeka kokushisa.