Inkqubo yokukhula kwe-monocrystalline silicon yenziwa ngokupheleleyo kwintsimi yobushushu. Intsimi elungileyo yobushushu inceda ekuphuculeni umgangatho weekristale kwaye inokusebenza okuphezulu kwekristale. Uyilo lwentsimi yobushushu lumisela kakhulu utshintsho kwi-gradients yobushushu kwintsimi yobushushu eguquguqukayo kunye nokuhamba kwegesi kwigumbi lesithando. Umahluko kwizinto ezisetyenziswa kwintsimi yobushushu umisela ngokuthe ngqo ubomi benkonzo yentsimi yobushushu. Intsimi yobushushu engafanelekanga ayinzima nje kuphela ukukhulisa iikristale ezihlangabezana neemfuno zomgangatho, kodwa ayinakukhulisa i-monocrystalline epheleleyo phantsi kweemfuno ezithile zenkqubo. Yingakho ishishini le-silicon ye-monocrystalline ethe ngqo lijonga uyilo lwentsimi yobushushu njengolona buchwepheshe luphambili kwaye lityala imali eninzi yabasebenzi kunye nezixhobo zezinto kuphando kunye nophuhliso lwentsimi yobushushu.
Inkqubo yobushushu yenziwe ngezinto ezahlukeneyo zentsimi yobushushu. Siza kwazisa ngokufutshane nje izinto ezisetyenziswa kwintsimi yobushushu. Ngokuphathelele ukusasazwa kobushushu kwintsimi yobushushu kunye nempembelelo yako ekutsaleni kwekristale, asizukuyihlalutya apha. Izinto zentsimi yobushushu zibhekisa kwisakhiwo kunye nenxalenye yobushushu kwigumbi lesithando se-vacuum lokukhula kwekristale, nto leyo ebalulekileyo ekudaleni ukusasazwa kobushushu obufanelekileyo obujikeleze i-semiconductor melt kunye nekristale.
1. Izinto zokwakha intsimi eshushu
Izixhobo ezisisiseko zokuxhasa indlela yokutsala ngokuthe ngqo ukukhulisa i-monocrystalline silicon yi-graphite ecocekileyo kakhulu. Izixhobo ze-graphite zidlala indima ebaluleke kakhulu kushishino lwanamhlanje. Zingasetyenziswa njengezixhobo zesakhiwo sentsimi yobushushu ezifanaizifudumezi, iityhubhu zesikhokelo, iziqwenga zomlilo, iityhubhu zokuthintela ubushushu, iitreyi ezisetyenziswa ekutshiseni, njl.njl. ekulungiseleleni i-silicon ye-monocrystalline ngendlela yeCzochralski.
Izinto zeGraphitezikhethwa kuba kulula ukuzilungisa ngobuninzi, zinokucutshungulwa kwaye ziyamelana namaqondo obushushu aphezulu. Ikhabhoni ekwimo yedayimani okanye igrafiti ineqondo lokunyibilika eliphezulu kunayo nayiphi na into okanye i-compound. Izinto zegrafiti zinamandla kakhulu, ingakumbi kumaqondo obushushu aphezulu, kwaye ukuhanjiswa kwazo kombane kunye nobushushu nako kulungile. Ukuhanjiswa kwayo kombane kwenza ukuba ifaneleke njenge-isifudumeziizinto. Ine-coefficient eyanelisayo yokuqhuba ubushushu, evumela ubushushu obuveliswa yi-heater ukuba busasazwe ngokulinganayo kwi-crucible nakwezinye iindawo zentsimi yobushushu. Nangona kunjalo, kumaqondo obushushu aphezulu, ingakumbi kumgama omde, imo ephambili yokudlulisa ubushushu yimitha.
