Cov hauv paus graphite uas tau coated nrog SiC feem ntau yog siv los txhawb thiab ua kom sov cov khoom siv crystal hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Kev ruaj khov thermal, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite hauv paus ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Hauv cov txheej txheem ntawm kev tsim cov wafer, cov txheej epitaxial tau tsim ntxiv rau qee cov wafer substrates los pab txhawb kev tsim cov khoom siv. Cov khoom siv LED teeb pom kev zoo ib txwm yuav tsum npaj cov txheej epitaxial ntawm GaAs ntawm silicon substrates; Cov txheej SiC epitaxial yog loj hlob ntawm cov khoom siv SiC conductive rau kev tsim cov khoom siv xws li SBD, MOSFET, thiab lwm yam, rau qhov hluav taws xob siab, tam sim no siab thiab lwm yam kev siv hluav taws xob; GaN epitaxial txheej yog tsim rau ntawm cov khoom siv SiC semi-insulated los tsim HEMT thiab lwm yam khoom siv rau kev siv RF xws li kev sib txuas lus. Cov txheej txheem no tsis tuaj yeem sib cais los ntawm cov khoom siv CVD.
Hauv cov khoom siv CVD, lub substrate tsis tuaj yeem muab tso ncaj qha rau ntawm cov hlau lossis tsuas yog muab tso rau ntawm lub hauv paus rau epitaxial deposition, vim nws cuam tshuam nrog cov pa roj ntws (kab rov tav, ntsug), kub, siab, kho, tshem tawm cov pa phem thiab lwm yam ntawm cov yam ntxwv cuam tshuam. Yog li ntawd, xav tau lub hauv paus, thiab tom qab ntawd lub substrate raug muab tso rau ntawm lub disc, thiab tom qab ntawd epitaxial deposition raug nqa tawm ntawm lub substrate siv CVD thev naus laus zis, thiab lub hauv paus no yog SiC coated graphite puag (tseem hu ua lub tais).
Cov hauv paus graphite uas tau coated nrog SiC feem ntau yog siv los txhawb thiab ua kom sov cov khoom siv crystal hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Kev ruaj khov thermal, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite hauv paus ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Cov hlau-organic tshuaj vapor deposition (MOCVD) yog cov thev naus laus zis tseem ceeb rau kev loj hlob epitaxial ntawm GaN zaj duab xis hauv xiav LED. Nws muaj qhov zoo ntawm kev ua haujlwm yooj yim, kev loj hlob tswj tau thiab kev ntshiab siab ntawm GaN zaj duab xis. Raws li ib qho tseem ceeb hauv chav tshuaj tiv thaiv ntawm MOCVD cov khoom siv, lub hauv paus bearing siv rau GaN zaj duab xis epitaxial kev loj hlob yuav tsum muaj qhov zoo ntawm kev tiv taus kub siab, kev ua haujlwm thermal conductivity sib xws, kev ruaj khov tshuaj zoo, muaj zog thermal shock tiv taus, thiab lwm yam. Cov khoom siv graphite tuaj yeem ua tau raws li cov xwm txheej saum toj no.
Raws li ib qho ntawm cov khoom tseem ceeb ntawm MOCVD cov khoom siv, graphite puag yog tus nqa khoom thiab lub cev cua sov ntawm lub substrate, uas ncaj qha txiav txim siab qhov sib xws thiab kev huv ntawm cov khoom siv zaj duab xis, yog li nws qhov zoo ncaj qha cuam tshuam rau kev npaj ntawm daim ntawv epitaxial, thiab tib lub sijhawm, nrog rau kev nce ntawm tus lej ntawm kev siv thiab kev hloov pauv ntawm cov xwm txheej ua haujlwm, nws yooj yim heev rau hnav, koom nrog cov khoom siv tau.
Txawm hais tias graphite muaj kev ua tau zoo heev ntawm thermal conductivity thiab kev ruaj khov, nws muaj qhov zoo dua li lub hauv paus ntawm MOCVD cov khoom siv, tab sis nyob rau hauv cov txheej txheem ntau lawm, graphite yuav corrode cov hmoov vim yog cov seem ntawm cov pa roj corrosive thiab cov organic hlau, thiab lub neej ua haujlwm ntawm graphite puag yuav raug txo qis heev. Tib lub sijhawm, cov hmoov graphite poob yuav ua rau muaj kuab paug rau lub nti.
