Cov txheej txheem loj hlob ntawm monocrystalline silicon yog ua tiav hauv thaj chaw thermal. Ib qho chaw thermal zoo yog qhov zoo rau kev txhim kho qhov zoo ntawm cov siv lead ua thiab muaj kev ua haujlwm crystallization siab dua. Kev tsim ntawm thaj chaw thermal feem ntau txiav txim siab qhov kev hloov pauv ntawm qhov kub thiab txias hauv thaj chaw thermal dynamic thiab cov roj ntws hauv lub cub tawg chamber. Qhov sib txawv ntawm cov ntaub ntawv siv hauv thaj chaw thermal ncaj qha txiav txim siab lub neej ua haujlwm ntawm thaj chaw thermal. Ib qho chaw thermal tsis tsim nyog tsis yog tsuas yog nyuaj rau kev loj hlob cov siv lead ua uas ua tau raws li qhov yuav tsum tau ua zoo, tab sis kuj tsis tuaj yeem loj hlob tiav monocrystalline raws li qee qhov kev cai. Qhov no yog vim li cas kev lag luam monocrystalline silicon ncaj qha-rub suav tias kev tsim thaj chaw thermal yog cov thev naus laus zis tseem ceeb tshaj plaws thiab nqis peev ntau tus neeg ua haujlwm thiab cov khoom siv hauv kev tshawb fawb thiab kev txhim kho thaj chaw thermal.
Lub tshuab cua sov yog tsim los ntawm ntau yam khoom siv cua sov. Peb tsuas yog qhia luv luv txog cov khoom siv siv hauv lub tshav kub. Raws li qhov kev faib tawm kub hauv lub tshav kub thiab nws qhov cuam tshuam rau kev rub siv lead ua, peb yuav tsis tshuaj xyuas nws ntawm no. Cov khoom siv cua sov hais txog cov qauv thiab qhov rwb thaiv tsev thermal hauv lub tshuab cua sov ntawm kev loj hlob siv lead ua, uas yog qhov tseem ceeb rau kev tsim kom muaj kev faib tawm kub kom haum nyob ib puag ncig cov semiconductor yaj thiab siv lead ua.
1. Cov khoom siv thermal field
Cov khoom siv txhawb nqa yooj yim rau txoj kev rub ncaj qha los cog monocrystalline silicon yog graphite ntshiab heev. Cov ntaub ntawv graphite ua lub luag haujlwm tseem ceeb heev hauv kev lag luam niaj hnub no. Lawv tuaj yeem siv ua cov khoom siv hauv tshav kub xws licov cua sov, cov raj xa dej, cov crucibles, cov raj rwb thaiv tsev, cov tais crucible, thiab lwm yam hauv kev npaj cov monocrystalline silicon los ntawm txoj kev Czochralski.
Cov ntaub ntawv graphiteraug xaiv vim tias lawv yooj yim npaj rau hauv cov ntim loj, tuaj yeem ua tiav thiab tiv taus qhov kub siab. Cov pa roj carbon hauv daim ntawv ntawm pob zeb diamond lossis graphite muaj qhov kub siab dua li txhua yam khoom lossis cov khoom sib xyaw. Cov ntaub ntawv graphite muaj zog heev, tshwj xeeb tshaj yog thaum kub siab, thiab lawv cov hluav taws xob thiab thermal conductivity kuj zoo heev. Nws cov hluav taws xob conductivity ua rau nws tsim nyog ua ib qholub tshuab cua sovcov khoom siv. Nws muaj cov coefficient thermal conductivity zoo, uas tso cai rau cov cua sov tsim los ntawm lub tshuab cua sov kom faib sib npaug rau lub crucible thiab lwm qhov ntawm lub tshav kub. Txawm li cas los xij, thaum muaj qhov kub siab, tshwj xeeb tshaj yog nyob deb, hom kev hloov pauv cua sov tseem ceeb yog kev tawg.
