Wafer warpage, wakora iki?

Mu buryo bumwe bwo gupakira, ibikoresho byo gupakira bifite coefficients zitandukanye zo kwagura ubushyuhe birakoreshwa. Mu gihe cyo gupakira, wafer ishyirwa ku gice cyo gupakira, hanyuma hagakorwa intambwe zo gushyushya no gukonjesha kugira ngo ipakire irangire. Ariko, bitewe n'uko coefficient yo kwagura ubushyuhe bw'ibikoresho byo gupakira n'wafer idahuye, stress y'ubushyuhe ituma wafer igorama. Ngwino urebe hamwe n'umwanditsi ~

Warpage ya wafer ni iki??

Waferiwarpage yerekeza ku kugonda cyangwa kuzunguruka kwa wafer mu gihe cyo gupfunyika.WaferiKugorama bishobora gutera guhindagurika kw'imiterere y'ibikoresho, ibibazo byo gusudira no kwangirika k'imikorere y'ibikoresho mu gihe cyo gupakira.

Kugabanuka kw'ubuziranenge bw'ibipfunyika:WaferiIhindagurika ry'urupapuro rishobora gutuma habaho ihindagurika ry'imiterere y'ibikoresho mu gihe cyo gupakira. Iyo wafer ihinduye isura mu gihe cyo gupakira, imiterere y'urupapuro n'igikoresho gipakiye ishobora kugira ingaruka, bigatuma ibyuma bihuza cyangwa ibipfunyika bitabasha gupakira neza. Ibi bigabanya uburyo bwo gupakira neza kandi bishobora gutera imikorere idahamye cyangwa idahwitse y'ibikoresho.

Ubwiyongere bw'umuvuduko wa mekanike:WaferiUrupapuro rw'inyuma rutera indi stress ya mekanike. Bitewe n'ihindagurika rya wafer ubwayo, stress ya mekanike ikoreshwa mu gihe cyo gupfunyika ishobora kwiyongera. Ibi bishobora gutera stress nyinshi imbere muri wafer, bigira ingaruka mbi ku bikoresho n'imiterere y'igikoresho, ndetse bigatera kwangirika kwa wafer imbere cyangwa impanuka y'igikoresho. 

Kwangirika k'imikorere:Ihindagurika ry'urupapuro rw'amashanyarazi rishobora kwangiza imikorere y'igikoresho. Ibice n'imiterere y'urupapuro rw'amashanyarazi kuri wafer byakozwe hashingiwe ku buso burambuye. Iyo wafer ihindagurika, bishobora kugira ingaruka ku mikoranire y'amashanyarazi, kohereza ibimenyetso no gucunga ubushyuhe hagati y'ibikoresho. Ibi bishobora guteza ibibazo mu mikorere y'amashanyarazi, umuvuduko, ikoreshwa ry'amashanyarazi cyangwa uburyo igikoresho cyizewe.

Ibibazo byo gusudira:Ingufu zo gusudira zishobora guteza ibibazo byo gusudira. Mu gihe cyo gusudira, iyo ifu igoramye cyangwa igoramye, imbaraga zikwirakwira mu gihe cyo gusudira zishobora kuba zitangana, bigatuma ingingo zo gusudira zidakora neza cyangwa ndetse n'ingingo zo gusudira zicika. Ibi bizagira ingaruka mbi ku buryo ipaki ikora neza.

Impamvu zitera warpage ya wafer

Izi zikurikira ni zimwe mu mpamvu zishobora guteraagace gatourupapuro rw'intambara:

1.Umuvuduko w'ubushyuhe:Mu gihe cyo gupfunyika, bitewe n'impinduka z'ubushyuhe, ibikoresho bitandukanye kuri wafer bizagira ingano idahindagurika y'ubushyuhe, bigatuma wafer ihinduka.

2.Ubudasa bw'ibikoresho:Mu gihe cyo gukora wafer, ikwirakwizwa ry’ibikoresho ritaringaniye naryo rishobora gutera wafer warpage. Urugero, ubucucike cyangwa ubunini butandukanye bw’ibikoresho mu bice bitandukanye bya wafer butuma wafer ihinduka.