Kev tshwm sim ntawm cov txheej txheem txheej txheem tuaj yeem muab cov hmoov kho rau saum npoo, txhim kho kev ua kom sov, thiab sib npaug ntawm kev faib cua sov, uas tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no. Lub hauv paus graphite hauv MOCVD cov khoom siv ib puag ncig, txheej txheej graphite yuav tsum ua tau raws li cov yam ntxwv hauv qab no:
(1) Lub hauv paus graphite tuaj yeem qhwv tag nrho, thiab qhov ceev yog qhov zoo, txwv tsis pub lub hauv paus graphite yooj yim rau corroded hauv cov roj corrosive.
(2) Lub zog ua ke nrog lub hauv paus graphite siab kom ntseeg tau tias lub txheej tsis yooj yim poob tom qab ntau qhov kub thiab txias thiab qis kub.
(3) Nws muaj kev ruaj khov tshuaj zoo kom tsis txhob muaj kev ua tsis tiav hauv qhov kub thiab txias thiab huab cua corrosive.
SiC muaj qhov zoo ntawm kev tiv taus corrosion, siab thermal conductivity, thermal shock tsis kam thiab siab tshuaj stability, thiab tuaj yeem ua haujlwm zoo hauv GaN epitaxial huab cua. Tsis tas li ntawd, qhov thermal expansion coefficient ntawm SiC txawv me ntsis ntawm graphite, yog li SiC yog cov khoom siv nyiam rau txheej saum npoo ntawm graphite puag.
Tam sim no, feem ntau SiC yog hom 3C, 4H thiab 6H, thiab SiC siv ntawm ntau hom siv lead ua sib txawv. Piv txwv li, 4H-SiC tuaj yeem tsim cov khoom siv hluav taws xob siab; 6H-SiC yog qhov ruaj khov tshaj plaws thiab tuaj yeem tsim cov khoom siv photoelectric; Vim nws cov qauv zoo sib xws rau GaN, 3C-SiC tuaj yeem siv los tsim GaN epitaxial txheej thiab tsim cov khoom siv SiC-GaN RF. 3C-SiC kuj tseem hu ua β-SiC, thiab kev siv tseem ceeb ntawm β-SiC yog ua cov khoom siv zaj duab xis thiab txheej, yog li β-SiC tam sim no yog cov khoom siv tseem ceeb rau txheej.
Txoj kev npaj cov txheej txheem silicon carbide
Tam sim no, cov txheej txheem npaj ntawm SiC txheej feem ntau suav nrog gel-sol txoj kev, embedding txoj kev, txhuam txheej txoj kev, plasma spraying txoj kev, tshuaj lom neeg roj tshuaj tiv thaiv (CVR) thiab tshuaj lom neeg vapor deposition txoj kev (CVD).
Txoj kev muab tso rau hauv:
Txoj kev no yog ib hom kev kub siab sintering khoom, uas feem ntau siv cov hmoov Si thiab C ua cov hmoov embedding, cov graphite matrix muab tso rau hauv cov hmoov embedding, thiab cov kub siab sintering yog nqa tawm hauv cov roj inert, thiab thaum kawg SiC txheej tau txais ntawm qhov chaw ntawm graphite matrix. Cov txheej txheem yooj yim thiab kev sib xyaw ua ke ntawm cov txheej thiab cov substrate yog qhov zoo, tab sis qhov sib xws ntawm cov txheej raws li qhov tuab yog pluag, uas yooj yim los tsim ntau qhov thiab ua rau tsis zoo oxidation tsis kam.
Txoj kev txhuam txheej:
Txoj kev txhuam txheej yog feem ntau yog txhuam cov khoom siv ua kua rau ntawm qhov chaw ntawm graphite matrix, thiab tom qab ntawd kho cov khoom siv raw ntawm qee qhov kub kom npaj cov txheej. Cov txheej txheem yooj yim thiab tus nqi qis, tab sis cov txheej txheem txhuam txheej uas npaj tsis muaj zog ua ke nrog cov substrate, cov txheej txheem tsis sib xws, cov txheej nyias thiab qhov tsis kam oxidation qis, thiab lwm txoj hauv kev yog qhov xav tau los pab nws.
Txoj kev txau plasma:
Txoj kev txau plasma feem ntau yog txau cov khoom siv raw uas yaj lossis ib nrab yaj rau ntawm qhov chaw ntawm graphite matrix nrog rab phom plasma, thiab tom qab ntawd khov thiab sib txuas ua ke los ua ib txheej. Txoj kev no yooj yim rau kev khiav lag luam thiab tuaj yeem npaj ib txheej silicon carbide uas tuab heev, tab sis txheej silicon carbide uas npaj los ntawm txoj kev no feem ntau tsis muaj zog thiab ua rau tsis muaj zog tiv thaiv oxidation, yog li nws feem ntau siv rau kev npaj SiC composite txheej los txhim kho qhov zoo ntawm txheej.
