Uko inganda za semiconductor zigenda zitera imbere zigana ku miterere y’ibikoresho bito, uburyo bwo gukoresha wafer bwinshi, ndetse n’amahame akomeye yo kugenzura ihumana, ibikoresho bitunganya ubushyuhe birimo guhura n’ibibazo by’ubuhanga bitari byarigeze bibaho. Imikorere nka LPCVD, oxidation y’ubushyuhe, gukwirakwiza dopant, no gushyushya ubushyuhe bwinshi ubu ntibisaba gusa ubushyuhe bungana, ahubwo bisaba no gukora igihe kirekire, gukora uduce duto, no kongera uburyo bwo gusubiramo ibintu.
Nubwo akenshi ikunze kwirengagizwa ugereranyije n'imyuka ikoreshwa mu gutunganya ibintu, imiyoboro y'itanura, cyangwa imiti ikoreshwa mu gusiga, paddle ya cantilever igena cyane cyane uburyo wafers zitwara mu bidukikije birimo ubushyuhe bwinshi. Mu bintu byinshi bigezweho, ntabwo bikifatwa nk'ikintu cyoroshye gukoresha, ahubwo ni ibikoresho by'ingenzi bifasha gutunganya semiconductor mu buryo buhamye kandi bushobora gusubiramo.
Igikapu cya SiC Cantilever ni iki?
Igitambaro cya SiC Cantilever Paddle ni igice cy’imiterere ya silicon carbide gifite isuku nyinshi gikoreshwa cyane cyane mu itanura rya semiconductor diffusion na sisitemu za LPCVD. Ubusanzwe gikozwe nk'icyuma kirekire cya cantilever gishobora gushyigikira ubwato bwa quartz cyangwa SiC wafer mu gihe cyo gutunganya ubushyuhe bwinshi.
Muri rusange, igice cyayo gikorwa hakoreshejwe:
● karubide ya silikoni yasubiwemo (RSiC)
● karubide ya silikoni ikoresha umwuka w'ibinyabutabire (CVD SiC)
● ibikoresho bya SiC bifite ubushobozi bwo gukora ibintu byinshi
Dukurikije amakuru y’ibikoresho yashyizwe ahagaragara na CoorsTek na Saint-Gobain Performance Ceramics, ibikoresho bya SiC bifite isuku nyinshi bikunze kugaragaza ibi bikurikira:
● Uburyo ubushyuhe butwara: hafi 120–200 W/m·K ku bushyuhe bw'icyumba
● Ubushyuhe ntarengwa bwo gukora mu kirere kidakora: hejuru ya 1600°C.
● Koreji yo kwagura ubushyuhe (CTE): hafi 4.0–4.5×10⁻⁶/K.
● Irwanya cyane HCl, NH₃, O₂, na shimi irimo chlorine.
Uruhare rwa SiC Cantilever Paddle mu gutunganya LPCVD
Muri porogaramu zose, sisitemu za LPCVD ni imwe mu zikoreshwa cyane kuri SiC Cantilever Paddles.
Uburyo nka:
● Gushyira polysilicon mu mwanya wayo.
Rit silicon nitride (Si₃N₄).
● Gushyira okiside mu gitutu gito.
Ubusanzwe bikora hagati ya 500°C na 900°C, akenshi mu gihe cy'imikorere miremire n'ahantu hakoreshwa imiti cyane.
Muri izi sisitemu, agapira k'imashini gakora imirimo myinshi y'ingenzi icyarimwe.
Ubwa mbere, itanga uburyo bwo gutwara ubwato buhamye bw’amabati bwinjira kandi busohoka mu ifuru. Kubera ko amatanura agezweho ashobora gutwara amabati amagana kuri buri gice, ndetse no guhinduka gato k’umukandara bishobora gutuma amabati adakora neza, intera idahindagurika, cyangwa ubwinshi bw’imitsi.
Icya kabiri, umukandara ugira uruhare runini mu guhuza ubushyuhe. Ubushyuhe bwinshi bwa SiC butuma ubushyuhe bukwirakwira neza ku buryo bungana ku nyubako y’inkunga, bigabanura ubushyuhe bw’aho buherereye bushobora kugira ingaruka ku guhuza kw’ubushyuhe.
Icya gatatu, gukora uduce duto cyane ni ingenzi cyane. Uduce duto twica umusaruro utaziguye, cyane cyane mu gukora ibikoresho bya semiconductor bigezweho no mu buryo buhanitse. Bitewe n'imiterere ya ceramic yayo ikomeye kandi irwanya ingese cyane, SiC ifite isuku nyinshi igabanya cyane ibyago byo gushwanyagurika kw'uduce ugereranije n'ibikoresho gakondo.
Mu mikorere ya LPCVD igezweho, guhagarara neza kw'igihe kirekire kw'ikirenge bigira ingaruka zitaziguye:
● imiterere y'ubugari bwa firime.
● Gusubiramo ifunguro rya wafer kuva kuri wafer kugeza kuri wafer.
● igihe cyo gukora mu itanura.
Ningbo VET Energy ikora cyane mu gukora grafiti igezweho, keramiki ya silikoni, n'ibice bya semiconductor bifite CVD byagenewe ibikorwa byo gukora semiconductor bikomeye.
Ibicuruzwa bya Core semiconductor birimo:
● Ipadiri rya SiC Cantilever
C SiC Coated Graphite Susceptor
● Imodoka yo gutwaramo ifunze ya SiC
● Ibice bya SiC bifite igitambaro cya Halfmoon
● Ibikoresho by'ibumba bya karuboni-karuboni
● Ifu yoroshye ya Graphite Felt n'ifu yoroshye ya Graphite Felt
Ibi bicuruzwa bikoreshwa cyane muri:
● Sisitemu za Epitaxy
● Imashini zikora amashanyarazi za LPCVD
● Amatanura yo gukwirakwiza
● Sisitemu zo gukuraho kristu za SiC
● Ibikoresho bitunganya ubushyuhe buri hejuru.
Bitewe n’iterambere ryihuse rya SiC n’inganda zikora ibikoresho bya semiconductor bigezweho, icyifuzo cy’ibikoresho by’itanura bifite isuku nyinshi kandi bihamye kizakomeza kwiyongera. Muri urwo rwego, ikoranabuhanga rya SiC Cantilever Paddle rizaguma ari kimwe mu bintu by’ibanze bishyigikira gutunganya ibikoresho bya semiconductor byo mu gisekuru gitaha.
Igihe cyo kohereza: Gicurasi-14-2026