3.Ibipimo by'imikorere:Kugenzura nabi bimwe mu bipimo by'imikorere mu gupfunyika, nk'ubushyuhe, ubushuhe, umuvuduko w'umwuka, nibindi, bishobora no gutera wafer warpage.

Umuti

Ingamba zimwe na zimwe zo kugenzura warpage ya wafer:

Kunoza imikorere:Gabanya ibyago byo kwangirika kw'imvange y'imvange y'imvange binyuze mu kunoza ibipimo by'uburyo bwo gupfunyika. Ibi birimo kugenzura ibipimo nk'ubushyuhe n'ubukonje, igipimo cy'ubushyuhe n'ubukonje, n'umuvuduko w'umwuka mu gihe cyo gupfunyika. Guhitamo neza ibipimo by'uburyo bwo gupfunyika bishobora kugabanya ingaruka z'ubushyuhe no kugabanya amahirwe yo kwangirika kw'imvange y ...

Amahitamo y'ibikoresho byo gupfunyika:Hitamo ibikoresho bikwiye byo gupfunyika kugira ngo ugabanye ibyago byo kwangirika kwa wafer. Ingano y'ubushyuhe bw'ibikoresho byo gupfunyika igomba kuba ihuye n'iya wafer kugira ngo igabanye kwangirika kwa wafer guterwa n'ubushyuhe. Muri icyo gihe, imiterere ya mekanike n'ubudahangarwa bw'ibikoresho byo gupfunyika nabyo bigomba kwitabwaho kugira ngo ikibazo cya wafer warpage gishobore kugabanuka neza.

Gushushanya no kunoza uburyo bwo gukora ifu ya Wafer:Mu gihe cyo gushushanya no gukora wafer, hari ingamba zishobora gufatwa kugira ngo hagabanywe ibyago byo kwangirika kwa wafer. Ibi birimo kunoza uburyo ibikoresho bikwirakwira mu buryo bumwe, kugenzura ubunini n'ubuso bw'wafer, nibindi. Mu kugenzura neza uburyo wafer ikorwa, ibyago byo kwangirika kwa wafer ubwayo bishobora kugabanuka.

Ingamba zo gucunga ubushyuhe:Mu gihe cyo gupakira, ingamba zo gucunga ubushyuhe zirafatwa kugira ngo bigabanye ibyago byo kwangirika kwa wafer. Ibi birimo gukoresha ibikoresho bishyushya no gukonjesha bifite ubushyuhe bungana neza, kugenzura ubushyuhe n'impinduka z'ubushyuhe, no gufata uburyo bukwiye bwo gukonjesha. Gucunga neza ubushyuhe bishobora kugabanya ingaruka z'ubushyuhe ku wafer no kugabanya amahirwe yo kwangirika kwa wafer.

Ingamba zo kumenya no guhindura:Mu gihe cyo gupakira, ni ngombwa cyane kumenya no guhindura buri gihe warf warpage. Hakoreshejwe ibikoresho byo gupima neza, nk'uburyo bwo gupima optique cyangwa ibikoresho byo gupima imashini, ibibazo bya warf warpage bishobora kumenyekana hakiri kare kandi ingamba zo kubikosora zishobora gufatwa. Ibi bishobora kuba birimo kongera guhindura ibipimo byo gupakira, guhindura ibikoresho byo gupakira, cyangwa guhindura uburyo bwo gukora wafer.

Byakagombye kumenyekana ko gukemura ikibazo cya wafer warpage ari akazi katoroshye kandi gashobora gusaba gusuzuma ibintu byinshi no kongera no kubikosora kenshi. Mu mikoreshereze nyayo, ibisubizo byihariye bishobora gutandukana bitewe n'ibintu nk'uburyo bwo gupfunyika, ibikoresho bya wafer, n'ibikoresho. Kubwibyo, bitewe n'imimerere runaka, ingamba zikwiye zishobora gutoranywa no gufatwa kugira ngo ikibazo cya wafer warpage gikemuke.