Inqubo yokukhula kwe-silicon e-monocrystalline yenziwa ngokuphelele ensimini yokushisa. Insimu enhle yokushisa ikhuthaza ukuthuthukisa ikhwalithi yamakristalu futhi inokusebenza kahle okuphezulu kwe-crystallization. Ukwakheka kwensimu yokushisa kunquma kakhulu izinguquko ekushiseni kwezinga lokushisa ensimini yokushisa enamandla kanye nokugeleza kwegesi ekamelweni lesithando. Umehluko ezintweni ezisetshenziswa ensimini yokushisa unquma ngqo impilo yensimu yokushisa. Insimu yokushisa engenangqondo ayinzima nje kuphela ukukhulisa amakristalu ahlangabezana nezidingo zekhwalithi, kodwa futhi ayikwazi ukukhulisa i-monocrystalline ephelele ngaphansi kwezidingo ezithile zenqubo. Yingakho imboni ye-silicon e-monocrystalline edonswa ngqo ibheka ukwakheka kwensimu yokushisa njengobuchwepheshe obuyinhloko futhi itshala imali enkulu yabasebenzi kanye nezinsizakusebenza ocwaningweni nasekuthuthukisweni kwensimu yokushisa.
Uhlelo lokushisa lwakhiwe ngezinto ezahlukahlukene zensimu yokushisa. Sethula kafushane izinto ezisetshenziswa ensimini yokushisa. Ngokuphathelene nokusatshalaliswa kwezinga lokushisa ensimini yokushisa kanye nomthelela walo ekudonsweni kwekristalu, ngeke sikuhlaziye lapha. Izinto zensimu yokushisa zibhekisela esakhiweni kanye nengxenye yokushisa ekamelweni lesithando se-vacuum lokukhula kwekristalu, okubalulekile ekudaleni ukusatshalaliswa kwezinga lokushisa okufanele nxazonke kokuncibilika kwe-semiconductor kanye nekristalu.
1. Izinto zokwakha insimu yokushisa
Izinto eziyisisekelo zokusekela zendlela yokudonsa ngqo yokukhulisa i-monocrystalline silicon yi-graphite ehlanzekile kakhulu. Izinto ze-graphite zidlala indima ebaluleke kakhulu embonini yanamuhla. Zingasetshenziswa njengezingxenye zesakhiwo sensimu yokushisa njengeama-heater, amashubhu okuqondisa, izitsha zomlilo, amashubhu okushisa, amathreyi okubethela, njll. ekulungiseleleni i-silicon e-monocrystalline ngendlela ye-Czochralski.
Izinto ze-Graphitezikhethwa ngoba kulula ukuzilungiselela ngobuningi obukhulu, zingacutshungulwa futhi ziyamelana namazinga okushisa aphezulu. I-Carbon ngesimo sedayimane noma i-graphite inephuzu lokuncibilika eliphakeme kunanoma iyiphi into noma inhlanganisela. Izinto ze-graphite ziqinile impela, ikakhulukazi emazingeni okushisa aphezulu, futhi ukuhanjiswa kwazo kagesi nokushisa nakho kuhle kakhulu. Ukuhanjiswa kwazo kagesi kwenza zifaneleke njenge-i-heaterimpahla. Ine-coefficient eyanelisayo yokuqhuba ukushisa, evumela ukushisa okukhiqizwa yi-heater ukuthi kusatshalaliswe ngokulinganayo endaweni yokusha kanye nezinye izingxenye zensimu yokushisa. Kodwa-ke, emazingeni okushisa aphezulu, ikakhulukazi emabangeni amade, imodi yokudlulisa ukushisa eyinhloko imisebe.
