Ko te whakatutuki i te makona o te kaihoko te whāinga mutunga kore o tā mātou kamupene. Ka whakapau kaha mātou ki te tiki i ngā otinga hou me te kounga teitei, ka tutuki i ō whakaritenga motuhake, ka whakarato hoki i ngā ratonga i mua i te hoko, i te hoko me muri i te hoko mō ngā Hua Hou Wera o te Umu Ngongo CVD Whakarei Plasma mō te Whakatakoto i ngā Kiriata Mārō Kounga Teitei. Nau mai ki tāu patai, ka tukuna atu te ratonga pai rawa atu me te ngākau nui.
Ko te whakatutuki i te makona o te kaihoko te kaupapa mutunga kore a tā mātou kamupene. Ka whakapau kaha mātou ki te tiki i ngā otinga hou me te kounga teitei, ki te whakatutuki i ō whakaritenga motuhake, ā, ka whakarato ki a koe i ngā ratonga i mua i te hoko, i te wā hoko me muri i te hoko.Te Ouma Ngongo CVD Haina me te Whakatakotoranga Matū o te Ouma Ngongo CVD, I roto i te mākete whakataetae e piki haere ana, me te ratonga pono me ngā taonga kounga teitei me te ingoa pai, ka tautoko tonu mātou i ngā kaihoko ki ngā taonga me ngā tikanga hei whakatutuki i te mahi tahi mō te wā roa. Ko te noho i runga i te kounga, ko te whanaketanga mā te nama te whainga mutunga kore, E whakapono ana mātou i muri i tō haerenga mai ka noho mātou hei hoa mahi mō te wā roa.
Ngā mea whakakotahi waro / waro(e kiia nei i muri nei ko ""C / C, CFC rānei") he momo rauemi hiato e ahu mai ana i te waro, ā, e whakapakaritia ana e te muka waro me ōna hua (muka waro kua oti te hanga). He rite tōna āhua ki te waro, he rite hoki tōna kaha ki te muka waro. He pai ōna āhuatanga miihini, he ātete wera, he ātete waikura, he ārai waku, he pai hoki ōna āhuatanga kawe wera me te hiko.
CVD-SiCKo ngā āhuatanga o te paninga he hanganga ōrite, he rauemi kiato, he ātete pāmahana teitei, he ātete waikura, he parakore teitei, he ātete waikawa me te kawakore me te matū matū waro, me ngā āhuatanga ā-tinana me te matū pumau.
Ki te whakatauritea ki ngā rauemi karāpeti parakore-teitei, ka tīmata te karāpeti ki te waikura i te 400C, ka ngaro te paura nā te waikura, ka hua ake te parahanga taiao ki ngā taputapu taha me ngā rūma korehau, ka piki ake hoki ngā poke o te taiao parakore-teitei.
Heoi, ka taea e te paninga SiC te pupuri i te pumau ā-tinana me te matū i te 1600 nekehanga, he mea whakamahi whānuitia i roto i te ahumahi hou, inā koa i roto i te ahumahi semiconductor.
Ka whakaratohia e tā mātou kamupene ngā ratonga tukanga paninga SiC mā te tikanga CVD i runga i te mata o te karāpeti, te uku me ētahi atu rauemi, kia tauhohe ai ngā hau motuhake kei roto te waro me te silicon i te pāmahana teitei hei whiwhi i ngā ngota SiC parakore teitei, ka whakatakotoria ngā ngota ki runga i te mata o ngā rauemi pania, ka hanga he paparanga tiaki SIC. Ka piri pūmau te SIC i hangaia ki te turanga karāpeti, ka hoatu he āhuatanga motuhake ki te turanga karāpeti, nā reira ka hanga te mata o te karāpeti kia kiato, kia kore he porosity, kia ātete ki te pāmahana teitei, kia ātete ki te waikura me te ātete ki te waikura.
Ngā āhuatanga matua:
1. Ātete waikura pāmahana teitei:
He tino pai tonu te ātete ki te waikura ahakoa te teitei o te pāmahana ki te 1600 C.
2. Teitei o te parakore: i hangaia mā te whakatakotoranga kohu matū i raro i te āhuatanga whakapūkara pāmahana teitei.
3. Ātete ki te horo: he pakeke teitei, he mata kiato, he matūriki angiangi.
4. Ātete ki te waikura: waikawa, kawakore, tote me ngā matū waro.
Ngā Whakatakotoranga Matua o ngā Paninga CVD-SIC:
| SiC-CVD | ||
| Kiato | (karamu/cc)
| 3.21 |
| Kaha piko | (Mpa)
| 470 |
| Te whakawhānui wera | (10-6/K) | 4
|
| Te kawe wera | (W/mK) | 300
|
