Waka Karāhe PECVD mō te papa rā

Whakaahuatanga Poto:

Ko te Waka Karāhe VET Energy PECVD mō te Paewhiri Rā he wāhanga matatau i hangaia mō te hanga i ngā panera rā mahi-teitei. Ka whakamahia i roto i ngā tukanga Plasma Enhanced Chemical Vapor Deposition (PECVD), ka whakarite tēnei waka karāhe i te whakahaere rauemi tino pai me te whakatakotoranga ōrite o ngā kiriata angiangi ki runga i ngā pūtau rā. I hangaia mō te tika me te roa, ka whakarato i te kawe wera pai rawa atu, te ātete waikura teitei, me te iti o te poke, he mea nui mō te hanga i ngā panera rā kounga teitei, whai hua.

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Taipitopito Hua

Ngā Tohu Hua

Pūngao VETKo te poti karāpeti PECVD mō ngā pūtau rā he mea whakamahi matua i hangaia mō te tukanga PECVD (whakapūtanga matū whakakaha plasma) o ngā pūtau rā. He mea hanga te poti karāpeti ki te karāpeti isostatic tino parakore, he iti iho i te 15% te porosity, ā, he Ra≤1.6μm te taratara o te mata. He tino pai ōna āhuatanga pērā i te ātete pāmahana teitei, te ātete waikura, me te pumau o ngā āhuatanga. Mā te pumau o ngā āhuatanga me te kawe wera pai rawa atu ka whakarite kia ōrite te whakatakotoranga kiriata me te whakapai ake i te pai o te pākahiko. Ka taea e ia te whakarato i tētahi kaikawe pumau i roto i te taiao PECVD pāmahana teitei me te pēhanga teitei hei whakarite kia ōrite te whakatakotoranga me te kounga teitei o ngā kiriata pūtau rā.

Rauemi karāpiti mai i SGL:

Tawhā noa: R6510
Rārangi	Paerewa whakamātautau	Uara	Wāhanga
Rahi witi toharite	ISO 13320	10	µm
Kīanga papatipu	DIN IEC 60413/204	1.83	karamu/henitimi³
Pūngao tuwhera	DIN66133	10	%
Rahi waenga o ngā pūwero	DIN66133	1.8	µm
Āheitanga uruhanga	DIN 51935	0.06	henimita/hekona
Te pakeketanga o Rockwell HR5/100	DIN IEC60413/303	90	HR
Ātete hiko motuhake	DIN IEC 60413/402	13	μΩm
Kaha piko	DIN IEC 60413/501	60	MPa
Kaha pēhanga	DIN 51910	130	MPa
Te modulus a Young	DIN 51915	11.5×10³	MPa
Te whakawhanuitanga wera (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Te kawe wera (20℃)	DIN 51908	105	Wm^-1K^-1

He mea hanga motuhake mō te hanga pūtau pūngao rā tino whai hua, hei tautoko i te tukatuka angiangi rahi G12. Mā te hoahoa kawe kua arotauhia ka nui ake te kaha whakaputa, ka taea ai te piki ake o ngā reiti hua me te whakaiti i ngā utu whakaputa.

Taonga	Momo	Kaikawe tau wafer
Waka Grephite PEVCD - Te raupapa 156	156-13 poti grephite	144
	156-19 poti grephite	216
	156-21 poti grephite	240
	156-23 poti karāhe	308
Waka Grephite PEVCD - Te raupapa 125	Waka grephite 125-15	196
	125-19 poti grephite	252
	125-21 poti graphite	280