Metswako ea khabone / khabone(e tla bitsoa "C / C kapa CFC") ke mofuta oa thepa e kopaneng e thehiloeng khaboneng 'me e matlafatsoa ke faeba ea khabone le lihlahisoa tsa eona (preform ea faeba ea khabone). E na le inertia ea khabone le matla a phahameng a faeba ea khabone. E na le thepa e ntle ea mechini, ho hanyetsa mocheso, ho hanyetsa mafome, ho damping ha khohlano le litšobotsi tsa ho tsamaisa mocheso le motlakase.
CVD-SiCHo roala ho na le litšobotsi tsa sebopeho se ts'oanang, thepa e nyane, ho hanyetsa mocheso o phahameng, ho hanyetsa oxidation, bohloeki bo phahameng, ho hanyetsa asiti le alkali le reagent ea manyolo, e nang le thepa e tsitsitseng ea 'mele le ea lik'hemik'hale.
Likarolo tse ka sehloohong:
1. Khanyetso ea ho chesoa ha oxidation mochesong o phahameng:Khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho fihla ho 1600 C.
2. Bohloeki bo phahameng: bo entsoe ka ho kenngoa ha mouoane ka lik'hemik'hale tlas'a boemo ba chlorination bo phahameng ba mocheso.
3. Khanyetso ea khoholeho ea mobu: ho thatafala ho hoholo, bokaholimo bo kopaneng, likaroloana tse tšesaane.
4. Ho hanyetsa mafome: asiti, alkali, letsoai le li-reagent tsa tlhaho.
| CVD SiC薄膜基本物理性能 Thepa ea motheo ea 'mele ea CVD SiCsekoahelo | |
| 性质 / Thepa | 典型数值 / Tloaelehileng Value |
| 晶体结构 / Crystal Structure | FCC β phase 多晶，主要為(111）取向) |
| 密度 / Density | 3.21 g/cm³ |
| 硬度 / Ho thatafala | 2500 维氏硬度 (moroalo oa 500g) |
| 晶粒大小 / Grain SiZe | 2 ~ 10μm |
| 纯度 / Chemical Purity | 99.99995% |
| 热容 / Heat Capacity | 640 J·kg-1·K-1 |
| 升华温度 / Sublimation Mocheso | 2700℃ |
| 抗弯强度 / Flexural Strength | 415 MPa RT lintlha tse 4 |
| 杨氏模量 / Young's Modulus | 430 Gpa kobeho ea 4pt, 1300℃ |
| 导热系数 / Thermal Conductivity | 300W·m-1·K-1 |
| 热膨胀系数 / Thermal Expansion(CTE) | 4.5×10-6K-1 |
VET Energy ke moetsi oa 'nete oa lihlahisoa tsa graphite le silicon carbide tse ikhethileng tse nang le liphahlo tse fapaneng joalo ka ho koahela ka SiC, ho koahela ka TaC, ho koahela ka carbon e kang khalase, ho koahela ka carbon e nang le pyrolytic, jj., e ka fana ka likarolo tse fapaneng tse ikhethileng bakeng sa indasteri ea semiconductor le photovoltaic.
Sehlopha sa rona sa botekgeniki se tsoa litsing tse holimo tsa lipatlisiso tsa lehae, se ka u fa litharollo tse ling tsa lisebelisoa tsa profeshenale.
Re ntse re ntshetsa pele mekgwa e tswetseng pele ho fana ka thepa e tswetseng pele haholoanyane, mme re se re sebelitse theknoloji e ikgethang e nang le patente, e ka etsang hore kamano pakeng tsa ho roala le substrate e tiee mme e se ke ya kgaohana haholo.
Re u amohela ka mofuthu ho etela fektheri ea rona, ha re buisaneng ka ho eketsehileng!