Izingxenye ze-graphite ekuqaleni zenziwe ngezinhlayiya ezincane ze-carbonaceous ezixutshwe ne-binder futhi zakhiwe ngokucindezela kwe-extrusion noma kwe-isostatic. Izingxenye ze-graphite ezisezingeni eliphezulu zivame ukucindezelwa nge-isostatically. Lonke ucezu luqala ngokwenziwa nge-carbon bese lufakwa nge-graphit emazingeni okushisa aphezulu kakhulu, asondele ku-3000°C. Izingxenye ezicutshungulwa kulezi zingcezu eziphelele zivame ukuhlanzwa emoyeni oqukethe i-chlorine emazingeni okushisa aphezulu ukuze kususwe ukungcola kwensimbi ukuze kuhlangatshezwane nezidingo zemboni ye-semiconductor. Kodwa-ke, ngisho nangemva kokuhlanzwa okufanele, izinga lokungcola kwensimbi liphakeme kakhulu kunalokho okuvunyelwe ezintweni ze-silicon monocrystalline. Ngakho-ke, kumelwe kuqashelwe ekwakhiweni kwensimu yokushisa ukuvimbela ukungcola kwalezi zingxenye ukuthi kungangeni endaweni encibilikisiwe noma ekristalu.
Izinto ze-graphite zingena kancane emanzini, okwenza kube lula ngensimbi esele ngaphakathi ukufinyelela phezulu. Ngaphezu kwalokho, i-silicon monoxide ekhona kugesi yokuhlanza ezungeze ubuso be-graphite ingangena ezintweni eziningi futhi isabela.
Ama-heater e-silicon furnace asekuqaleni e-monocrystalline ayenziwe ngezinsimbi ezingaphikisi njenge-tungsten ne-molybdenum. Njengoba ubuchwepheshe bokucubungula i-graphite bukhula, izakhiwo zikagesi zokuxhumana phakathi kwezingxenye ze-graphite ziye zaqina, kanti ama-heater e-silicon furnace e-monocrystalline athathe indawo ye-tungsten, i-molybdenum nezinye izinto ezishisayo. Njengamanje, izinto ze-graphite ezisetshenziswa kakhulu yi-isostatic graphite. Ubuchwepheshe bokulungiselela i-isostatic graphite yezwe lami busemuva kakhulu, futhi izinto eziningi ze-graphite ezisetshenziswa embonini ye-photovoltaic yasekhaya zithunyelwa kwamanye amazwe. Abakhiqizi be-graphite ye-isostatic yangaphandle bahlanganisa kakhulu i-SGL yaseJalimane, i-Tokai Carbon yaseJapan, i-Toyo Tanso yaseJapan, njll. Ema-furnace e-silicon e-monocrystalline yaseCzochralski, ngezinye izikhathi kusetshenziswa izinto ze-C/C ezihlanganisiwe, futhi seziqalile ukusetshenziswa ekwenzeni ama-bolts, amantongomane, ama-crucible, amapuleti omthwalo nezinye izingxenye. Izinhlanganisela ze-carbon/carbon (C/C) ziyizinhlanganisela ezisekelwe ku-carbon fibre eziqiniswe nge-carbon ezinezici ezinhle kakhulu ezifana namandla aphezulu athile, i-modulus ephezulu ethile, i-coefficient yokwanda kokushisa okuphansi, ugesi omuhle, ukuqina kokuphuka okuphezulu, amandla adonsela phansi aphansi athile, ukumelana nokushaqeka kokushisa, ukumelana nokugqwala, kanye nokumelana nokushisa okuphezulu. Njengamanje, zisetshenziswa kabanzi ezindiza, emjahweni, ezintweni eziphilayo nakwamanye amasimu njengezinto zokwakha ezintsha ezimelana nokushisa okuphezulu. Njengamanje, izinkinga ezinkulu ezibhekene nezinhlanganisela ze-C/C zasekhaya ziseyinkinga yezindleko kanye nokuthuthukiswa kwezimboni.
