Maitiro ekukura kwe monocrystalline silicon anoitwa zvizere mumunda wekupisa. Munda wekupisa wakanaka unobatsira kuvandudza mhando yemakristaro uye une kugona kwakanyanya kwekristaro. Dhizaini yemunda wekupisa inonyanya kusarudza shanduko mukupisa kwemazinga mumunda wekupisa unoshanduka uye kuyerera kwegasi mukamuri remoto. Musiyano wezvinhu zvinoshandiswa mumunda wekupisa unotarisa zvakananga hupenyu hwemunda wekupisa. Munda wekupisa usina musoro haungonetsi chete kurima makristaro anosangana nezvinodiwa zvemhando yepamusoro, asiwo haugone kukura monocrystalline yakazara pasi pezvinodiwa zvemaitiro. Ndokusaka indasitiri yesilicon ye monocrystalline inodhonza zvakananga ichiona dhizaini yemunda wekupisa se tekinoroji inonyanya kukosha uye inoisa vashandi vakawanda nezvinhu zvekushandisa mukutsvaga nekuvandudza munda wekupisa.
Sisitimu yekupisa inoumbwa nezvinhu zvakasiyana-siyana zvekupisa. Tinongotaura muchidimbu zvinhu zvinoshandiswa mumunda wekupisa. Nezvekugoverwa kwekupisa mumunda wekupisa uye kukanganisa kwazvinoita pakudhonza kwekristaro, hatizozviongorore pano. Zvinhu zvekupisa zvinoreva chimiro nechikamu chekudzivirira kupisa mukamuri yefuru ye vacuum yekukura kwekristaro, izvo zvakakosha pakugadzira kugoverwa kwakakodzera kwekushisa kwakatenderedza semiconductor melt nekristaro.
1. Zvinhu zvekuvaka munda wekupisa
Chinhu chikuru chinotsigira nzira yekudhonza zvakananga pakukura monocrystalline silicon igrafiti yakachena kwazvo. Zvinhu zvegrafiti zvine basa rakakosha muindasitiri yemazuva ano. Zvinogona kushandiswa sezvikamu zvemukati memunda wekupisa zvakaita semahita, machubhu ekutungamira, zviyo zvemoto, machubhu ekudzivirira kupisa, matireyi ekupisira, nezvimwewo. mukugadzira monocrystalline silicon nenzira yeCzochralski.
Zvinhu zveGraphiteZvinosarudzwa nekuti zviri nyore kugadzirira zvakawanda, zvinogona kugadziriswa uye hazvipindi tembiricha yakakwira. Kabhoni iri muchimiro chedhaimani kana graphite ine poindi yekunyunguduka yakakwira kupfuura chero chinhu kana compound. Zvinhu zveGraphite zvakasimba, kunyanya patembiricha yakakwira, uye kufambiswa kwadzo kwemagetsi nekupisa kwakanakawo. Kufambiswa kwadzo kwemagetsi kunoita kuti dzikwanise kushandiswa sehitazvinhu. Ine coefficient inogutsa yekupisa, iyo inobvumira kupisa kunokonzerwa nehita kuti kugovaniswe zvakaenzana kune crucible nedzimwe nzvimbo dzemunda wekupisa. Zvisinei, pakupisa kwakanyanya, kunyanya padaro refu, nzira huru yekufambisa kupisa imwaranzi.
Zvikamu zvegrafiti zvinotanga zvagadzirwa nezvidimbu zvitete zvecarbonaceous zvakasanganiswa nebinder uye zvinogadzirwa ne extrusion kana isostatic pressing. Zvikamu zvegrafiti zvemhando yepamusoro zvinowanzo dzvanywa ne isostatically. Chidimbu chose chinotanga chaiswa carbon uye chozoiswa graphit patembiricha yakakwira kwazvo, pedyo ne3000°C. Zvikamu zvinogadzirwa kubva muzvidimbu izvi zvinowanzo chenurwa mumhepo ine chlorine patembiricha yakakwira kuti zvibvise kusvibiswa kwesimbi kuti zvienderane nezvinodiwa neindasitiri ye semiconductor. Zvisinei, kunyangwe mushure mekucheneswa kwakakodzera, mwero wekusvibiswa kwesimbi wakakwira zvakanyanya kupfuura unobvumirwa nezvinhu zvesilicon monocrystalline. Saka, kungwarira kunofanirwa kutorwa mukugadzirwa kwenzvimbo yekupisa kudzivirira kusvibiswa kwezvikamu izvi kuti zvisapinde pamusoro pe melt kana crystal.
Zvinhu zvegrafiti zvinopinda zvishoma mumvura, izvo zvinoita kuti zvive nyore kuti simbi yasara iri mukati isvike pamusoro. Pamusoro pezvo, silicon monoxide iri mugasi rekuchenesa rakatenderedza pamusoro pegrafiti inogona kupinda muzvinhu zvakawanda yoita chimwe chinhu.
