He Aratohu Whānui ki ngā Ārai Karawhite Parakore-Teitei

I roto i te hanganga taputapu haurua-ā-ira hou me te hanga haurua-ā-ira matū o te whakatupuranga tuatoru (pērā i te Silicon Carbide [SiC] me te Gallium Nitride [GaN]), he maha ngā kōrero mō te ahumahi e pā ana ki ngā mīhini tuhi EUV tino matatau, ngā whakairo plasma, te parakore o te hau mua rānei. Heoi, i roto i te taiao tino ma, tino waikura, me te pāmahana teitei o te rūma tauhohenga kei reira tētahi toa nui kāore i te mōhiotia: te kaiwhakaoho Graphite.

1. He aha te mea te kaitapahi Susceptor?

A Kaitātari graphitehe wāhanga kawe mahi tino tika i hangaia mai i te karāhe kua whakarewaina-iso, kua whakaputaia rānei, he maha ngā wā he āhua kōpae, he pōkete, he ritenga rāneingā āhuahanga toru-ahu kua whakaritea kia uru ki ngā rūma tauhohenga motuhake.

I roto i ngā taputapu pēnei i te Whakatakotoranga Kohu Matū (CVD), te Whakatakotoranga Kohu Matū Whakarewa-Waiora (MOCVD), me ngā tauhohenga Tukatuka Tere (RTP), ko te mahi matua o te tūāpapa kawe ko te pupuri haumaru i ngā papa haurua-ira me te mahi hei whakawhiti wera matua. Mā te whakamahi i ngā tikanga whakamahana arataki whakapūmau graphite, ka mimiti tere te wāhanga i te Auautanga Reo Irirangi (RF) te pūngao hikohiko ngaruiti rānei, ka huri hei pūngao wera ōrite, ka whakahaere i te whakahaere wera tika taumata-mirihēkona puta noa i te mata o te papa.

2. Te Hanganga o ngā Rauemi me te Hanganga Moroiti: He aha i whakamahia ai te paninga Isostatic Graphite + CVD SiC?

Kāore e taea e te karāpiti mata kāore i pania te tu atu i ngā āhuatanga matū kaha me ngā whakaritenga horoi tino pakari o te hanga haurua-irahiko. Ka whakamahia e ngā pūwero karāpiti mahi-teitei hou he pūnaha hiato paparua motuhake:

(1) Papa Whakatakotoranga Karāwhite Isostatic Teitei-Parakore

Ka hangaia te papa matua mā te whakamahi i te karāpeti i pēhia kia rite ki te āhua o te karāpeti. Mā te arotau i te hanganga moroiti o te karāpeti, ka tutuki i a ia ngā āhuatanga ā-tinana rite ki te āhua o te karāpeti, te iti o te porosity, me te kaha piko ā-mīhini teitei, ka whakarato i te turanga pai mō te miihini moroiti i ngā āhuahanga pute wafer uaua.

(2) Paninga Tiaki CVD Silicon Carbide (SiC)

Mā te whakamahi i te Whakatakotoranga Kohu Matū, ka whakatipuria he paparanga matotoru o te poly-crystalline B-SiC (he 10 ki te 100 um te matotoru me te 99.999% te parakore) ki runga i te papa karāhe. Ka hiritia katoatia e tēnei paninga ngā pore moroiti o te mata karāhe, ka ārai i te maturuturunga o ngā matūriki, ā, ka whakarato i tētahi ārai kore uru ki ngā hau waikura pēnei i te HCI, NH, me ngā matū whai fluorine.

3. Ngā Āhuatanga Matua o te Tinana me ngā Whakatakotoranga Rauemi

I runga i ngā whakamātautau taiwhanga pakari me ngā paearu ahumahi kua whakamanahia, ka whakaatuhia e ngā whakangāwari graphite kua pania ki te parakore teitei ngā tawhā ā-tinana matua e whai ake nei:

Ngā Painga o te Hangarau Matua:

1. Ātete Ru Wera Pai RawaKa taea te tu atu i ngā huringa whakamahana me te whakamatao tere tonu (neke atu i te 1500°C) me te kore e ngatata, e wehe rānei.

2. Te Āhuakore o te MatūĀrai rawa atu i te pirau mai i te H2, NH3, ngā hau silane, me ngā matū horoi kino.

3. Te Taurite i te Tauwehenga o te Whakawhanuitanga Wera (CTE)Mā te tukanga whakatakotoranga SiC motuhake a VET Energy e whakarite te whanonga whakawhānui wera o te paninga SiC ki te matua o te karāhe, e ārai ana i te pakaru o te paninga i ngā pāmahana tino kino.

4. Te Tūranga me ngā Whakamahinga i roto i te Tukatuka Ārai-Haumaru

Ko ngā pūwero graphite pono-tiketike he wāhanga matua hei whakahohe i roto i ētahi mahi hanga semiconductor nui:

(1) Te Tipu Epitaxial o te CVD me te MOCVD (Epi)

I roto i te hanganga GaN LED, ko te epitaxy taputapu hiko SiC, me te epi-growth o te silicon wafer, te matotoru o te kiriata me te ōritetanga o te doping e whakawhirinaki nui ana ki te ōritetanga o te papa wera. Ka tohatohahia e ngā suceptors graphite te wera puta noa i ngā whirihoranga wafer kotahi, maha rānei i te wā hurihuri, ka pehi i ngā rārangi piko, paheke rānei o te wafer i puta mai i te ahotea wera.

(2) Te Tiputanga o te Karaihe Kotahi (Tikanga PVT)

I te wā e tipu ana te Silicon Carbide (SiC) me te tioata Sapphire mā te Physical Vapor Transport (PVT), ka tautuhia e te susceptor te pikinga rohe wera, ka ārahi tika i te hanganga o te ingot tioata kotahi, ka whakaiti i te kiato nekehanga.

(3) Te Tukatuka Tere o te Wera (RTP) me te Whakamahana

Mā te whakamahi i te whakamahana whai hua o te graphite susceptor, ka taea e te tūāpapa ngā wā urupare wera tino tere e hiahiatia ana mō te whakamahana whatunga i muri i te whakatōnga me te hanganga hononga.

5. He aha koe i whiriwhiri ai i a VET Energy?

Me ngā whakaritenga uaua mō te pakari o te mekameka tuku, te tino parakore, me te roa o te ora ratonga,Pūngao VETe tū ana hei hoa hangarau pono o te ao:

1. Mīhini-Iti TikaMā ngā pokapū miihini CNC maha-tuaka ka taea te hanga i ngā pute angiangi matatini, ngā awaawa moroiti, me ngā hongere hau aerodynamic ritenga me ngā āheinga tae noa ki te taumata maikiromita.

2. Te Whakatakotoranga CVD SiC Kikī MatatauMā tā mātou tukanga CVD motuhake ka tutuki ngā paninga SiC tino matotoru, ka taea te whakakanapa whakaata, ka roa ake te roa o te mahi o te huringa wera mā te neke atu i te 30%.

3. Taiao Tukatuka Tino MaKo te purenga katoa me te whakahaerenga rūma ma e whakamana ana kia mau tonu te ihirangi pungarehu katoa i raro i te 5 ppm, e tutuki ana i te semiconductor OEM tino pakariNgā paerewa Fab.

4. Te Utu Whakapai Ake o te Mana Whakahaere (CoO)Ka tukuna e VET Energy ngā wā arahi tere me ngā ōwehenga utu-ki-te-mahi whakataetae, hei āwhina i ngā kaihanga maramara ki te whakaiti i ngā whakapaunga pau.