Iinxalenye zegrafiti ekuqaleni zenziwe ngamasuntswana amancinci e-carbonaceous axutywe ne-binder aze enziwe ngokucinezela okanye ngokucinezela nge-isostatic. Iinxalenye zegrafiti ezikumgangatho ophezulu zihlala zicinezelwa nge-isostatically. Lonke eli candelo liqala lifakwe i-carbon emva koko lifakwe i-graphit kumaqondo obushushu aphezulu kakhulu, kufutshane ne-3000°C. Iinxalenye ezicutshungulwa kwezi ziqwenga ziphela zihlala zicocwa kwindawo enee-chlorine kumaqondo obushushu aphezulu ukuze kususwe ungcoliseko lwesinyithi ukuze kuhlangatyezwane neemfuno zoshishino lwe-semiconductor. Nangona kunjalo, nokuba sele kucociwe ngokufanelekileyo, inqanaba longcoliseko lwesinyithi liphezulu kakhulu kunelo livunyelweyo kwizixhobo ze-silicon monocrystalline. Ke ngoko, kufuneka kuthathwe unonophelo kuyilo lwentsimi yobushushu ukuthintela ungcoliseko lwezi zinto ukuba zingangeni kumphezulu onyibilikayo okanye wekristale.
Izinto zegrafiti zingena kancinci emanzini, nto leyo eyenza kube lula ukuba isinyithi esisele ngaphakathi sifikelele kumphezulu. Ukongeza, i-silicon monoxide ekhoyo kwigesi yokucoca ejikeleze umphezulu wegrafiti inokungena kwizinto ezininzi ize iphendule.
Izifudumezi ze-silicon furnace ze-monocrystalline zakuqala zenziwe ngeentsimbi ezirhabaxa ezifana ne-tungsten kunye ne-molybdenum. Ngokukhula kokukhula kwetekhnoloji yokucubungula i-graphite, iipropati zombane zonxibelelwano phakathi kwezinto ze-graphite ziye zahlala zizinzile, kwaye izifudumezi ze-silicon furnace ze-monocrystalline ziye zathatha indawo ye-tungsten, i-molybdenum kunye nezinye izinto. Okwangoku, izinto ze-graphite ezisetyenziswa kakhulu yi-isostatic graphite. Itekhnoloji yokulungiselela i-isostatic graphite yelizwe lam isemva kakhulu, kwaye uninzi lwezixhobo ze-graphite ezisetyenziswa kushishino lwe-photovoltaic lwasekhaya zithunyelwa kwamanye amazwe. Abavelisi be-graphite ye-isostatic yangaphandle baquka ikakhulu i-SGL yaseJamani, i-Tokai Carbon yaseJapan, i-Toyo Tanso yaseJapan, njl. Kwii-furnace ze-silicon ze-monocrystalline zaseCzochralski, ngamanye amaxesha kusetyenziswa izinto ze-C/C ezidityanisiweyo, kwaye sele ziqalile ukusetyenziswa ukwenza ii-bolts, amantongomane, ii-crucibles, ii-load plates kunye nezinye izinto. Ii-composites ze-carbon/carbon (C/C) zii-composites ezisekelwe kwi-carbon fiber eziqiniswe nge-carbon ezineempawu ezintle ezifana namandla aphezulu athile, i-modulus ephezulu ethile, i-coefficient ephantsi yokwandiswa kobushushu, i-conductivity elungileyo yombane, ubulukhuni obuphezulu bokuqhekeka, uburhabaxa obuphantsi obuthile, ukumelana nokutshayiswa kobushushu, ukumelana nokugqwala, kunye nokumelana nobushushu obuphezulu. Okwangoku, zisetyenziswa kakhulu kwi-aerospace, kwi-racing, kwi-biomaterials nakwamanye amasimi njengezixhobo ezintsha zokwakha ezimelana nobushushu obuphezulu. Okwangoku, iingxaki eziphambili ezijongene nazo zii-composites ze-C/C zasekhaya ziseyimiba yeendleko kunye nophuhliso lwemizi-mveliso.