Mahita ekare emonocrystalline silicon furnace aigadzirwa nesimbi dzinoramba kushanda dzakadai setungsten nemolybdenum. Nekukura kuri kuita tekinoroji yekugadzira graphite, hunhu hwemagetsi hwekubatana pakati pezvikamu zvegraphite hwave hwakagadzikana, uye mahita emonocrystalline silicon furnace akatsiva zvachose tungsten, molybdenum nezvimwe zvinhu. Parizvino, graphite inoshandiswa zvakanyanya iisostatic graphite. Tekinoroji yekugadzirira isostatic graphite yenyika yangu yakasarira kumashure, uye zvinhu zvakawanda zvegraphite zvinoshandiswa muindasitiri ye photovoltaic yemuno zvinotengeswa kubva kunze kwenyika. Vagadziri vekunze veisostatic graphite vanosanganisira SGL yeGermany, Tokai Carbon yeJapan, Toyo Tanso yeJapan, nezvimwewo. MuCzochralski monocrystalline silicon furnaces, dzimwe nguva zvinhu zveC/C zvinosanganiswa zvinoshandiswa, uye zvakatanga kushandiswa kugadzira mabhoti, nzungu, macrucibles, load plates nezvimwe zvinhu. Zvinhu zvakagadzirwa nekabhoni/kabhoni (C/C) izvinhu zvakagadzirwa nekabhoni zvakasimbiswa nekabhoni zvine hunhu hwakanaka hwakadai sesimba guru, modulus huru, kuwedzera kwekushisa kwakaderera, kufambiswa kwemagetsi kwakanaka, kusimba kwekuputika kwakakwira, simba rekukweva rakaderera, kuramba kupisa kwakaderera, kuramba kupisa kwakaderera, kuramba kupisa kwakakwira, uye kuramba kupisa kwakakwira. Parizvino, zvinoshandiswa zvakanyanya mundege, kumhanya, zvinhu zvehupenyu nedzimwe nzvimbo sezvinhu zvitsva zvinodzivirira kupisa kwakakwira. Parizvino, matambudziko makuru anosangana neC/C composites dzemumba achiri matambudziko emitengo nekukura kwemaindasitiri.
Kune zvimwe zvinhu zvakawanda zvinoshandiswa kugadzira nzvimbo dzinopisa. Graphite yakasimbiswa nefiber yekabhoni ine hunhu huri nani hwemakanika; asi inodhura zvakanyanya uye ine zvimwe zvinodiwa pakugadzira.Silicon carbide (SiC)chinhu chiri nani pane graphite muzvinhu zvakawanda, asi inodhura zvakanyanya uye yakaoma kugadzirira zvikamu zvakakura. Zvisinei, SiC inowanzoshandiswa seKuputira kweCVDkuwedzera hupenyu hwezvikamu zve graphite zvinosangana negasi re silicon monoxide rinoparadza, uye zvinogonawo kuderedza kusvibiswa kunobva ku graphite. Kuvhara kwe CVD silicon carbide kwakasimba kunodzivirira zvinosvibisa zviri mukati mezvinhu zve graphite zvisingasvikwi pamusoro.
Imwe iCVD carbon, iyo inogonawo kugadzira dense layer pamusoro pechikamu chegraphite. Zvimwe zvinhu zvinodzivirira kupisa kwakanyanya, zvakaita semolybdenum kana ceramic zvinhu zvinogona kugara pamwe chete nenharaunda, zvinogona kushandiswa kana pasina njodzi yekusvibisa melt. Zvisinei, oxide ceramics inowanzo shomeka pakushandisa zvinhu zvegraphite pakupisa kwakanyanya, uye pane dzimwe sarudzo shoma kana zvichidikanwa kuputira. Imwe ihexagonal boron nitride (dzimwe nguva inonzi white graphite nekuda kwehunhu hwakafanana), asi hunhu hwemakanika hwakashata. Molybdenum inowanzo shandiswa zvine musoro pakupisa kwakanyanya nekuda kwemutengo wayo uri pakati nepakati, mwero wakaderera wekupararira mumakristaro esilicon, uye chiyero chakaderera chekuparadzanisa cheinenge 5×108, izvo zvinobvumira huwandu hwakati hwemolybdenum kusvibiswa usati waparadza chimiro chekristaro.
2. Zvinhu zvekudzivirira kupisa
Chinhu chinonyanya kushandiswa pakudzivirira kupisa icarbon felt mumhando dzakasiyana-siyana. Carbon felt yakagadzirwa neshinda dzakatetepa, dzinoshanda sekudzivirira kupisa nekuti dzinovhara mwaranzi yekupisa kakawanda pachinhambwe chipfupi. Carbon felt yakapfava inorukwa kuita mapepa matete, ayo anobva achekwa kuita chimiro chaunoda uye akakombama zvakasimba kuita radius inonzwisisika. Cured felts inoumbwa nezvinhu zvakafanana zvefiber, uye carbon-containing binder inoshandiswa kubatanidza fibers dzakapararira kuita chinhu chakasimba uye chakaumbwa. Kushandisa chemical vapor deposition yecarbon panzvimbo pe binder kunogona kuvandudza mashandiro e mechanical echinhu chacho.