Cov khoom graphite feem ntau yog ua los ntawm cov khoom me me uas muaj carbonaceous sib xyaw nrog cov binder thiab tsim los ntawm extrusion lossis isostatic pressing. Cov khoom graphite zoo feem ntau yog isostatically pressed. Tag nrho cov khoom raug carbonized ua ntej thiab tom qab ntawd graphitized ntawm qhov kub siab heev, ze li ntawm 3000 ° C. Cov khoom ua los ntawm cov khoom no feem ntau raug purified hauv huab cua uas muaj chlorine ntawm qhov kub siab kom tshem tawm cov hlau ua qias tuaj kom ua tau raws li qhov xav tau ntawm kev lag luam semiconductor. Txawm li cas los xij, txawm tias tom qab purification kom zoo, qib ntawm cov hlau ua qias tuaj yog ntau qhov kev txiav txim siab siab dua li qhov tso cai rau cov khoom siv silicon monocrystalline. Yog li ntawd, yuav tsum tau ceev faj hauv kev tsim thermal teb kom tiv thaiv kev ua qias tuaj ntawm cov khoom no los ntawm kev nkag mus rau hauv qhov chaw yaj lossis siv lead ua.
Cov ntaub ntawv graphite yooj yim nkag mus rau hauv, uas ua rau nws yooj yim rau cov hlau seem sab hauv mus txog saum npoo. Tsis tas li ntawd, cov silicon monoxide uas muaj nyob rau hauv cov pa roj purge nyob ib puag ncig ntawm graphite tuaj yeem nkag mus rau hauv feem ntau cov ntaub ntawv thiab ua rau muaj kev cuam tshuam.
Cov cua sov silicon monocrystalline thaum ntxov tau ua los ntawm cov hlau refractory xws li tungsten thiab molybdenum. Nrog rau kev loj hlob ntawm cov thev naus laus zis ua graphite, cov khoom hluav taws xob ntawm kev sib txuas ntawm cov khoom graphite tau ruaj khov, thiab cov cua sov silicon monocrystalline tau hloov pauv tag nrho tungsten, molybdenum thiab lwm yam khoom siv cua sov. Tam sim no, cov khoom siv graphite feem ntau siv yog isostatic graphite. kuv lub teb chaws cov thev naus laus zis npaj graphite isostatic yog qhov rov qab qis dua, thiab feem ntau ntawm cov khoom siv graphite siv hauv kev lag luam photovoltaic hauv tsev yog xa los ntawm txawv teb chaws. Cov chaw tsim khoom graphite isostatic txawv teb chaws feem ntau suav nrog Lub Tebchaws Yelemees SGL, Nyiv Tokai Carbon, Nyiv Toyo Tanso, thiab lwm yam. Hauv Czochralski monocrystalline silicon furnaces, C / C composite cov ntaub ntawv qee zaum siv, thiab lawv tau pib siv los tsim cov bolts, txiv ntoo, crucibles, load phaj thiab lwm yam khoom. Cov khoom sib xyaw ua los ntawm carbon/carbon (C/C) yog cov khoom sib xyaw ua los ntawm carbon fiber uas muaj ntau yam khoom zoo xws li lub zog tshwj xeeb, modulus tshwj xeeb, coefficient nthuav dav thermal qis, conductivity hluav taws xob zoo, tawg toughness siab, lub ntiajteb txawj nqus qis, thermal shock tsis kam, corrosion tsis kam, thiab kub tsis kam. Tam sim no, lawv siv dav hauv aerospace, racing, biomaterials thiab lwm yam teb ua cov khoom siv tshiab uas tiv taus kub tsis kam. Tam sim no, cov teeb meem tseem ceeb uas cov khoom sib xyaw ua los ntawm C/C hauv tsev ntsib yog cov nqi thiab teeb meem kev lag luam.