Kunezinye izinto eziningi ezisetshenziswa ukwenza amasimu okushisa. I-graphite eqiniswe nge-carbon fiber inezakhiwo ezingcono zomshini; kodwa ibiza kakhulu futhi inezinye izidingo zomklamo.I-silicon carbide (i-SiC)kuyinto engcono kune-graphite ezicini eziningi, kodwa ibiza kakhulu futhi kunzima ukulungiselela izingxenye ezinkulu. Kodwa-ke, i-SiC ivame ukusetshenziswa njenge-Ukugqoka kwe-CVDukwandisa impilo yezingxenye ze-graphite ezivezwe kugesi we-silicon monoxide oqothulayo, futhi kunganciphisa nokungcola okuvela ku-graphite. I-CVD silicon carbide coating ejiyile ivimbela ngempumelelo ukungcola okungaphakathi kwezinto ze-graphite ezinezimbobo ezincane ukuthi kungafiki ebusweni.
Enye yi-CVD carbon, engakha futhi ungqimba oluqinile ngaphezu kwengxenye ye-graphite. Ezinye izinto ezimelana nokushisa okuphezulu, njenge-molybdenum noma izinto ze-ceramic ezingahlala ndawonye nemvelo, zingasetshenziswa lapho kungekho bungozi bokungcolisa ukuncibilika. Kodwa-ke, i-oxide ceramics ngokuvamile ilinganiselwe ekusebenzeni kwayo ezintweni ze-graphite emazingeni okushisa aphezulu, futhi kunezinye izinketho ezimbalwa uma kudingeka ukufakelwa. Enye i-hexagonal boron nitride (ngezinye izikhathi ibizwa ngokuthi i-white graphite ngenxa yezakhiwo ezifanayo), kodwa izakhiwo zemishini azinhle. I-Molybdenum ngokuvamile isetshenziswa ngokufanele ezimweni zokushisa okuphezulu ngenxa yezindleko zayo eziphakathi, izinga lokusabalalisa eliphansi kumakristalu e-silicon, kanye ne-coefficient ephansi kakhulu yokuhlukaniswa cishe engu-5×108, evumela inani elithile lokungcola kwe-molybdenum ngaphambi kokubhubhisa isakhiwo sekristalu.
2. Izinto zokushisa ezishisayo
Izinto zokuvikela ezisetshenziswa kakhulu yi-carbon felt ngezindlela ezahlukene. I-carbon felt yenziwe ngemicu emincane, esebenza njengokuvikela ngoba ivimba imisebe yokushisa izikhathi eziningi ibanga elifushane. I-soft carbon felt ilukwa ibe amashidi amancane ezinto, abese esikwa abe yisimo esifunwayo bese egotshwa ngokuqinile abe yi-radius efanelekile. Ama-cured felt akhiwe ngezinto ezifanayo ze-fiber, futhi i-carbon-containing binder isetshenziselwa ukuxhuma imicu ehlakazekile ibe yinto eqinile futhi enomumo. Ukusetshenziswa kokufakwa kwe-carbon vapor yamakhemikhali esikhundleni se-binder kungathuthukisa izakhiwo zemishini zento.
Ngokuvamile, ubuso bangaphandle be-thermal insulation curing felt bumbozwa nge-graphite coating noma i-foil eqhubekayo ukunciphisa ukuguguleka nokuguguleka kanye nokungcola kwezinhlayiya. Kukhona nezinye izinhlobo zezinto zokushisa ezisekelwe ku-carbon, njenge-carbon foam. Ngokuvamile, izinto ezenziwe nge-graphitized zithandwa kakhulu ngoba i-graphitization inciphisa kakhulu indawo engaphezulu ye-fiber. Ukukhishwa kwalezi zinto eziphezulu kuncishisiwe kakhulu, futhi kuthatha isikhathi esincane ukupompa isithando somlilo siye endaweni efanele yokushaja. Enye into ehlanganisiwe ye-C/C, enezici ezivelele njengesisindo esincane, ukubekezelela umonakalo omkhulu kanye namandla aphezulu. Ukusetshenziswa emasimini okushisa ukufaka esikhundleni izingxenye ze-graphite kunciphisa kakhulu imvamisa yokufakwa esikhundleni kwezingxenye ze-graphite, kuthuthukisa ikhwalithi ye-monocrystalline kanye nokuqina kokukhiqiza.