Kazhinji, pamusoro pekunze kwechinhu chinodziya chekupisa chinoputira thermal insulation chinoputirwa ne graphite coating inoenderera mberi kana foil kuderedza kukuvadzwa uye kupera pamwe nekusvibiswa kwezvikamu. Kunewo mamwe marudzi ezvinhu zvinodziya zve carbon-based thermal insulation, zvakaita se carbon foam. Kazhinji, zvinhu zvakagadziriswa graphit zvinofarirwa nekuti graphitization inoderedza zvakanyanya nzvimbo yepamusoro ye fiber. Kubuda kwezvishandiso izvi munzvimbo yakakwirira kunodzikira zvakanyanya, uye zvinotora nguva shoma kupomba vira kuti riendeswe kunzvimbo yakakodzera ye vacuum. Chimwe chinhu chinosanganisira C/C, chine hunhu hwakanaka senge huremu hwakareruka, kushivirira kukuvara kwakanyanya uye simba rakawanda. Kushandiswa muminda yekupisa kutsiva zvikamu zve graphite kunoderedza zvakanyanya kuwanda kwekutsiviwa kwezvikamu zve graphite, kunovandudza mhando ye monocrystalline uye kugadzikana kwekugadzirwa.
Zvichienderana nekupatsanurwa kwezvinhu zvisina kugadzirwa, carbon felt inogona kukamurwa kuita polyacrylonitrile-based carbon felt, viscose-based carbon felt, uye pitch-based carbon felt.
Kabhoni yakagadzirwa nePolacrylonitrile ine dota rakawanda. Mushure mekurapwa nekupisa kwakanyanya, faibha imwe chete inova isina kusimba. Panguva yekushanda, zviri nyore kugadzira guruva kuti risvibise nharaunda yechoto. Panguva imwe chete, faibha inogona kupinda nyore nyore mumaburi nepanzira yekufema yemuviri wemunhu, izvo zvinokuvadza hutano hwevanhu. Kabhoni yakagadzirwa neViscose ine simba rakanaka rekudzivirira kupisa. Yakapfava mushure mekurapwa nekupisa uye hazvisi nyore kugadzira guruva. Zvisinei, chikamu chefaibha yakagadzirwa neviscose hachina kurongeka, uye kune migero yakawanda pamusoro pefaibha. Zviri nyore kugadzira magasi akadai seC02 pasi pemhepo inooxidizing yeCZ silicon furnace, zvichikonzera kunaya kweoxygen necarbon elements mu monocrystalline silicon material. Vagadziri vakuru vanosanganisira German SGL nedzimwe makambani. Parizvino, inonyanya kushandiswa muindasitiri yesemiconductor monocrystalline icarbon felt yakagadzirwa nepitch, iyo ine simba rakaipa rekudzivirira kupisa kupfuura viscose-based carbon felt, asi pitch-based carbon felt ine kuchena kwakanyanya uye kubudiswa kweguruva kwakaderera. Vagadziri vanosanganisira Kureha Chemical yeJapan neOsaka Gas.
Nekuti chimiro chekabhoni chakagadzirwa chisina kugadziriswa, hazvisi nyore kushanda. Iye zvino makambani mazhinji agadzira chinhu chitsva chekudzivirira kupisa chakavakirwa pakabhoni chakagadzirwa nekabhoni. Kabhoni yakagadzirwa, inonziwo hard felt, ikabhoni yakagadzirwa ine chimiro chakati uye inozvitsigira mushure mekunge soft felt yaiswa resin, laminated, cured uye carbonized.
Hunhu hwekukura kwe monocrystalline silicon hunokanganiswa zvakananga nemamiriro ekunze ekupisa, uye zvinhu zve carbon fiber zvinodzivirira kupisa zvinoita basa guru munharaunda iyi. Carbon fiber thermal insulation soft felt ichiri nebhenefiti yakakura muindasitiri ye photovoltaic semiconductor nekuda kwemutengo wayo, mhedzisiro yakanaka yekupisa kupisa, dhizaini inochinjika uye chimiro chinogadziriswa. Pamusoro pezvo, carbon fiber hard thermal insulation felt ichave nenzvimbo yakakura yekuvandudza mumusika wezvinhu zve thermal field nekuda kwesimba rayo uye kushanda kwakanyanya. Takazvipira kutsvagisa nekuvandudza mumunda wezvinhu zve thermal insulation, uye kuramba tichivandudza mashandiro echigadzirwa kuti tisimudzire kubudirira nekukura kweindasitiri ye photovoltaic semiconductor.
Nguva yekutumira: Chikumi-12-2024