Kukho nezinye izinto ezininzi ezisetyenziselwa ukwenza amasimi obushushu. I-graphite eqinisiweyo yefayibha yekhabhoni ineempawu ezingcono zoomatshini; kodwa ibiza kakhulu kwaye inezinye iimfuno zoyilo.I-silicon carbide (i-SiC)sisixhobo esingcono kunegrafiti kwiinkalo ezininzi, kodwa sibiza kakhulu kwaye kunzima ukulungiselela iindawo ezinkulu. Nangona kunjalo, iSiC idla ngokusetyenziswa njengesixhoboUkwaleka kwe-CVDukwandisa ubomi beendawo zegrafiti ezichatshazelwe yigesi ye-silicon monoxide erhabaxa, kwaye kunokunciphisa ungcoliseko oluvela kwigrafiti. I-CVD silicon carbide coating exineneyo ithintela ngokufanelekileyo ungcoliseko olungaphakathi kwezinto zegrafiti ezinamagqabi amancinci ukuba lungafikeleli kumphezulu.
Enye yi-CVD carbon, enokwenza umaleko oxineneyo ngaphezulu kwenxalenye yegrafiti. Ezinye izinto ezimelana nobushushu obuphezulu, ezifana ne-molybdenum okanye izinto zeseramikhi ezinokuhlala kunye nokusingqongileyo, zingasetyenziswa apho kungekho mngcipheko wokungcola okunyibilikayo. Nangona kunjalo, iiseramikhi ze-oxide zihlala zilinganiselwe ekusebenzeni kwazo kwizinto zegrafiti kubushushu obuphezulu, kwaye zimbalwa ezinye iindlela ukuba kufuneka i-insulation. Enye yi-hexagonal boron nitride (ngamanye amaxesha ibizwa ngokuba yi-white graphite ngenxa yeempawu ezifanayo), kodwa iimpawu zoomatshini azilunganga. I-Molybdenum isetyenziswa ngokufanelekileyo kwiimeko zobushushu obuphezulu ngenxa yexabiso layo eliphakathi, izinga lokusasazwa eliphantsi kwiikristale zesilicon, kunye ne-coefficient ephantsi kakhulu yokwahlulwahlulwa kwe-5×108, evumela inani elithile longcoliseko lwe-molybdenum ngaphambi kokutshabalalisa isakhiwo sekristale.
2. Izixhobo zokukhusela ubushushu
Eyona nto isetyenziswa kakhulu ekugqumeni yi-carbon felt kwiindlela ezahlukeneyo. I-carbon felt yenziwe ngeefayibha ezibhityileyo, ezisebenza njengogqumi kuba zithintela imitha yobushushu amaxesha amaninzi kumgama omfutshane. I-soft carbon felt ilukwa ibe ziiphepha ezincinci zezinto, ezithi emva koko zisikwe zibe yimo efunekayo kwaye zigotywe ngokuqinileyo zibe yi-radius efanelekileyo. Ii-Cured felts zenziwe ngezinto ezifanayo zefayibha, kwaye i-carbon-containing binder isetyenziselwa ukudibanisa iifayibha ezisasazekileyo zibe yinto eqinileyo neyimile ngakumbi. Ukusetyenziswa kwe-chemical vapor deposition ye-carbon endaweni ye-binder kunokuphucula iimpawu ze-mechanical zezinto.
Ngokwesiqhelo, umphezulu wangaphandle we-thermal insulation curing felt ugqunywe nge-graphite coating eqhubekayo okanye i-foil ukunciphisa ukukhukuliseka kunye nokuguguleka kunye nongcoliseko lwamasuntswana. Kukho nezinye iintlobo zezinto zokufaka ubushushu ezisekelwe kwikhabhoni, ezifana ne-carbon foam. Ngokubanzi, izinto ezenziwe nge-graphit ziyathandwa kuba i-graphitization inciphisa kakhulu indawo yomphezulu wefayibha. Ukuphuma kwezi zinto kwindawo ephezulu kuncitshiswa kakhulu, kwaye kuthatha ixesha elincinci ukupompa isithando somlilo siye kwi-vacuum efanelekileyo. Enye into yi-C/C composite material, eneempawu ezibalaseleyo ezifana nobunzima obulula, ukunyamezelana komonakalo ophezulu kunye namandla aphezulu. Ukusetyenziswa kwiindawo zobushushu ukutshintsha iindawo ze-graphite kunciphisa kakhulu ukuphindaphindeka kokutshintshwa kweendawo ze-graphite, kuphucula umgangatho we-monocrystalline kunye nokuzinza kwemveliso.
