Astaamaha ugu muhiimsan ee kululeeyaha graphite:
1. isku mid ahaanshaha qaab-dhismeedka kuleylinta.
2. Korantada oo si fiican loo isticmaalo iyo culays koronto oo sarreeya.
3. iska caabbinta daxalka.
4. oksaydh la'aan.
5. daahirnimo kiimiko oo sareysa.
6. xoog farsamo oo sare leh.
Faa'iidada waa tamar hufan, qiimo sare leh iyo dayactir hooseeya. Waxaan soo saari karnaa ka-hortagga oksaydheynta iyo cimri dheer oo graphite crucible ah, caaryada graphite iyo dhammaan qaybaha kuleyliyaha graphite.
Qiyaasaha ugu muhiimsan ee kululeeyaha graphite
| Qeexitaanka Farsamada | Semicera-M3 |
| Cufnaanta Badan (g/cm3) | ≥1.85 |
| Waxyaabaha Dambaska ah (PPM) | ≤500 |
| Adkaanta Xeebta | ≥45 |
| Iska caabinta Gaarka ah (μ.Ω.m) | ≤12 |
| Xoogga Laab-jeexa (Mpa) | ≥40 |
| Xoog Cadaadis ah (Mpa) | ≥70 |
| Cabbirka ugu Badan ee Badarka (μm) | ≤43 |
| Isugeynta Ballaarinta Kulaylka M/°C | ≤4.4*10-6 |
Tamarta VET waa Shaki kuma jiro insoo saaraha dhabta ah ee alaabada graphite iyo silicon carbide ee loo habeeyay oo leh dahaarka CVD,bixin karaakala duwanqaybo loo habeeyey warshadaha semiconductor iyo photovoltaic. OKooxda farsamada ee aad ka tirsan tahay waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna bixin karaan xalal agab xirfadeed oo dheeraad ahadiga.
Waxaan si joogto ah u horumarinnaa habab horumarsan si aan u bixinno agab horumarsan,iyoWaxaan soo saarnay tiknoolajiyad gaar ah oo shati leh, taas oo ka dhigi karta isku xirka u dhexeeya dahaarka iyo substrate-ka mid adag oo aan u nuglaan karin kala-goynta.
Fcuntooyinka alaabtayada:
1. Iska caabinta oksaydhka heerkulka sare ilaa 1700℃.
2. Nadiifnimo sare iyoisku mid ahaanshaha kulaylka
3. Iska caabin aad u fiican oo daxalka ah: aashitada, alkali, milixda iyo walxaha dabiiciga ah.
4. Adkayn sare, dusha sare oo is haysta, iyo walxo yaryar.
5. Adeeg dheer iyo cimri dheer
| CVD SiC薄膜基本物理性能 Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka | |
| 性质 / Hantida | 典型数值 / Qiimaha Caadiga ah |
| 晶体结构 / Qaab-dhismeedka Crystal | Marxaladda FCC β多晶，主要为（111) 取向 |
| 密度 / Cufnaanta | 3.21 g/cm³ |
| 硬度 / Adkaanta | 2500 维氏硬度（500g oo culeys ah |
| 晶粒大小 / Xaddiga Badarka | 2 ~ 10μm |
| 纯度 / Nadiifinta Kiimikada | 99.99995% |
| 热容 / Awoodda Kulaylka | 640 J·kg-1·K-1 |
| 升华温度 / Heerkulka Sublimation | 2700℃ |
| 抗弯强度 / Xoogga Laablaabashada | 415 MPa RT 4-dhibcood |
| 杨氏模量 / Modulus-ka Young | 430 GPA 4pt laab, 1300℃ |
| 导热系数 / ThermalGudbinta | 300W·m-1·K-1 |
| 热膨胀系数 / Ballaarinta Kulaylka (CTE) | 4.5 × 10-6K-1 |
Si diirran ayaan kuugu soo dhaweyneynaa inaad booqato warshaddayada, aan yeelano dood dheeraad ah!