Muaj ntau lwm yam khoom siv los ua cov teb thermal. Cov carbon fiber reinforced graphite muaj cov khoom siv kho tshuab zoo dua; tab sis nws kim dua thiab muaj lwm yam xav tau rau kev tsim.Silicon carbide (SiC)yog cov khoom siv zoo dua li graphite hauv ntau yam, tab sis nws kim dua thiab nyuaj rau npaj cov khoom loj. Txawm li cas los xij, SiC feem ntau siv uaCVD txheejkom ua kom cov khoom graphite uas raug cov pa roj silicon monoxide uas muaj zog ua rau lub neej ntev dua, thiab tseem tuaj yeem txo cov pa phem los ntawm graphite. Cov txheej txheem CVD silicon carbide uas tuab heev tiv thaiv cov pa phem hauv cov khoom graphite me me kom tsis txhob mus txog saum npoo.
Lwm qhov yog CVD carbon, uas kuj tseem tuaj yeem tsim ib txheej tuab saum toj ntawm graphite. Lwm cov ntaub ntawv tiv taus kub siab, xws li molybdenum lossis cov ntaub ntawv ceramic uas tuaj yeem nyob ua ke nrog ib puag ncig, tuaj yeem siv qhov twg tsis muaj kev pheej hmoo ntawm kev ua qias tuaj rau cov yaj. Txawm li cas los xij, oxide ceramics feem ntau raug txwv hauv lawv qhov kev siv rau cov ntaub ntawv graphite ntawm qhov kub siab, thiab muaj ob peb txoj kev xaiv yog tias xav tau kev rwb thaiv tsev. Ib qho yog hexagonal boron nitride (qee zaum hu ua graphite dawb vim muaj cov khoom zoo sib xws), tab sis cov khoom siv kho tshuab tsis zoo. Molybdenum feem ntau siv tau zoo rau cov xwm txheej kub siab vim nws tus nqi nruab nrab, tus nqi diffusion qis hauv silicon crystals, thiab tus lej sib cais qis heev ntawm kwv yees li 5 × 108, uas tso cai rau qee qhov ntawm molybdenum ua ntej rhuav tshem cov qauv siv lead ua.
2. Cov ntaub ntawv rwb thaiv tsev thermal
Cov khoom siv rwb thaiv tsev feem ntau yog cov ntaub carbon uas muaj ntau hom sib txawv. Cov ntaub carbon yog ua los ntawm cov fiber nyias nyias, uas ua haujlwm ua cov rwb thaiv tsev vim lawv thaiv cov hluav taws xob thermal ntau zaus dhau qhov luv luv. Cov ntaub carbon mos mos yog woven rau hauv cov ntawv nyias nyias ntawm cov ntaub ntawv, uas tom qab ntawd raug txiav mus rau hauv cov duab xav tau thiab khoov kom nruj rau hauv lub vojvoog tsim nyog. Cov ntaub kho tau ua los ntawm cov ntaub ntawv fiber zoo sib xws, thiab cov khoom siv uas muaj carbon yog siv los txuas cov fibers uas tawg mus rau hauv cov khoom khov kho thiab zoo nkauj dua. Kev siv cov pa tshuaj lom neeg ntawm cov pa carbon es tsis yog cov khoom siv binder tuaj yeem txhim kho cov khoom siv kho tshuab ntawm cov khoom.
Feem ntau, qhov chaw sab nraud ntawm cov khoom siv rwb thaiv tsev thermal kho tau coated nrog cov txheej graphite lossis ntawv ci kom txo qhov yaig thiab hnav nrog rau cov khoom me me. Lwm hom carbon-based thermal insulation cov ntaub ntawv kuj muaj, xws li carbon ua npuas ncauj. Feem ntau, cov ntaub ntawv graphitized yog qhov nyiam vim tias graphitization txo qhov chaw ntawm cov fiber ntau heev. Cov pa tawm ntawm cov ntaub ntawv siab-cheeb tsam no raug txo qis heev, thiab nws siv sijhawm tsawg dua los twj lub cub tawg mus rau qhov chaw nqus tsev. Lwm qhov yog C / C composite khoom, uas muaj cov yam ntxwv zoo xws li qhov hnyav sib dua, kev puas tsuaj siab thiab lub zog siab. Siv rau hauv cov teb thermal los hloov cov khoom graphite txo qhov zaus ntawm graphite hloov pauv, txhim kho monocrystalline zoo thiab kev ruaj khov ntawm kev tsim khoom.
