Ko ngā turanga karāpeti kua pania ki te SiC e whakamahia whānuitia ana hei tautoko me te whakamahana i ngā papa tioata kotahi i roto i ngā taputapu MOCVD (whakatakotoranga kohu matū whakarewa-organika). Ko te pumau wera, te ōritetanga wera me ētahi atu tawhā mahi o te turanga karāpeti kua pania ki te SiC he mea nui ki te kounga o te tipu rauemi epitaxial, nō reira koinei te wāhanga matua o ngā taputapu MOCVD.
I roto i te tukanga hanga paparanga, ka hangaia anō ngā paparanga epitaxial ki runga i ētahi paparanga paparanga hei whakahaere i te hanga taputapu. Me whakarite e ngā taputapu tuku rama LED noa ngā paparanga epitaxial o GaAs ki runga i ngā paparanga silicon; ka whakatupuhia te paparanga epitaxial SiC ki runga i te paparanga SiC kawe hiko hei hanga i ngā taputapu pēnei i te SBD, MOSFET, me ētahi atu, mō ngā tono hiko teitei, te iahiko teitei me ētahi atu tono mana; ka hangaia te paparanga epitaxial GaN ki runga i te paparanga SiC haurua-whakamaroke hei hanga anō i te HEMT me ētahi atu taputapu mō ngā tono RF pēnei i te whakawhitiwhiti kōrero. Kāore e taea te wehe i tēnei tukanga mai i ngā taputapu CVD.
I roto i ngā taputapu CVD, kāore e taea te whakatakoto tika i te papa ki runga i te konganuku, te whakatakoto noa rānei ki runga i te turanga mō te whakatakoto epitaxial, nā te mea kei roto ko te rere o te hau (whakapae, poutū), te pāmahana, te pēhanga, te whakau, te whakahekenga o ngā poke me ētahi atu āhuatanga o ngā āhuatanga awe. Nō reira, me whai turanga, kātahi ka whakatakotoria te papa ki runga i te kōpae, kātahi ka mahia te whakatakoto epitaxial ki runga i te papa mā te whakamahi i te hangarau CVD, ā, ko tēnei turanga ko te turanga karāti kua pania ki te SiC (e mōhiotia ana ko te paepae).
Ko ngā turanga karāpeti kua pania ki te SiC e whakamahia whānuitia ana hei tautoko me te whakamahana i ngā papa tioata kotahi i roto i ngā taputapu MOCVD (whakatakotoranga kohu matū whakarewa-organika). Ko te pumau wera, te ōritetanga wera me ētahi atu tawhā mahi o te turanga karāpeti kua pania ki te SiC he mea nui ki te kounga o te tipu rauemi epitaxial, nō reira koinei te wāhanga matua o ngā taputapu MOCVD.
Ko te MOCVD te hangarau matua mō te tipu epitaxial o ngā kiriata GaN i roto i te LED kikorangi. He ngāwari te whakahaere, he tere tipu ka taea te whakahaere, ā, he parakore teitei ngā kiriata GaN. Hei wāhanga nui i roto i te rūma tauhohenga o ngā taputapu MOCVD, me whai painga te turanga whāriki e whakamahia ana mō te tipu epitaxial kiriata GaN ki te ātete pāmahana teitei, te kawe wera ōrite, te pumau matū pai, te ātete ru wera kaha, me ētahi atu. Ka taea e te rauemi graphite te whakatutuki i ngā tikanga o runga ake nei.
Hei tētahi o ngā wāhanga matua o ngā taputapu MOCVD, ko te turanga graphite te tinana kawe me te whakamahana o te papa, e whakatau tika ana i te ōritetanga me te parakore o te rauemi kiriata, nō reira ka pā tika tōna kounga ki te whakarite o te pepa epitaxial, ā, i te wa ano, me te pikinga ake o te maha o ngā whakamahinga me te huringa o ngā tikanga mahi, he tino ngāwari ki te mau, nō roto i ngā taonga pau.
Ahakoa he pai te kawe wera me te pumau o te karāpeti, he painga pai tōna hei wāhanga turanga o ngā taputapu MOCVD, engari i roto i te tukanga whakaputa, ka waikura te paura e te karāpeti nā te toenga o ngā hau waikura me ngā matū whakarewa, ā, ka tino whakaitihia te roa o te ora o te turanga karāpeti. I taua wā anō, ka pāngia te maramara e te paura karāpeti e te parahanga.
