Isikebhe se-graphite esisetshenziswa ku-PECVD yomugqa wokukhiqiza amaseli elanga
Ukukhiqizwa kwamaseli elanga kudinga izinqubo eziyisithupha ezinkulu: ukuthumela umbhalo, ukusabalalisa, ukunamathisela, ukumboza, ukuphrinta isikrini kanye ne-sintering. Ekwenziweni kwamaseli elanga, inqubo yokumboza ishubhu ye-PECVD isebenzisa isikebhe segraphite njengomzimba osebenzayo. Inqubo yokumboza isebenzisa i-plasma ethuthukisiwe umhwamuko wamakhemikhali ukuze ifake ifilimu ye-silicon nitride ngaphambili kwewafa ye-silicon ukuze kuncishiswe ukukhanya kwelanga kanye nengaphezulu lewafa ye-silicon.
Izici zesikebhe sethu se-graphite se-PECVD:
1). Kuvunyelwe ukuqeda ubuchwepheshe "amalensi ombala" , ukuze uqiniseke ngaphandle kwe "coloe lens" ngesikhathi senqubo yesikhathi eside.
2). Yenziwe ngezinto ezingenisiwe zegraphite ezinobumsulwa obukhulu, okuqukethwe kokungcola okuphansi namandla aphezulu.
3). Kusetshenziswa i-ceramic engu-99.9% yokuhlanganiswa kwe-ceramic enokumelana nokugqwala okuqinile kanye nobufakazi be-brust.
4). Ukusebenzisa imishini yokucubungula ngokunemba ukuqinisekisa ukunemba kwengxenye ngayinye.
Ukucaciswa
| Into | Uhlobo | Inombolo yenethiwekhi ye-wafer |
| Isikebhe se-PEVCD Graphite --- Uchungechunge lwe-156 | 156-13 isikebhe se-graphite | 144 |
| 156-19 isikebhe se-graphite | 216 | |
| 156-21 isikebhe se-graphite | 240 | |
| 156-23 isikebhe se-graphite | 308 | |
| Isikebhe se-PEVCD Graphite --- Uchungechunge lwe-125 | 125-15 isikebhe se-graphite | 196 |
| 125-19 isikebhe se-graphite | 252 | |
| 125-21 isikebhe se-graphite | 280 |
I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto eziphambili ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa igraphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo efana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll.
Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, futhi selithuthukise ubuchwepheshe obuningi obunamalungelo obunikazi ukuze kuqinisekiswe ukusebenza komkhiqizo nekhwalithi, linganikeza amakhasimende izixazululo zezinto ezibonakalayo.
