Chii chinonzi Quartz Wafer Boat?

Chikepe chewafer cheQuartzchishandiso chakasiyana chinoshandiswa mukugadzirwa kwema semiconductor, kunyanya kutakura nekutakura ma silicon wafers munzvimbo dzinopisa zvakanyanya. Nekuda kwekudzivirira kwayo kupisa kwakanyanya uye kugadzikana kwemakemikari, ma quartz wafer boats anoshandiswa zvakanyanya mumabasa akawanda epamusoro-soro uye epamusoro-soro. Inowanzogadzirwa nezvinhu zve quartz zvakachena zvakanyanya (SiO2), izvo zvisingangove chete zvine kugadzikana kwakanaka kwekupisa pakupisa kwakanyanya asiwo zvinochengetedza kugadzikana kwemakemikari, zvichidzivirira magasi anochinja kana makemikari kuti asasvibise wafer.
Mukugadzirwa kwemasemiconductor, kunyanya mu photolithography, thin film deposition, etching nedzimwe nzira, ma wafers anofanira kugadziriswa pakupisa kwakanyanya uye anowanzoda reactions munzvimbo dzakasiyana siyana. Munguva iyi, wafer boat, semutakuri, inogona kutsigira nekutakura ma wafers zvakanaka, ichiva nechokwadi chekuti pamusoro pe wafers hapasvibiswi uye ichideredza kukuvara zvakanyanya.

Kushandiswa

1. Kugadzira Semiconductor
Indasitiri yesemiconductor ndiyo inonyanya kushandiswa muzvikepe zve quartz wafer. Zvikepe zvewafer zvinowanzo shandiswa mukugadzira ma integrated circuits (IC), kusanganisira thin film deposition (yakadai se chemical vapor deposition uye physical vapor deposition) pamwe nemaitiro ekupisa kwakanyanya akadai se oxidation and annealing. Munguva yemaitiro aya, chikepe chewafer chine basa rekutakura mawafers zvakaenzana mu reactor uye kuona kuti anopisa zvakaenzana mukati mekuita uku.
2. Kuisa mhute yemakemikari (CVD)
Mukuita kweCVD, mawafer boats e quartz anogona kutakura mawafer zvakanaka pakupisa kwakanyanya kuitira kuti ave nechokwadi chekuti zvinhu zvakachengetwa zvakafanana uye kuderedza kusvibiswa kwemakemikari. Nekuda kwehunhu hwezvinhu zviri muwafer boats, inogona kudzivirira kupindira kwemakemikari panguva yeCVD, nokudaro ichivimbisa kunaka kwemawafers.
3. Maitiro ekuwedzera
Kuisa mawafer muchikamu chekugadzira zvinhu, kunosanganisira kupisa wafer kuti ibvise kushushikana kwemukati kana kugadzirisa zvimwe zvikanganiso. Mabhoti eQuartz wafer anoshandiswa mukuita uku kutakura mawafer uye kuona kuti anowana kurapwa kwakafanana kwekupisa muchoto.
4. Kukura kwekristaro
Mukugadzira zvimwe zvinhu zvepamusoro, zvikepe zve quartz wafer zvinogonawo kushandiswa mukukura kwekristaro, kunyanya mukukura kwesilicon single crystals nezvimwe zvinhu zve semiconductor. Mukushandiswa uku, kuramba kupisa kwakanyanya uye kugadzikana kwemakemikari kwezvikepe zve quartz zvakakosha zvikuru.

Kugadzirwa kwezvikepe zve quartz wafer kunofanirwa kusangana nezvinodiwa zvakawanda:

• Kugadzikana kwekupisa kwakanyanya:Nzvimbo yekunyunguduka kwezvinhu zve quartz iri pamusoro pe 1600°C, izvo zvinoita kuti ikwanise kuchengetedza kugadzikana kwemuviri uye kwemakemikari munzvimbo dzinopisa zvakanyanya.
• Kudzivirira kupisa kwemhepo:Quartz ine simba rakanaka rekudzivirira kupisa, inogona kukurumidza kuchinja tembiricha, uye hainyanyi kutsemuka.
• l Isina kusvibiswa:Quartz chinhu chakachena kwazvo chinogona kudzivirira kusvibiswa kwenzvimbo yewafer. Mukugadzirwa kwe semiconductor, chero kusvibiswa kudiki kunogona kukonzera kukanganisa kwechigadzirwa, saka kusarudzwa kwezvinhu zve quartz kwakakosha zvikuru.