Mā te putanga mai o te hangarau paninga ka taea te whakarite i te pumau o te paura mata, te whakarei ake i te kawe wera, me te whakataurite i te tohatoha wera, kua waiho hei hangarau matua hei whakaoti i tēnei raruraru. I roto i te taiao whakamahi taputapu MOCVD, me tutuki i te paninga mata mata papa papa ngā āhuatanga e whai ake nei:
(1) Ka taea te takai katoa i te turanga karāpeti, ā, he pai te mātotoru, ki te kore ka ngāwari te waikura o te turanga karāpeti i roto i te hau waikura.
(2) He teitei te kaha o te whakakotahitanga me te turanga karāpeti kia kore ai e ngawari te taka o te paninga i muri i ētahi huringa pāmahana teitei me te pāmahana iti.
(3) He pai te pumau matū hei karo i te pakaru o te paninga i te pāmahana tiketike me te hau waikura.
He pai ngā painga o te SiC mō te ātete ki te waikura, te kawe wera nui, te ātete ki ngā ru wera me te pumau matū teitei, ā, ka taea te mahi pai i roto i te hau epitaxial GaN. Hei tāpiri, he iti noa te rerekētanga o te tauwehenga whānui wera o te SiC i tērā o te karāpeti, nō reira ko te SiC te rauemi pai mō te paninga mata o te turanga karāpeti.
I tēnei wā, ko te SiC noa ko te momo 3C, 4H me te 6H, ā, he rerekē ngā whakamahinga SiC o ngā momo tioata rerekē. Hei tauira, ka taea e te 4H-SiC te hanga taputapu mana-teitei; ko te 6H-SiC te mea tino pumau, ā, ka taea te hanga taputapu hiko-whakaahua; nā te mea he rite te hanganga ki te GaN, ka taea te whakamahi i te 3C-SiC ki te hanga paparanga epitaxial GaN me te hanga taputapu RF SiC-GaN. E mōhiotia whānuitia ana te 3C-SiC ko te β-SiC, ā, ko tētahi whakamahinga nui o te β-SiC ko te kiriata me te rauemi paninga, nō reira ko te β-SiC te rauemi matua mō te paninga i tēnei wā.
Tikanga mō te whakarite i te paninga silicon carbide
I tēnei wā, ko ngā tikanga whakarite mō te paninga SiC ko te tikanga gel-sol, te tikanga tāmau, te tikanga paninga paraihe, te tikanga rehu plasma, te tikanga tauhohenga hau matū (CVR) me te tikanga whakatakotoranga kohu matū (CVD).
Tikanga tāmau:
Ko te tikanga he momo whakatōnga totoka pāmahana teitei, e whakamahi ana i te ranunga o te paura Si me te paura C hei paura whakauru, ka whakanohoia te anga graphite ki roto i te paura whakauru, ka mahia te whakatōnga pāmahana teitei i roto i te hau kore mahi, ā, i te mutunga ka whiwhihia te paninga SiC ki runga i te mata o te anga graphite. He māmā te tukanga, ā, he pai te whakakotahitanga i waenga i te paninga me te papa, engari he ngoikore te ōritetanga o te paninga i te ahunga matotoru, he ngāwari ki te whakaputa i ngā kōhao maha atu, ā, ka arahi ki te ātete waikura ngoikore.
Tikanga paninga paraihe:
Ko te tikanga paninga paraihe ko te paraihe i te rauemi mata wai ki runga i te mata o te anga graphite, kātahi ka whakamaroke i te rauemi mata i tētahi pāmahana hei whakarite i te paninga. He māmā te tukanga, he iti hoki te utu, engari he ngoikore te paninga i whakaritea mā te tikanga paninga paraihe ina honoa ki te papa, he ngoikore te ōrite o te paninga, he angiangi te paninga, ā, he iti te ātete ki te waikura, ā, me whai atu tikanga hei āwhina.
Tikanga rehu plasma:
Ko te tikanga rehu plasma ko te rehu i ngā rauemi mata kua rewa, kua rewa-haurua rānei ki runga i te mata o te anga graphite mā te whakamahi i te pū plasma, kātahi ka whakapakeke, ka honoa hei hanga paninga. He māmā noa te whakamahi i tēnei tikanga, ā, ka taea te whakarite i tētahi paninga silicon carbide matotoru, engari he ngoikore rawa te paninga silicon carbide i whakaritea mā te tikanga, ā, ka ngoikore te ātete ki te waikura, nō reira e whakamahia whānuitia ana mō te whakarite paninga hiato SiC hei whakapai ake i te kounga o te paninga.
