Ko te tikanga PVT, ko tōna ingoa katoa ko te Physical Vapor Transportation, he tikanga noa mō te whakatipu i te silicon carbide (SiC)ngā tioata i raro i te pāmahana teitei me te pēhanga teitei. Ko tōna kaupapa matua ko te whakamahana i te paura silicon carbide ki te whakapūmau i te pāmahana neke atu i te 2300℃ me te taiao pēhanga iti e tata ana ki te korehau, ka hanga he hau tauhohenga kei roto ngā wāhanga hau pēnei i te Si, Si2C, me te SiC2. Nā te rerekētanga o ngā pēhanga wāhanga hau-āhuatanga o ngā wāhanga Si me te C i hangaia e te tauhohenga whakapūmau wāhanga totoka, ka rerekē te ōwehenga stoichiometric Si/C me te tohatoha o te mara wera. Nō reira, me whakahaere te tohatoha me te kawe o ngā wāhanga hau-āhuatanga kia tino tae atu ai ki ngā tūranga whakapūmau motuhake i roto i te ruma tipu.
Hei ārai i te hanganga o te tioata hau-āhua koretake o te polycrystalline silicon carbide, ka whakatakotoria ngā tioata purapura silicon carbide ki te tihi o te rūma tipu. I raro i te pana o te hau-āhua hau-āhua, ka whakatakotoranga ngā wāhanga hau-āhua ki te mata o te tioata purapura hei hanga tioata takitahi silicon carbide. Ka tū te tukanga tauhohenga katoa i roto i te rūma tipu kua kati, ka honoa ngā tawhā katoa o te pūnaha tauhohenga tetahi ki tetahi. Ka pā te rerekētanga o ngā āhuatanga tipu ki te pumau o te tipu tioata kotahi.
Hei tāpiritanga, ko ngā hanganga piri-katoa o ngā tioata takitahi silicon carbide e pā ana ki te whakatakotoranga tioata ka hua ake ngā tikanga hononga me te here ngota, ā, ka hangaia he neke atu i te 200 ngā momo tioata o ngā isomers silicon carbide. He tino iti te arai hurihanga pūngao i waenga i ngā momo tioata rerekē, nō reira he tino tūponotanga ka puta te hurihanga āhua tioata i roto i te pūnaha tipu tioata takitahi PVT, ka hua ake he āhua tioata whāinga koretake me ngā momo hapa tioata. Nō reira, me whakamahi i ngā taputapu tirotiro motuhake hei kite i te āhua tioata me ngā momo hapa o te ingot tioata.
He tino teitei ngā whakaritenga mō te tukanga whakarite o te silicon carbide, ā, ko te nuinga o ēnei e whakaatuhia ana i roto i ngā āhuatanga e whai ake nei:
- He maha ngā poke o te taiao i roto i te tukanga hanga o te paura silicon carbide, e uaua ai te whiwhi paura parakore teitei. Ko te tauhohenga kāore i oti i waenga i te paura silicon me te paura waro hei pūtake tauhohenga ka puta he taurite kore i roto i te ōwehenga Si/C. He uaua ki te whakahaere i te āhua tioata me te rahi o te matūriki o te paura silicon carbide i muri i te hanga.
- I raro i ngā āhuatanga o te pāmahana teitei ake i te 2300℃ me te tata ki te korehau, ka pāngia te karawiti silicon e te tukanga whakawhiti me te whakahounga "totoka-hau-totoka" i roto i te rūma karāti kua kati. He roa te huringa tipu o tēnei tukanga, he uaua ki te whakahaere, ā, he ngāwari ki te pāngia e ngā hapa pēnei i ngā microtubules me ngā whakaurunga.
- Neke atu i te 200 ngā momo tioata rerekē o te karawiti silicon, engari kotahi noa te momo tioata e hiahiatia ana mō te hanga. I te wā o te tipu, ka puta he huringa āhua tioata, ka puta he maha ngā momo hapa whakauru. I te wā o te whakarite, he uaua ki te whakahaere pumau i tētahi momo tioata motuhake, ā, he tino iti te arai hurihanga pūngao i waenga i ngā momo tioata rerekē, ka nui ake te uaua o te whakahaere. Ko te whakahaere tawhā me ngā rangahau e pā ana i tēnei wā e hiahiatia ana he utu R&D nui, koinei hoki tētahi o ngā take mō te utu nui o te karawiti silicon e tutuki ana.
Wā tuku: Hōngongoi-03-2025