Txoj kev Gel-sol:
Txoj kev gel-sol feem ntau yog npaj cov kua sol sib xws thiab pob tshab uas npog qhov chaw ntawm lub matrix, ziab ua gel thiab tom qab ntawd sintering kom tau txais ib txheej. Txoj kev no yooj yim rau kev khiav lag luam thiab pheej yig, tab sis cov txheej tsim tawm muaj qee qhov tsis zoo xws li kev tiv thaiv thermal poob siab tsawg thiab yooj yim tawg, yog li nws tsis tuaj yeem siv dav.
Kev Tshuaj Xyuas Pa roj (CVR):
CVR feem ntau tsim cov txheej SiC los ntawm kev siv Si thiab SiO2 hmoov los tsim cov pa SiO ntawm qhov kub siab, thiab ntau yam kev tshuaj lom neeg tshwm sim ntawm qhov chaw ntawm cov khoom siv C. Cov txheej SiC uas npaj los ntawm txoj kev no tau sib txuas nrog lub substrate, tab sis qhov kub ntawm cov tshuaj tiv thaiv siab dua thiab tus nqi siab dua.
Kev Tso Pa Tshuaj (CVD):
Tam sim no, CVD yog lub thev naus laus zis tseem ceeb rau kev npaj SiC txheej rau ntawm qhov chaw substrate. Cov txheej txheem tseem ceeb yog cov tshuaj lom neeg thiab cov tshuaj lom neeg ntawm cov khoom siv roj theem reactant rau ntawm qhov chaw substrate, thiab thaum kawg SiC txheej yog npaj los ntawm kev tso rau ntawm qhov chaw substrate. SiC txheej npaj los ntawm CVD thev naus laus zis yog sib txuas nrog qhov chaw ntawm lub substrate, uas tuaj yeem txhim kho qhov tsis kam oxidation thiab ablative tsis kam ntawm cov khoom siv substrate, tab sis lub sijhawm tso ntawm txoj kev no ntev dua, thiab cov roj tshuaj tiv thaiv muaj qee yam roj lom.
Qhov xwm txheej ntawm kev ua lag luam ntawm SiC coated graphite puag
Thaum cov tuam txhab tsim khoom txawv teb chaws pib thaum ntxov, lawv muaj kev coj ua meej thiab muaj feem lag luam siab. Thoob ntiaj teb, cov neeg muab khoom tseem ceeb ntawm SiC coated graphite puag yog Dutch Xycard, Lub Tebchaws Yelemees SGL Carbon (SGL), Nyiv Toyo Carbon, Tebchaws Meskas MEMC thiab lwm lub tuam txhab, uas feem ntau nyob hauv kev lag luam thoob ntiaj teb. Txawm hais tias Tuam Tshoj tau tawg los ntawm cov thev naus laus zis tseem ceeb ntawm kev loj hlob sib xws ntawm SiC txheej ntawm qhov chaw ntawm graphite matrix, cov graphite matrix zoo tseem vam khom German SGL, Nyiv Toyo Carbon thiab lwm lub tuam txhab, cov graphite matrix muab los ntawm cov tuam txhab hauv tsev cuam tshuam rau lub neej kev pabcuam vim yog thermal conductivity, elastic modulus, rigid modulus, lattice defects thiab lwm yam teeb meem zoo. Cov khoom siv MOCVD tsis tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm kev siv SiC coated graphite puag.
Kev lag luam semiconductor hauv Suav teb tab tom txhim kho sai, nrog rau kev nce qib ntawm MOCVD epitaxial khoom siv localization, thiab lwm yam kev siv cov txheej txheem nthuav dav, kev lag luam khoom lag luam graphite coated SiC yav tom ntej yuav loj hlob sai. Raws li kev kwv yees ua ntej ntawm kev lag luam, kev lag luam graphite hauv tsev yuav tshaj 500 lab yuan hauv ob peb xyoos tom ntej.
SiC coated graphite puag yog lub hauv paus tseem ceeb ntawm cov khoom siv semiconductor industrialization, kev paub txog cov thev naus laus zis tseem ceeb ntawm nws cov khoom tsim thiab kev tsim khoom, thiab kev paub txog qhov chaw ntawm tag nrho cov khoom siv raw-txheej txheem-khoom siv hauv kev lag luam yog qhov tseem ceeb heev rau kev ua kom ntseeg tau tias kev txhim kho ntawm Tuam Tshoj txoj kev lag luam semiconductor. Lub tshav pob ntawm SiC coated graphite puag hauv tsev tab tom vam meej, thiab qhov zoo ntawm cov khoom tuaj yeem ncav cuag theem siab thoob ntiaj teb sai sai.
Lub sijhawm tshaj tawm: Lub Xya Hli-24-2023