Tikanga whakapūkara-whakarewa:
Ko te tikanga ira-whakarewa ko te whakarite i tētahi otinga ira ōrite, mārama hoki e kapi ana i te mata o te anga, ka whakamarokehia kia rite ki te ira, kātahi ka whakaenehia kia puta he paninga. He māmā noa iho tēnei tikanga ki te whakamahi, ā, he iti hoki te utu, engari he ngoikoretanga kei te paninga kua puta, pērā i te iti o te ātete ki ngā ru wera me te ngāwari o te pakaru, nō reira kāore e taea te whakamahi whānui.
Tauhohenga Hau Matū (CVR):
Ko te nuinga o te wā, ka hangaia e te CVR he paninga SiC mā te whakamahi i te paura Si me te SiO2 hei whakaputa i te mamaoa SiO i te pāmahana teitei, ā, ka puta he raupapa o ngā tauhohenga matū ki te mata o te papa rauemi C. Ko te paninga SiC i whakaritea mā tēnei tikanga he piri tata ki te papa, engari he teitei ake te pāmahana tauhohenga, he nui ake hoki te utu.
Te Whakatakotoranga Kohu Matū (CVD):
I tēnei wā, ko te CVD te hangarau matua mō te whakarite i te paninga SiC ki runga i te mata o te papa. Ko te tukanga matua he raupapa o ngā tauhohenga ā-tinana me te matū o te rauemi tauhohenga hau ki runga i te mata o te papa, ā, i te mutunga, ka whakaritea te paninga SiC mā te whakatakoto ki runga i te mata o te papa. Ko te paninga SiC i whakaritea mā te hangarau CVD he mea piri tata ki te mata o te papa, ka taea te whakapai ake i te ātete waikura me te ātete tango o te rauemi papa, engari he roa ake te wā whakatakoto o tēnei tikanga, ā, he hau paitini kei roto i te hau tauhohenga.
Te āhua o te mākete o te turanga karāhe pania ki te SiC
I te tīmatanga wawe o ngā kaihanga o tāwāhi, he mārama te arataki me te nui o te wāhi mākete. I te ao whānui, ko ngā kaiwhakarato matua o te turanga karāhe pania SiC ko te Dutch Xycard, Tiamana SGL Carbon (SGL), Hapani Toyo Carbon, te United States MEMC me ētahi atu kamupene, e noho ana i te mākete o te ao. Ahakoa kua pakaruhia e Haina te hangarau matua matua o te tipu ōrite o te paninga SiC i runga i te mata o te matrix karāhe, kei te whakawhirinaki tonu te matrix karāhe kounga teitei ki te Tiamana SGL, Hapani Toyo Carbon me ētahi atu umanga, ko te matrix karāhe e whakaratohia ana e ngā umanga o te kāinga ka pā ki te roa o te ratonga nā te kawe wera, te modulus elastic, te modulus pakari, ngā hapa whatunga me ētahi atu raruraru kounga. Kāore e taea e ngā taputapu MOCVD te whakatutuki i ngā whakaritenga o te whakamahinga o te turanga karāhe pania SiC.
Kei te tere te whanaketanga o te umanga haurua-ā-ira o Haina, me te pikinga haere o te tere o te taunga taputapu epitaxial MOCVD, me te whānui haere o ngā tono tukanga, e matapaetia ana ka tere te tipu o te mākete hua turanga karāhe pania SiC a meake nei. E ai ki ngā whakatau tata a te umanga, ka neke atu i te 500 miriona yuan te mākete turanga karāhe ā-rohe i roto i ngā tau torutoru e whai ake nei.
Ko te turanga karāpeti pania SiC te wāhanga matua o ngā taputapu ahumahi haurua-irahiko matū, ko te matatau ki te hangarau matua o tana whakaputa me te hanga, me te whakatinana i te rohe o te mekameka ahumahi rauemi mata-tukanga-taputapu katoa he mea tino nui ki te whakarite i te whanaketanga o te ahumahi haurua-irahiko o Haina. Kei te tino puāwai te mara o te turanga karāpeti pania SiC ā-rohe, ā, ka taea e te kounga hua te eke ki te taumata matatau o te ao i roto i ngā wā poto.
Wā tuku: Hurae-24-2023