Te hiahia me te whakamahinga o ngā uku SiC kawe wera teitei i roto i te mara semiconductor

I tēnei wā,kāpira silicon (SiC)He rauemi uku kawe wera tēnei e rangahauhia ana i te kāinga me tāwāhi. He tino teitei te kawe wera ariā o te SiC, ā, ka taea e ētahi momo tioata te eke ki te 270W/mK, he mea ārahi kē tēnei i roto i ngā rauemi kore-kawe. Hei tauira, ka kitea te whakamahinga o te kawe wera SiC i roto i ngā rauemi papa o ngā taputapu haurua-ira, ngā rauemi uku kawe wera teitei, ngā whakamahana me ngā pereti whakamahana mō te tukatuka haurua-ira, ngā rauemi kāpū mō te wahie karihi, me ngā mowhiti hiri hau mō ngā papu kōpeke.

 

Te tono okarāhe siliconi roto i te mara haurua-ira

He taputapu tukatuka nui ngā kōpae huri me ngā taputapu mō te hanga anga silicon i roto i te umanga haurua-ira. Mena he rino maka, he maitai waro rānei te mea hanga o te kōpae huri, he poto tōna roanga mahi, ā, he nui tōna tauwehenga whānui wera. I te wā e tukatukahia ana ngā anga silicon, inā koa i te wā e huri tere ana, e whakakanapahia ana rānei, nā te kakahu me te rerekētanga wera o te kōpae huri, he uaua ki te kī he papatahi me te ōrite te anga silicon. Ko te kōpae huri he mea hanga kingā uku karāhe siliconhe iti te pakaru nā te mea he pakeke rawa, ā, he rite tonu te tauwehenga whānui wera ki ērā o ngā anga silicon, nō reira ka taea te huri me te oro i te tere tere.

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Hei tāpiritanga, ina hangaia ngā papa silicon, me whakamahana i te pāmahana teitei, ā, he maha ngā wā ka whakamahia he taputapu silicon carbide hei kawe. He ātete ki te wera, ā, kāore e whakangaro. Ka taea te pani i te waro taimana (DLC) me ētahi atu paninga ki te mata hei whakapai ake i te mahi, hei whakaiti i te kino o te papa, me te ārai i te horapa o te poke.

Hei tāpiri atu ki tēnā, hei māngai mō ngā rauemi haurua-āputa whānui o te whakatupuranga tuatoru, he āhuatanga kei ngā rauemi karaihe kotahi silicon carbide pērā i te whānui o te āputa-āputa nui (tata ki te 3 ngā wā o te Si), te kawe wera nui (tata ki te 3.3 ngā wā o te Si, 10 rānei ngā wā o te GaAs), te tere hekenga hiko nui (tata ki te 2.5 ngā wā o te Si) me te papa hiko pakaru nui (tata ki te 10 ngā wā o te Si, 5 rānei ngā wā o te GaAs). Ka whakakapia e ngā taputapu SiC ngā hapa o ngā taputapu rauemi haurua-āputa tuku iho i roto i ngā tono mahi, ā, kei te piki haere te rongonui o ngā haurua-āputa hiko.

 

Kua tino piki ake te hiahia mō ngā uku silicon carbide kawe wera teitei

I te whanaketanga tonu o te pūtaiao me te hangarau, kua tino piki ake te hiahia mō te whakamahinga o ngā uku silicon carbide i roto i te mara o te semiconductor, ā, ko te kawe wera teitei he tohu matua mō tōna whakamahinga i roto i ngā wāhanga taputapu hanga semiconductor. Nō reira, he mea nui kia whakapakarihia te rangahau mō ngā uku silicon carbide kawe wera teitei. Ko te whakaiti i te ihirangi hāora whatunga, te whakapai ake i te kiato, me te whakahaere tika i te tohatoha o te wāhanga tuarua i roto i te whatunga ko ngā tikanga matua hei whakapai ake i te kawe wera o ngā uku silicon carbide.

I tēnei wā, he iti noa ngā rangahau mō ngā uku silicon carbide kawe wera teitei i tōku whenua, ā, he nui tonu te āputa i whakaritea ki te taumata o te ao. Ko ngā huarahi rangahau ā muri ake nei ko:
●Whakapakari i te tukanga whakarite o te paura uku silicon carbide. Ko te whakarite o te paura silicon carbide he tino parakore, he iti te hāora te pūtake o te whakarite o ngā uku silicon carbide he tino wera te kawe;
● Whakakaha ake i te kōwhiringa o ngā āwhina whakakā me ngā rangahau ariā e pā ana;
●Whakapakari i te rangahau me te whanaketanga o ngā taputapu sintering kounga teitei. Mā te whakahaere i te tukanga sintering kia whiwhi ai i tētahi hanganga moroiti e tika ana, he mea tika kia whiwhi ai i ngā uku silicon carbide kawe wera teitei.

