I-Tantalum Carbide Coating Wafer Susceptor

Isithombe Esifakiwe Se-Tantalum Carbide Coating Wafer Susceptor

Incazelo emfushane:

I-Tantalum Carbide Coating Wafer Susceptor ye-Vet-China iwumkhiqizo osebenza kahle kakhulu owenzelwe amazinga okushisa aphezulu kanye nomoya ogqwalisayo, kusetshenziswa ubuchwepheshe obuthuthukisiwe bokumboza be-TaC ukuqinisekisa ukungangeni kahle kwamakhemikhali kanye nokuqina kokushisa. Sizibophezele ngokuqinile ekuhlinzekeni ngemikhiqizo esezingeni eliphezulu ngamanani ancintisanayo futhi silangazelela ukuba ngumlingani wakho wesikhathi eside eShayina.

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Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

I-Vet-China ikhiqizaI-Tantalum Carbide Coated Wafer Susceptor, esebenzisa ubuchwepheshe be-CVD coating obusezingeni eliphezulu futhi ingasebenza kahle ngaphansi kwezimo zokusebenza ezimbi kakhulu.I-Tantalum CarbideIzinto zokwakha zihlanganisa ukumelana nokuguguleka kanye nokumelana nokugqwala, okwenza kube ukukhetha okuhle embonini yokukhiqiza ye-semiconductor.

Ezindaweni ezinokushisa okuphezulu kanye nezimo ezigqwalisayo,I-Tantalum Carbide Embozwe I-Wafer Susceptorikhombisa ukungangeni kahle kwamakhemikhali kanye nokuzinza kokushisa, futhi ingamelana ngempumelelo nokuguguleka kwezinhlobo ezahlukene zamakhemikhali, iqinisekise ukusetshenziswa kwesikhathi eside ngaphansi kwezimo ezinzima. Lesi sici senza izindandatho zethu zokuqondisa zibe namandla amakhulu okusetshenziswa ekucutshungulweni kwe-semiconductor, ukusetshenziswa kwamakhemikhali kanye neminye imikhakha.

Ukukhetha i-Vet-China'sI-Tantalum Carbide Embozwe I-Wafer SusceptorAkugcini nje ngokuthuthukisa ukusebenza kahle kokukhiqiza kwakho, kodwa futhi kwandise impilo yesevisi yemishini. Imikhiqizo yethu ilawulwa ngekhwalithi ngokuqinile ukuqinisekisa ukuthi ngayinye ihlangabezana nezindinganiso eziphakeme kakhulu zemboni ukuze ihlangabezane nezidingo ezahlukene zamakhasimende.

Ngokusebenzisa ubuchwepheshe obusha obuqhubekayo, i-Vet-China izibophezele ekuhlinzekeni amakhasimende ngezixazululo ezithembekile nokukhuthaza intuthuko embonini.I-WaferI-Susceptor iyisinqumo sakho esithembekile sezindawo ezinokushisa okuphezulu kanye nezindawo ezigqwalisayo, okusiza izinhlelo zakho zokusebenza ukuthi zifinyelele amazinga aphezulu.

I-TaC coating uhlobo lwe-tantalum carbide (TaC) coating olulungiselelwe ubuchwepheshe bokufaka umusi ngokomzimba, lunezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ubulukhuni bokumboza i-TaC buphezulu, ngokuvamile bungafinyelela ku-2500-3000HV, buyimbozo eqinile enhle kakhulu.

2. Ukumelana nokuguguleka: Isembozo se-TaC simelana kakhulu nokuguguleka, okunganciphisa ngempumelelo ukuguguleka nokulimala kwezingxenye zemishini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle nokushisa okuphezulu: Isembozo se-TaC singagcina nokusebenza kwaso okuhle kakhulu ngaphansi kwezinga lokushisa eliphezulu.

4. Ukuqina okuhle kwamakhemikhali: Ukuhlanganiswa kwe-TaC kunokuqina okuhle kwamakhemikhali futhi kungamelana nokusabela okuningi kwamakhemikhali, njenge-asidi nezisekelo.

碳化钽涂层物理特性物理特性 Izakhiwo zomzimba ze I-TaC ukugqoka
密度 / Ukuminyana	14.3 (g/cm³)
比辐射率 / Ukukhipha umoya okukhethekile	0.3
热膨胀系数 / I-coefficient yokunweba okushisayo	6.3 10^-6/K
努氏硬度 / Ukuqina (HK)	2000 HK
电阻 / Resistance	1 × 10^-5Ohm*cm
热稳定性 / Ukuzinza kwe-thermal	<2500℃
石墨尺寸变化 / Usayizi weGraphite uyashintsha	-10~-20um
涂层厚度 / Ukuqina kwe-Coating	≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizweni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, i-semiconductor, amandla amasha, i-metallurgy, njll.

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