Ngokusho kokuhlukaniswa kwezinto zokusetshenziswa, i-carbon felt ingahlukaniswa ibe yi-polyacrylonitrile-based carbon felt, i-viscose-based carbon felt, kanye ne-pitch-based carbon felt.
I-carbon felt esekelwe ku-Polyacrylonitrile inomlotha omningi. Ngemva kokwelashwa ngokushisa okuphezulu, i-fiber eyodwa iyaqina. Ngesikhathi sokusebenza, kulula ukukhiqiza uthuli ukuze kungcoliswe indawo yesithando. Ngesikhathi esifanayo, i-fiber ingangena kalula ezimbotsheni nasendleleni yokuphefumula yomzimba womuntu, okuyingozi empilweni yomuntu. I-carbon felt esekelwe ku-Viscose inamandla okushisa ashisayo. Ithambile ngemva kokwelashwa ngokushisa futhi akulula ukukhiqiza uthuli. Kodwa-ke, ingxenye enqamulayo ye-fiber eluhlaza esekelwe ku-viscose ayijwayelekile, futhi kunemifantu eminingi ebusweni be-fiber. Kulula ukukhiqiza amagesi afana ne-C02 ngaphansi kwesimo se-oxidizing sesithando se-silicon se-CZ, okubangela ukuna kwe-oxygen kanye nezinto ze-carbon ezintweni ze-silicon ze-monocrystalline. Abakhiqizi abayinhloko bahlanganisa i-German SGL nezinye izinkampani. Njengamanje, esetshenziswa kakhulu embonini ye-semiconductor monocrystalline yi-carbon felt esekelwe ku-pitch, enokusebenza okubi kakhulu kokushisa kune-carbon felt esekelwe ku-viscose, kodwa i-carbon felt esekelwe ku-pitch inobumsulwa obuphezulu kanye nokukhishwa kothuli okuphansi. Abakhiqizi bahlanganisa i-Kureha Chemical yaseJapan kanye ne-Osaka Gas.
Ngenxa yokuthi ukuma kwe-carbon felt akukalungiswa, akulula ukusebenza. Manje izinkampani eziningi sezisungule izinto ezintsha zokuvikela ukushisa ezisekelwe ku-carbon felt-cured carbon felt. I-Cured carbon felt, ebizwa nangokuthi i-hard felt, iyi-carbon felt enesimo esithile kanye nempahla ezisekelayo ngemuva kokuba i-soft felt ifakwe i-resin, i-laminated, i-cured futhi i-carbonized.
Ikhwalithi yokukhula kwe-silicon ye-monocrystalline ithintwa ngqo yindawo eshisayo, futhi izinto zokuvala ukushisa ze-carbon fiber zidlala indima ebalulekile kule ndawo. I-soft felt ye-carbon fiber insulation thermal isenenzuzo enkulu embonini ye-semiconductor ye-photovoltaic ngenxa yenzuzo yayo yezindleko, umphumela omuhle kakhulu wokuvala ukushisa, ukwakheka okuguquguqukayo kanye nesimo esingenziwa ngokwezifiso. Ngaphezu kwalokho, i-carbon fiber hard thermal insulation felt izoba nendawo enkulu yokuthuthukiswa emakethe yezinto zensimu yokushisa ngenxa yamandla ayo athile kanye nokusebenza okuphezulu. Sizibophezele ekucwaningeni nasekuthuthukisweni emkhakheni wezinto zokuvala ukushisa, futhi siqhubeke nokwenza ngcono ukusebenza komkhiqizo ukuze sikhuthaze ukuchuma kanye nentuthuko yemboni ye-semiconductor ye-photovoltaic.
Isikhathi sokuthunyelwe: Juni-12-2024