Ngā mahi hei whakapai ake i te kawe wera o ngā uku silicon carbide

Ko te mea nui ki te whakapai ake i te kawe wera o ngā uku SiC ko te whakaiti i te auau marara o te phonon me te whakanui ake i te ara kore utu toharite phonon. Ka pai ake te kawe wera o te SiC mā te whakaiti i te porosity me te kiato rohe witi o ngā uku SiC, te whakapai ake i te parakore o ngā rohe witi SiC, te whakaiti i ngā poke whatunga SiC, ngā hapa whatunga rānei, me te whakanui ake i te kaikawe tuku wera i roto i te SiC. I tēnei wā, ko te arotau i te momo me te ihirangi o ngā āwhina sintering me te maimoatanga wera pāmahana teitei ngā mahi matua hei whakapai ake i te kawe wera o ngā uku SiC.

 

① Te arotau i te momo me te ihirangi o ngā āwhina whakawera

He maha ngā momo āwhina whakamahana ka tāpirihia i te wā e whakarite ana i ngā uku SiC kawe wera nui. I roto i ēnei, he nui te awe o te momo me te ihirangi o ngā āwhina whakamahana ki te kawe wera o ngā uku SiC. Hei tauira, ka ngāwari te rewa o ngā huānga Al, O rānei i roto i ngā āwhina whakamahana pūnaha Al2O3 ki roto i te whatunga SiC, ka puta he takoto kau me ngā hapa, ka piki ake te auau marara o te phonon. Hei tāpiri, ki te iti te ihirangi o ngā āwhina whakamahana, he uaua ki te whakamahana me te whakakīkī i te rauemi, engari ko te ihirangi nui o ngā āwhina whakamahana ka piki ake te paru me ngā hapa. Mā te nui rawa o ngā āwhina whakamahana wai ka ārai pea i te tipu o ngā pata SiC me te whakaiti i te ara kore utu toharite o ngā phonon. Nō reira, hei whakarite i ngā uku SiC kawe wera nui, me whakaiti te ihirangi o ngā āwhina whakamahana i te mea ka taea, me te whakatutuki i ngā whakaritenga o te kiato whakamahana, me te ngana ki te whiriwhiri i ngā āwhina whakamahana he uaua ki te rewa i roto i te whatunga SiC.

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*Ngā āhuatanga wera o ngā uku SiC ina tāpirihia ngā āwhina sintering rerekē

I tēnei wā, ko ngā uku SiC pēhi-wera i whakamahanatia ki te BeO hei āwhina whakamahana, ko rātou te kawe wera mōrahi i te pāmahana rūma (270W·m-1·K-1). Heoi, he rauemi tino paitini te BeO, ā, he mate pukupuku, ā, kāore e pai mō te whakamahinga whānui i roto i ngā taiwhanga, i ngā mara ahumahi rānei. Ko te pūwāhi eutectic iti rawa o te pūnaha Y2O3-Al2O3 ko 1760℃, he āwhina whakamahana wai-āhua noa mō ngā uku SiC. Heoi, nā te mea he ngāwari te rewa o te Al3+ ki roto i te whatunga SiC, ina whakamahia tēnei pūnaha hei āwhina whakamahana, ko te kawe wera pāmahana rūma o ngā uku SiC he iti iho i te 200W·m-1·K-1.

Kāore ngā huānga whenua onge pērā i te Y, Sm, Sc, Gd me te La e ngāwari te wairewa i roto i te whatunga SiC, ā, he nui te kaha o te hāora, ka taea ai te whakaiti i te nui o te hāora o te whatunga SiC. Nō reira, ko te pūnaha Y2O3-RE2O3 (RE=Sm, Sc, Gd, La) he āwhina whakamahana noa mō te whakarite i ngā uku SiC kawe wera teitei (>200W·m-1·K-1). Mēnā ka whakamahia te pūnaha āwhina whakamahana Y2O3-Sc2O3 hei tauira, he nui te uara rerekētanga katote o te Y3+ me te Si4+, ā, kāore ngā mea e rua e uru ki te otinga totoka. He iti te wairewatanga o te Sc i roto i te SiC parakore i te 1800~2600℃, tata ki te (2~3)×1017ngota·cm-3.

 

② Maimoatanga wera pāmahana teitei

He pai te whakamahana pāmahana teitei o ngā uku SiC ki te whakakore i ngā hapa whatunga, ngā nekehanga me ngā ahotea toenga, te whakatairanga i te huringa hanganga o ētahi rauemi kore-āhua ki ngā tioata, me te whakaiti i te pānga marara phonon. Hei tāpiri, ka taea e te whakamahana pāmahana teitei te whakatairanga i te tipu o ngā kakano SiC, ā, i te mutunga ka whakapai ake i ngā āhuatanga wera o te rauemi. Hei tauira, i muri i te whakamahana pāmahana teitei i te 1950°C, ka piki ake te tauwehenga horapa wera o ngā uku SiC mai i te 83.03mm2·s-1 ki te 89.50mm2·s-1, ā, ka piki ake te kawe wera pāmahana rūma mai i te 180.94W·m-1·K-1 ki te 192.17W·m-1·K-1. Ka whakapai ake te whakamahana pāmahana teitei i te kaha tango waikura o te āwhina sintering i runga i te mata me te whatunga SiC, ā, ka whakakaha ake te hononga i waenga i ngā kakano SiC. I muri i te whakamahana pāmahana teitei, kua tino pai ake te kawe wera pāmahana rūma o ngā uku SiC.


Wā tuku: Oketopa-24-2024
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