Imezu ihe niile gbasara ndị zụrụ ihe bụ ebumnuche ụlọ ọrụ anyị na-enweghị njedebe. Anyị ga-eme nnukwu atụmatụ iji nweta ngwọta ọhụrụ na nke kachasị mma, zute nkọwapụta gị pụrụ iche ma nye gị ndị na-enye gị ngwaahịa tupu ere, n'ahịa na mgbe erechara ya maka Ngwaahịa Ọhụrụ Na-ekpo ọkụ Plasma Enhanced CVD Tube Furnace maka Iwepụ Ihe nkiri siri ike dị elu. Nabata ajụjụ gị, a ga-enye ọrụ kacha mma na obi zuru oke.
Imezu ihe niile gbasara ndị zụrụ ihe bụ ebumnuche ụlọ ọrụ anyị na-enweghị njedebe. Anyị ga-eme nnukwu atụmatụ iji nweta ngwọta ọhụrụ na nke kachasị mma, mezuo nkọwapụta gị pụrụ iche ma nye gị ndị na-enye gị ngwaahịa tupu ere, mgbe erechara ya na mgbe erechara ya.Nchekwa Mmanụ Ọkụ nke China na Ọkụ Ọkụ nke CVD Tube, N'ahịa asọmpi na-arị elu, Site n'iji ezi ọrụ na ngwaahịa dị elu na aha ọma kwesịrị ekwesị, anyị na-enye ndị ahịa nkwado mgbe niile na ngwaahịa na usoro iji nweta mmekorita ogologo oge. Ibi ndụ site na ịdị mma, mmepe site na kredit bụ ihe anyị na-achọ ruo mgbe ebighị ebi, Anyị kwenyere nke ọma na mgbe nleta gị gasịrị, anyị ga-aghọ ndị mmekọ ogologo oge.
Ngwakọta carbon / carbon(nke a ga-akpọ ""C/C ma ọ bụ CFC") bụ ụdị ihe mejupụtara nke dabere na carbon ma ejiri eriri carbon na ngwaahịa ya mee ka ọ sie ike (usoro ihe eji eme ka carbon sie ike). O nwere ma ike nke carbon na ike dị elu nke eriri carbon. O nwere ezigbo ihe eji arụ ọrụ, iguzogide okpomọkụ, iguzogide nchara, mgbochi esemokwu na njirimara ike na ike eletriki.
CVD-SiCmkpuchi ahụ nwere njirimara nke nhazi otu, ihe dị obere, iguzogide okpomọkụ dị elu, iguzogide oxidation, ịdị ọcha dị elu, iguzogide acid & alkali na ihe ndị sitere na organic reagent, yana ihe onwunwe anụ ahụ na kemịkalụ kwụsiri ike.
Ma e jiri ya tụnyere ihe ndị dị na graphite dị ọcha nke ukwuu, graphite na-amalite ịgbaze na 400C, nke ga-eme ka ntụ ntụ daa n'ihi mgbaze, na-ebute mmetọ gburugburu ebe obibi na ngwaọrụ ndị dị n'akụkụ na ụlọ ndị na-anaghị amị amị, ma na-eme ka ihe ndị na-adịghị ọcha nke gburugburu ebe obibi dịkwuo elu.
Agbanyeghị, mkpuchi SiC nwere ike idobe nkwụsi ike anụ ahụ na kemịkalụ na ogo 1600. A na-ejikarị ya eme ihe n'ụlọ ọrụ ọgbara ọhụrụ, ọkachasị na ụlọ ọrụ semiconductor.
Ụlọ ọrụ anyị na-enye ọrụ nhazi mkpuchi SiC site na usoro CVD n'elu graphite, seramiiki na ihe ndị ọzọ, ka gas pụrụ iche nwere carbon na silicon meghachi omume na okpomọkụ dị elu iji nweta molekul SiC dị ọcha, molekul ndị a na-etinye n'elu ihe ndị a kpuchiri ekpuchi, na-emepụta oyi akwa nchebe SIC. SIC e guzobere na-ejikọta nke ọma na ntọala graphite, na-enye ntọala graphite ihe pụrụ iche, si otú a na-eme ka elu nke graphite dị obere, enweghị Porosity, oke okpomọkụ, iguzogide nchara na iguzogide oxidation.
Isi atụmatụ:
1. Nguzogide oxidation okpomọkụ dị elu:
Nguzogide oxidation ka dị mma nke ukwuu mgbe okpomọkụ dị elu ruo 1600 Celsius.
2. Ịdị ọcha dị elu: emere site na itinye anwụrụ kemịkalụ n'okpuru ọnọdụ okpomọkụ dị elu nke chlorine.
3. Mgbochi mbuze: ike siri ike, elu dị obere, obere ihe.
4. Mgbochi nke ire ere: asịd, alkali, nnu na ihe ndị sitere n'okike.
Nkọwapụta Isi nke Mkpuchi CVD-SIC:
| SiC-CVD | ||
| Njupụta | (g/cc)
| 3.21 |
| Ike flexural | (Mpa)
| 470 |
| Mgbasawanye okpomọkụ | (10-6/K) | 4
|
| Ọkwa okpomọkụ | (W/mK) | 300
|