Raws li kev faib tawm cov khoom siv raw, cov pa roj carbon tuaj yeem muab faib ua polyacrylonitrile-based carbon felt, viscose-based carbon felt, thiab pitch-based carbon felt.
Cov pa roj carbon uas ua los ntawm polyacrylonitrile muaj cov tshauv ntau heev. Tom qab kho kub heev, cov fiber ib leeg yuav tawg yooj yim. Thaum lub sijhawm ua haujlwm, nws yooj yim los tsim cov hmoov av los ua rau lub cub tawg puas tsuaj. Tib lub sijhawm, cov fiber tuaj yeem nkag mus rau hauv cov qhov hws thiab txoj hlab pa ntawm tib neeg lub cev, uas ua rau tib neeg muaj kev noj qab haus huv tsis zoo. Cov pa roj carbon uas ua los ntawm viscose muaj kev ua haujlwm zoo ntawm kev rwb thaiv tsev. Nws mos heev tom qab kho cua sov thiab tsis yooj yim los tsim cov hmoov av. Txawm li cas los xij, qhov seem ntawm cov fiber raw uas ua los ntawm viscose tsis xwm yeem, thiab muaj ntau qhov grooves ntawm qhov chaw fiber. Nws yooj yim los tsim cov pa roj xws li C02 nyob rau hauv huab cua oxidizing ntawm CZ silicon cub tawg, ua rau muaj cov pa oxygen thiab cov pa roj carbon hauv cov khoom siv monocrystalline silicon. Cov chaw tsim khoom tseem ceeb suav nrog German SGL thiab lwm lub tuam txhab. Tam sim no, qhov siv dav tshaj plaws hauv kev lag luam semiconductor monocrystalline yog cov pa roj carbon uas ua los ntawm pitch, uas muaj kev ua haujlwm rwb thaiv tsev tsis zoo dua li cov pa roj carbon uas ua los ntawm viscose, tab sis cov pa roj carbon uas ua los ntawm pitch muaj kev huv dua thiab cov pa phem tsawg dua. Cov chaw tsim khoom suav nrog Nyiv Pooj Kureha Chemical thiab Osaka Gas.
Vim tias cov duab ntawm cov pa roj carbon tsis ruaj khov, nws tsis yooj yim rau kev ua haujlwm. Tam sim no ntau lub tuam txhab tau tsim cov khoom siv rwb thaiv tsev tshiab raws li cov pa roj carbon kho-kho cov pa roj carbon. Cov pa roj carbon kho, tseem hu ua cov pa roj nyuaj, yog cov pa roj carbon nrog qee yam duab thiab cov khoom siv tus kheej tom qab cov pa roj mos mos tau impregnated nrog cov resin, laminated, kho thiab carbonized.
Qhov zoo ntawm kev loj hlob ntawm monocrystalline silicon yog cuam tshuam ncaj qha los ntawm qhov chaw sov, thiab cov ntaub ntawv rwb thaiv tsev carbon fiber ua lub luag haujlwm tseem ceeb hauv qhov chaw ib puag ncig no. Cov ntaub ntawv rwb thaiv tsev carbon fiber tseem muaj qhov zoo dua hauv kev lag luam photovoltaic semiconductor vim nws qhov zoo dua tus nqi, cov nyhuv rwb thaiv tsev zoo heev, kev tsim qauv yooj ywm thiab cov duab hloov kho tau. Tsis tas li ntawd, cov ntaub ntawv rwb thaiv tsev carbon fiber nyuaj yuav muaj qhov chaw loj hlob ntau dua hauv kev lag luam khoom siv thermal teb vim nws lub zog thiab kev ua haujlwm siab dua. Peb cog lus rau kev tshawb fawb thiab kev txhim kho hauv kev lag luam ntawm cov ntaub ntawv rwb thaiv tsev thermal, thiab txuas ntxiv txhim kho cov khoom ua tau zoo los txhawb kev vam meej thiab kev txhim kho ntawm kev lag luam photovoltaic semiconductor.
Lub sijhawm tshaj tawm: Lub Rau Hli-12-2024