Ngokwendlela yokwahlulahlula izinto eziluhlaza, i-carbon felt inokwahlulwa ibe yi-polyacrylonitrile-based carbon felt, i-viscose-based carbon felt, kunye ne-pitch-based carbon felt.
I-carbon felt esekwe kwi-Polyacrylonitrile inomxholo omkhulu womlotha. Emva konyango olushushu kakhulu, i-single fiber iba brittle. Ngexesha lokusebenza, kulula ukuvelisa uthuli ukuze kungcoliswe imeko-bume yesithando. Kwangaxeshanye, i-fiber ingangena ngokulula kwiimbobo kunye nendlela yokuphefumla yomzimba womntu, nto leyo eyingozi kwimpilo yomntu. I-carbon felt esekwe kwi-Viscose inamandla okukhusela ubushushu. Ithambile emva konyango lobushushu kwaye akulula ukuvelisa uthuli. Nangona kunjalo, i-cross-section ye-fiber eluhlaza esekwe kwi-viscose ayiqhelekanga, kwaye kukho imingxunya emininzi kumphezulu we-fiber. Kulula ukuvelisa iigesi ezifana ne-C02 phantsi kwe-oxidizing atmosphere ye-CZ silicon furnace, okubangela ukuna kwe-oxygen kunye ne-carbon elements kwi-monocrystalline silicon material. Abavelisi abaphambili baquka i-German SGL kunye nezinye iinkampani. Okwangoku, eyona isetyenziswa kakhulu kwishishini le-semiconductor monocrystalline yi-carbon felt esekwe kwi-pitch, ene-thermal insulation embi kune-viscose-based carbon felt, kodwa i-carbon felt esekwe kwi-pitch inobunyulu obuphezulu kunye nokukhupha uthuli okuphantsi. Abavelisi baquka i-Japan's Kureha Chemical kunye ne-Osaka Gas.
Ngenxa yokuba imo yefeliti yekhabhoni ayilungiswanga, kulula ukuyisebenzisa. Ngoku iinkampani ezininzi ziye zaphuhlisa izinto ezintsha zokukhusela ubushushu ezisekelwe kwifeliti yekhabhoni eyomeleleyo. Ifeliti yekhabhoni eyomeleleyo, ekwabizwa ngokuba yifeliti enzima, yifeliti yekhabhoni enobume obuthile kunye nepropathi ezizixhasayo emva kokuba ifeliti ethambileyo ifakwe i-resin, i-laminated, i-cured kwaye i-carbonized.
Umgangatho wokukhula kwe-silicon ye-monocrystalline uchatshazelwa ngokuthe ngqo yindawo eshushu, kwaye izixhobo zokukhusela ubushushu ze-carbon fiber zidlala indima ebalulekileyo kule ndawo. I-soft felt ye-carbon fiber insulation isenenzuzo ebalulekileyo kwishishini le-semiconductor ye-photovoltaic ngenxa yenzuzo yayo yeendleko, isiphumo esihle kakhulu sokukhusela ubushushu, uyilo oluguquguqukayo kunye nemilo enokulungiseka. Ukongeza, i-carbon fiber hard thermal insulation felt iya kuba nendawo enkulu yophuhliso kwimarike yezinto zentsimi yobushushu ngenxa yamandla ayo athile kunye nokusebenza okuphezulu. Sizimisele kuphando nophuhliso kwicandelo lezinto zokukhusela ubushushu, kwaye siqhubeke nokuphucula ukusebenza kwemveliso ukukhuthaza ukuchuma nophuhliso lweshishini le-semiconductor ye-photovoltaic.
Ixesha lokuthumela: Juni-12-2024

