Silicon Carbide Coated Graphite Substrate yeSemiconductor, MOCVD Susceptor

Tsananguro pfupi:

VET Energy SiC Coated Susceptor chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye chinodzivirira kukukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

Nzvimbo Yekwakabva:Zhejiang, China (Mainland)

Kuumbwa kweMakemikari:SiC yakafukidzwa negraphite

Simba rekuchinjika:470Mpa

Kufambisa kwekupisa:300 W/mK

Hunhu:Zvakakwana

Basa:CVD-SiC

Kushandiswa:Semiconductor / Photovoltaic

Kuwanda:3.21 g/cc

Kuwedzera kwekupisa:4 10-6/K

Dota: <5ppm

Muenzaniso:Inowanikwa

Kodhi yeHS:6903100000

Tumira email kwatiri Dhaunirodha sePDF

Ruzivo rweChigadzirwa

Matagi eChigadzirwa

VET Energy SiC Coated SusceptorImhinduro inoshanda zvakanyanya yakagadzirwa zvakanaka kuti ipe mashandiro akavimbika uye anowirirana muhupenyu hwese, ichizadzisa zvinodiwa zvakanyanya zvekugadzira semiconductor. Ichi chigadzirwa chakanakira vatakuri veMOCVD wafer carriers nedzimwe nzira dzekugadzirisa wafer dzinoda kugadzikana uye kunyatsorongeka. Kudzivirira kwayo kukurwa kwevhu nesimba kunoita kuti ive sarudzo yepamusoro kune nzvimbo dzinogara kwenguva refu uye kutsungirira kwemakemikari.

YeduSiC Coated Graphite SusceptorChinomira sechinhu chakakosha mukugadzirwa kwema semiconductor, chichishandisa tekinoroji yeVET Energy ine patent kuti ive nekuchena kwakanyanya, kufanana kwepamusoro kwe coating, uye kugadzikana kunoshamisa kwekupisa. Coating iyi inosimudzira graphite substrate nekusagona kushandisa makemikari akawanda uye hupenyu hwebasa hwakareba zvakanyanya. Kuzvipira kweVET Energy kune mhando kwakaita kuti SiC-coated susceptor inosangana nezvinodiwa zviri kuchinja zvemusika we graphite wafer carrier, zvichiisa mwero wepamusoro weSiC-coated graphite susceptors dzinoshandiswa muMaitiro eMOCVD.

Zvinhu Zvikuru zveSiC Coated Susceptors:

1. Kuramba Kupisa Kwepamusoro:Ramba uchitsungirira tembiricha inosvika 1700℃, zvichiita kuti ive yakakodzera mamiriro ekugadzirisa akanyanya.

2. Kuchena Kwakanyanya uye Kufanana Kwekupisa:Inovimbisa mhedzisiro yakafanana, yakakosha kuneZvishandiso zveMOCVDuye mamwe mashandisirwo akarurama.

3. Kuramba Kura Kwakanaka Kwazvo:Inokwanisa kusimba kune acid, alkali, munyu, uye zvimwe zvinhu zvakasiyana-siyana zve organic.

4. Kuoma Kwepamusoro Kwakawedzerwa:Nzvimbo yacho yakamanikana ine zvidimbu zvidiki zvinopa kugara kwenguva refu uye kugara kwenguva refu.

5. Hupenyu Hwebasa Hwakawedzerwa:Yakagadzirwa kuti ishande zvakanaka, inobudirira kupfuura susceptors dzakajairwa dzakaputirwa nesilicon carbide munzvimbo dzakaoma dzekugadzirisa.

Semugadziri anotungamira, VET Energy inonyanya kugadzira graphite yakagadzirwa uyezvigadzirwa zvesilicon carbidenesarudzo dzakasiyana-siyana dzekuputira, kusanganisiraSiC coating, Kuputira TaC, kuputira kabhoni kwakaita segirazi, uye pyrolytic carbon coating. Tinodada nekushandira maindasitiri e semiconductor ne photovoltaic, tichipa silicon carbide coated graphite susceptors inosangana nezvinodiwa zvekushanda.

Chikwata chedu chehunyanzvi, chine ruzivo kubva kumasangano makuru ekutsvagisa emuno, chakazvipira kusimudzira mhinduro dzezvinhu zvinoenderana nezvinodiwa zviri kuchinja zveSiC-yakafukidzwa negrafiti susceptormusika. Kuburikidza nemaitiro edu ekupa patent, VET Energy yakagadzira tekinoroji yakasarudzika iyo inovandudza zvakanyanya simba rekubatana pakati pesilicon carbide coating ne substrate, zvichideredza njodzi yekuparadzaniswa uye kuwedzera kuvimbika kwenguva refu.

Mashandisirwo uye Mabhenefiti muSemiconductor Processing

IyoSiC coating yeMOCVDinogonesamudziviriri wegirafitizvikamu zvekuchengetedza hunhu hwakanaka munzvimbo dzinopisa zvakanyanya uye dzinopisa, izvo zvakakosha pakugadzirwa kwema semiconductor nemazvo. Izvi zvikamu zve graphite zvakaputirwa neSiC zvinonyanya kukosheswa mumabasa anoda silicon carbide-coated susceptors kutivatakuri vewafer yegraphite, izvo zvinoda kugadzikana kwakanyanya kwekupisa, kuchena, uye kuramba kukanganiswa nemakemikari.

Nehunyanzvi hwedu hwepamusoro hwekuputira silicon carbide, VET Energy inoramba ichitsigira musika wekutakura graphite wafer nekupa maitiro akagadzirwa uye anoshanda zvakanyanya.Zvishongedzo zvegrafiti zvakaputirwa neSiCiyo inotarisa matambudziko akatarisana neindasitiri, kubva kumagadzirirwo eMOCVD kusvika kumashandisirwo akachena kwazvo mumunda wesemiconductor.