Ungasarudza sei chikepe cheQuartz Wafer?

1. Huwandu nehukuru hwemawafer
Maitiro akasiyana ekugadzira ane zvinodiwa zvakasiyana zvemawafer boats. Kazhinji, saizi yewafer boats, huwandu hwenzvimbo dzinoiswa, nezvimwewo zvinofanirwa kutariswa zvichienderana nehukuru nehuwandu hwewafers dzinofanira kugadziriswa. Wafers dzakawanda dzinogona kukanganisa kupararira kwekupisa uye kufanana, saka kutarisisa kwakanyatsojeka kunodiwa panguva yekugadzira nekusarudza.
2. Zvinhu zvequartz zvakachena kwazvo
Nekuda kwezvinodiwa zvakanyanya pakuchena mukugadzirwa kwema semiconductor, kusarudzwa kwezvinhu zve quartz zvine hutsanana hwakanyanya kwakakosha zvikuru. Quartz isina hutsanana hwakanyanya inogona kusvibisa mawafer, zvichikonzera kudzikira kwemhando yechigadzirwa.
3. Kudzivirira kupisa kwekupisa
Mune mamwe maitiro, mawafer boats anofanira kuchinja-chinjana pakati penzvimbo dzakasiyana dzekupisa, saka kuramba kupisa kunopisa kwakakosha zvikuru. Quartz pachayo inodzivirira kupisa kunopisa, asi kuramba kupisa kunopisa kwemawafer boats e quartz anogadzirwa nevagadziri vakasiyana kunogona kusiyana.
4. Kuramba ngura uye kugadzikana kwemakemikari
Makemikari anoshandiswa mukugadzira semiconductor anowanzo paradza zvakanyanya, saka magwa e quartz wafer anofanira kunge aine makemikari akasimba kudzivirira kusangana nezvinhu izvi.
5. Mutengo uye Nguva Yehupenyu
Sezvo midziyo yekutakura mawafer e quartz ichishanda munzvimbo dzinopisa zvakanyanya, inowanzo sangana nekusakara kwemuviri. Nokudaro, hupenyu hwavo hwekushanda chinhu chinofanirawo kufungwa nezvacho. Kusarudza chikepe chewafer chinodhura zvishoma kunogona kuderedza zvinobudirira mari yekushandisa kwenguva refu.

 Maitiro Ekuchengetedza Chikepe cheQuartz Wafer?

1. Kuchena
Munguva yekushandisa, mawafer boats e quartz anogona kuunganidza zvimwe zvinhu zvemakemikari kana zvidimbu zvidiki, izvo zvinogona kukanganisa kunaka kwemawafers. Saka, zvakakosha kuchenesa wafer boats nguva dzose. Nzira dzakajairika dzekuchenesa dzinosanganisira kushandisa ultrasonic cleaners, kushambidza acid, uye decontamination solutions, nezvimwewo.
2. Tarisa kana paine mitswe kana kukuvara
Nekuda kwekuti magwa ewafer equartz anosangana nekupisa kwakanyanya uye kumanikidzwa kwemagetsi, kuputika kana kupera kunogona kuitika mushure mekushandiswa kwenguva refu. Gara uchiongorora kusimba kwechimiro chegwa rewafer uye chinja zvinhu zvakakuvara nenguva kuti udzivise matambudziko panguva yekugadzira.
3. Dzivisa kupisa zvakanyanya
Kunyangwe quartz ichikwanisa kuramba kupisa zvakanaka, inogona kukuvara mumamiriro ezvinhu akaoma. Saka, painoshanda, zvakakosha kungwarira kudzivirira kupisa kwakanyanya uye kupisa kwakanyanya.