Amandla e-VETIsithwali se-graphite senqubo ye-PECVD siyindlela esezingeni eliphezulu esetshenziswayo eyenzelwe inqubo ye-PECVD (i-plasma enhanced chemical vapor deposition). Lesi sithwali se-graphite senziwe ngezinto ze-graphite ezihlanzekile kakhulu, ezinokumelana nokushisa okuphezulu, ukumelana nokugqwala, ukuzinza kobukhulu kanye nezinye izici, singanikeza ipulatifomu yesithwali esizinzile senqubo ye-PECVD, ukuqinisekisa ukufana kanye nokuba yisicaba kokufakwa kwefilimu encane.
Izithwali ze-graphite zenqubo ye-PECVD zinezici ezilandelayo:
▪ Ukuhlanzeka okuphezulu: okuqukethwe okuphansi kakhulu kokungcola, ukugwema ukungcoliswa kwefilimu nokuqinisekisa ikhwalithi yefilimu.
▪ Ubuningi obukhulu: ubuningi obukhulu, amandla aphezulu omshini, okwazi ukumelana nokushisa okuphezulu kanye nendawo ye-PECVD enomfutho ophezulu.
▪ Ukuzinza okuhle kobukhulu: ushintsho oluncane lobukhulu ekushiseni okuphezulu, okuqinisekisa ukuzinza kwenqubo.
▪ Ukushisa okuhle kakhulu: kudlulisa ukushisa ngempumelelo ukuze kuvinjelwe ukushisa ngokweqile kwe-wafer.
▪ Ukumelana nokugqwala okunamandla: okukwazi ukumelana nokuguguleka kwamagesi ahlukahlukene agqwalisayo kanye ne-plasma.
▪ Isevisi eyenziwe ngokwezifiso: abathwali be-graphite abanobukhulu obuhlukene kanye nezimo bangenziwa ngokwezifiso ngokwezidingo zamakhasimende.
Izinto ze-graphite ezivela ku-SGL:
| Ipharamitha evamile: R6510 | |||
| Inkomba | Izinga lokuhlola | Inani | Iyunithi |
| Usayizi omaphakathi wokusanhlamvu | I-ISO 13320 | 10 | μm |
| Ubuningi obukhulu | I-DIN IEC 60413/204 | 1.83 | g/cm3 |
| Imbobo evulekile | I-DIN66133 | 10 | % |
| Usayizi wembobo ephakathi | I-DIN66133 | 1.8 | μm |
| Ukuvunyelwa komoya | I-DIN 51935 | 0.06 | cm²/s |
| Ukuqina kweRockwell HR5/100 | I-DIN IEC60413/303 | 90 | HR |
| Ukumelana okuqondile kukagesi | I-DIN IEC 60413/402 | 13 | μΩm |
| Amandla okugobeka | I-DIN IEC 60413/501 | 60 | I-MPa |
| Amandla okucindezela | I-DIN 51910 | 130 | I-MPa |
| I-modulus kaYoung | I-DIN 51915 | 11.5×10³ | I-MPa |
| Ukwanda Okushisayo (20-200℃) | I-DIN 51909 | 4.2X10-6 | K-1 |
| Ukushisa (20℃) | I-DIN 51908 | 105 | Wm-1K-1 |
Yenzelwe ngqo ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, isekela ukucutshungulwa kwe-wafer enkulu ye-G12. Umklamo wenkampani yokuthwala olungiselelwe kahle ukhulisa kakhulu umkhiqizo, okwenza kube lula ukukhiqizwa okuphezulu kanye nezindleko zokukhiqiza eziphansi.
| Into | Uhlobo | Inombolo yesithwali se-wafer |
| Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156 | Isikebhe samagrephite esingu-156-13 | 144 |
| Isikebhe samagrephite esingu-156-19 | 216 | |
| Isikebhe samagrephite esingu-156-21 | 240 | |
| Isikebhe se-graphite esingu-156-23 | 308 | |
| Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125 | Isikebhe samagrephite esingu-125-15 | 196 |
| Isikebhe samagrephite esingu-125-19 | 252 | |
| Isikebhe se-grphite esingu-125-21 | 280 |
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