PECVD Graphite Nkoj rau lub hnub ci vaj huam sib luag

Kev Piav Qhia Luv:

VET Zog PECVD Graphite Nkoj rau Lub Hnub Ci Vaj Huam Sib Luag yog ib qho khoom siv siab heev uas tsim tshwj xeeb rau kev tsim cov vaj huam sib luag hnub ci ua haujlwm siab. Siv rau hauv Plasma Enhanced Chemical Vapor Deposition (PECVD) cov txheej txheem, lub nkoj graphite no ua kom muaj kev tuav cov khoom zoo tshaj plaws thiab kev sib npaug ntawm cov zaj duab xis nyias nyias ntawm cov hlwb hnub ci. Tsim los rau kev ua kom raug thiab ruaj khov, nws muab cov thermal conductivity zoo dua, kev tiv thaiv corrosion siab, thiab kev ua qias tuaj tsawg kawg nkaus, uas yog qhov tseem ceeb rau kev tsim cov vaj huam sib luag hnub ci zoo, zoo.

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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

VET ZogLub nkoj graphite PECVD rau lub hnub ci yog lub hauv paus siv tau tsim los rau PECVD (plasma enhanced chemical vapor deposition) cov txheej txheem ntawm lub hnub ci. Lub nkoj graphite yog ua los ntawm cov graphite isostatic siab-purity nrog porosity tsawg dua 15% thiab qhov roughness ntawm Ra≤1.6μm. Nws muaj cov khoom zoo heev xws li kev tiv taus kub siab, kev tiv taus corrosion, thiab kev ruaj khov ntawm qhov ntev. Kev ruaj khov ntawm qhov ntev thiab kev ua kom sov zoo ua kom cov zaj duab xis sib xws thiab txhim kho kev siv roj teeb. Nws tuaj yeem muab cov khoom thauj ruaj khov hauv qhov kub thiab siab PECVD ib puag ncig kom ntseeg tau tias cov zaj duab xis sib xws thiab zoo ntawm lub hnub ci.

Cov khoom siv graphite los ntawm SGL:

Cov txheej txheem ib txwm muaj: R6510
Cov Ntawv Qhia	Tus qauv xeem	Tus nqi	Chav tsev
Qhov nruab nrab ntawm cov noob qoob loo	ISO 13320	10	μm
Qhov ceev ntawm cov khoom loj	DIN IEC 60413/204	1.83	g/cm2³
Qhib porosity	DIN66133	10	%
Qhov loj ntawm qhov pore nruab nrab	DIN66133	1.8	μm
Kev nkag tau	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90 xyoo	HR
Kev tiv thaiv hluav taws xob tshwj xeeb	DIN IEC 60413/402	13	μΩm
Lub zog flexural	DIN IEC 60413/501	60	MPa
Lub zog compressive	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5 × 10³	MPa
Kev nthuav dav thermal (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Kev ua kom sov (20 ℃)	DIN 51908	105	Wm^-1K^-1

Nws yog tsim tshwj xeeb rau kev tsim cov roj teeb hnub ci ua haujlwm tau zoo, txhawb nqa G12 cov txheej txheem wafer loj. Kev tsim qauv zoo tshaj plaws ua rau muaj kev ua haujlwm ntau ntxiv, ua rau cov nqi ntau dua thiab cov nqi tsim khoom qis dua.

Khoom	Hom	Tus lej wafer carrier
PEVCD Grephite nkoj - Cov koob 156	156-13 lub nkoj grephite	144
	156-19 lub nkoj grephite	216
	156-21 lub nkoj grephite	240
	156-23 lub nkoj graphite	308
PEVCD Grephite nkoj - Cov koob 125	nkoj grephite 125-15	196
	125-19 grephite nkoj	252
	125-21 grphite nkoj	280