I te whanaketanga o te hanga haurua-haurua ki ngā āhuahanga taputapu iti ake, te kaha ake o te whakaputanga o ngā wafer, me ngā paerewa whakahaere poke e tino kaha haere ana, kei te aro atu ngā taputapu tukatuka wera ki ngā wero hangarau kāore i kitea i mua. Ko ngā tukanga pēnei i te LPCVD, te waikura wera, te tohatoha i ngā dopant, me te whakamahana pāmahana teitei e hiahia ana inaianei ehara i te mea ko te ōritetanga pāmahana anake, engari ko te roa ake o te wā mahi o ngā taputapu, te iti ake o te whakaputanga matūriki, me te pai ake o te tukurua o te tukanga.
Ahakoa he maha ngā wā ka warewarehia ki ngā hau tukatuka, ngā ngongo oumu, ngā matū whakatakotoranga rānei, ko te hoe cantilever te tino whakatau i te whanonga o ngā wafer i roto i ngā taiao pāmahana teitei. I roto i te maha o ngā whare hanga matatau, kāore e kiia he wāhanga pau noa iho, engari he rauemi matua e āhei ai te tukatuka semiconductor pumau me te taea te tukurua.
He aha te hoe Cantilever SiC?
Ko te Hoe Cantilever SiC he wāhanga hanganga silicon carbide tino parakore e whakamahia ana i roto i ngā oumu horapa semiconductor me ngā pūnaha LPCVD. He mea hanga i te nuinga o te wā hei hanganga kurupae cantilever roa e taea ai te tautoko i ngā poti quartz, SiC rānei i te wā e tukatukahia ana i te pāmahana teitei.
Ko te tikanga ka hangaia te waahanga ma te whakamahi i:
● te karawiti silicon kua whakakākanotia anō (RSiC)
● matū matū kua pupū ake i te kohu silicon carbide (CVD SiC)
● ngā rauemi SiC honohono-tauhohenga kiato-teitei
E ai ki ngā raraunga rauemi i whakaputaina e CoorsTek me Saint-Gobain Performance Ceramics, ko ngā rauemi SiC tino parakore e whakaatu ana i ēnei mea:
● Te kawe wera: tata ki te 120–200 W/m·K i te pāmahana rūma
● Te pāmahana mahi mōrahi i roto i te hau kore mahi: neke atu i te 1600°C.
● Tauwehenga whakawhanui wera (CTE): tata ki te 4.0–4.5×10⁻⁶/K.
● He ātete tino pai ki te HCl, NH₃, O₂, me te matū tukanga kua whakamāotaotia.
Te Tūranga o te Hoe Cantilever SiC i roto i te Tukatuka LPCVD
I roto i ngā tono katoa, ko ngā pūnaha LPCVD tētahi o ngā whakamahinga tino nui mō ngā Hoe Cantilever SiC.
Ngā tukanga pēnei i:
● te whakatakotoranga polysilicon.
● silicon nitride (Si₃N₄).
● te whakatakotoranga waikura pēhanga iti.
Ko te tikanga ka whakahaerehia i waenga i te 500°C me te 900°C, i raro i ngā huringa tukanga roa me ngā taiao matū tino tauhohe.
I roto i ēnei pūnaha, he maha ngā mahi nui a te hoe cantilever i te wā kotahi.
Tuatahi, ka whakaratohia he kawe ā-mīhini pumau mō ngā poti wafer e tomo ana, e puta ana hoki i te ngongo oumu. Nā te mea ka taea e ngā oumu poutū o ēnei rā te kawe i ngā rau wafer mō ia puranga, ahakoa te iti o te huringa o te hoe ka arahi pea ki te he o te tūnga o te wafer, te mokowā kore pumau, te kohikohinga ahotea ā-mīhini rānei.
Tuarua, he mea nui te mahi a te hoe ki te ōritetanga o te wera. Mā te kawe wera teitei o te SiC ka taea te tohatoha ōrite te wera i te hanganga tautoko, ka whakaitihia ngā pikinga wera ā-rohe ka pā pea ki te ōritetanga o te whakatakotoranga.
Tuatoru, he mea nui te iti o te whakaputanga matūriki. He kaipatu tika ngā matūriki haurua-ārahi, inā koa i roto i te hanga haurua-ārahi arorau me te mana matatau. Nā tōna hanganga uku matotoru me te ātete kaha ki te waikura, ka whakaitihia e te SiC parakore teitei te mōrearea o te maturuturunga matūriki ki te whakataurite ki ngā rauemi tuku iho.
I roto i ngā raina whakaputa LPCVD matatau, ka pā tika te pumau ā-ahu mō te wā roa o te hoe ki:
● te matotoru o te kiriata.
● te āheinga tāruarua o te angaanga-ki-te-angaanga.
● te wā e mahi ai te oumu.
He tohunga a Ningbo VET Energy ki te hanga i ngā karāpeti matatau, ngā uku silicon carbide, me ngā wāhanga haurua-whakarewa kua pania ki te CVD, i hangaia mō ngā taiao hanga haurua-whakarewa uaua.
Ko ngā hua semiconductor matua ko:
● Hoe Cantilever SiC
● SiC whakakikorua Graphite Susceptor
● Kaikawe Angiangi Panipanihia SiC
● Ngā Wāhanga Marama-Hawhe kua Pania ki te SiC
● Ngā Para Whakakotahi Waro-Waro
● He Wāhi Whakairoiro Ngāwari me te Wāhi Whakairoiro Pakari
E whakamahia whānuitia ana ēnei hua i roto i:
● Ngā pūnaha epitaxy
● Ngā tauhohenga LPCVD
● Ngā oumu horapa
● Ngā pūnaha tipu tioata SiC
● Ngā taputapu tukatuka wera pāmahana teitei.
I te tere o te tipu o te SiC me te hanga hiko matatau, ka piki haere tonu te hiahia mō ngā wāhanga oumu tino parakore, tino pumau. I roto i tēnei horopaki, ka noho tonu te hangarau SiC Cantilever Paddle hei tetahi o ngā huānga matua e tautoko ana i te tukatuka hiko o te whakatupuranga e whai ake nei.
Wā tuku: Mei-14-2026