Vim li cas TaC Txheej thiaj li tseem ceeb rau GaN thiab SiC Device Production?

Txheej TaC yog qhov tseem ceeb rau kev tsim khoom siv GaN thiab SiC. Nws muab kev tiv thaiv zoo tshaj plaws tiv thaiv cov txheej txheem corrosive, txhim kho kev ruaj khov thermal, thiab tiv thaiv kev ua qias tuaj. Cov yam no yog qhov tseem ceeb rau kev ua tiav cov khoom siv ua haujlwm siab thiab cov txiaj ntsig. Kev lag luam khoom siv hluav taws xob GaN hauv Asia-Pacific kwv yees tias yuav muaj 19.33% Kev Loj Hlob Txhua Xyoo ntawm xyoo 2025 thiab 2032. Kev lag luam tag nrho rau cov khoom siv no, muaj nqis ntawm USD 2.24 billion hauv xyoo 2023, xav tias yuav ncav cuag USD 18 billion los ntawm xyoo 2032, loj hlob ntawm 25% CAGR. Qhov kev nthuav dav ntawm kev lag luam tseem ceeb no qhia txog qhov xav tau cov kev daws teeb meem tsim khoom muaj zog.

Cov Ntsiab Lus Tseem Ceeb

• Txheej TaC tiv thaiv cov khoom siv siv los ua cov khoom siv GaN thiab SiC. Nws tiv thaiv kev puas tsuaj los ntawm cov tshuaj lom neeg hnyav thiab cua sov siab.
• Cov khoom siv GaN thiab SiC zoo dua li cov khoom siv silicon qub. Lawv ua haujlwm sai dua thiab siv hluav taws xob tsawg dua, tab sis lawv nyuaj rau ua.
• Cov txheej txheej TaC pab ua kom cov khoom siv GaN thiab SiC huv dua. Nws tiv thaiv cov av me me kom tsis txhob nkag mus rau hauv cov khoom siv.
• Kev txheej TaC ua kom ntseeg tau tias cov khoom siv tau ua tib yam txhua zaus. Qhov no txhais tau tias muaj ntau cov khoom siv zoo raug tsim thiab tsawg dua qhov pov tseg.
• Txheej TaC yog ib qho tseem ceeb heev rau kev ua cov khoom siv hluav taws xob tshiab. Nws pab cov khoom siv siab heev no ua haujlwm tau zoo thiab siv tau ntev dua.

Cov Khoom Siv GaN thiab SiC: Cov Tiam Tom Ntej ntawm Cov Khoom Siv Hluav Taws Xob

Kev Txheeb Xyuas Txog Cov Zoo ntawm GaN thiab SiC Device

Cov khoom siv Gallium Nitride (GaN) thiab Silicon Carbide (SiC) sawv cev rau kev dhia loj heev hauv kev siv hluav taws xob. Lawv muab kev txhim kho zoo dua li cov khoom siv silicon ib txwm muaj. Piv txwv li, cov khoom siv SiC qhia txog cov yam ntxwv zoo dua ntawm ntau yam tseem ceeb:

Cov khoom siv SiC ua tiav kev ua haujlwm zoo dua thiab txo qis kev poob hluav taws xob. Lawv txo ob qho tib si kev poob hluav taws xob thiab kev hloov pauv. SiC's bandgap yog peb zaug siab dua li silicon, ua rau cov txheej nyias nyias dua. Qhov no txo ​​qhov kev tiv thaiv on-resistance los ntawm kaum npaug rau tib qhov ntsuas voltage. 1200V SiC MOSFET muaj tsib zaug qis dua qhov poob hluav taws xob dua li silicon IGBT. Cov khoom siv SiC kuj hloov pauv sai dua 10 txog 100 npaug dua li silicon, txo qis kev poob ib ntus. SiC Schottky diodes tshem tawm kev rov qab rov qab, tshem tawm qhov tseem ceeb ntawm kev poob. Cov khoom siv no ua haujlwm ntawm qhov kub siab dua, nrog qhov kub siab tshaj plaws ntawm 200–250 ° C, ob npaug ntawm silicon. Lawv kuj muaj 2.5 npaug zoo dua thermal conductivity, txhim kho kev sib kis cua sov. SiC cov atomic bonds muaj zog tiv taus electromigration thiab rooj vag oxide tawg, pab txhawb rau lub neej ntev dua.

Kev Sib Tw Tsim Khoom Rau GaN thiab SiC Cov Khoom Siv

Kev tsim cov khoom siv GaN thiab SiC muaj cov teeb meem tshwj xeeb hauv kev tsim khoom. Cov teeb meem no yog los ntawm cov khoom siv thiab cov txheej txheem tsim khoom nyuaj.

Rau cov khoom siv GaN, cov chaw tsim khoom ntsib ntau yam teeb meem:

• Crystal Zoo thiab Qhov Ceev ntawm Qhov Tsis Zoo: Ua tiav cov khoom siv lead ua zoo nrog qhov tsis zoo tsawg yog qhov nyuaj. GaN feem ntau loj hlob ntawm cov substrates zoo li sapphire lossis silicon, uas muaj cov lattice constants sib txawv. Qhov tsis sib xws no tsim cov qhov tsis zoo thaum lub sijhawm loj hlob epitaxial, cuam tshuam rau kev ua haujlwm ntawm lub cuab yeej.
• Cov Txheej Txheem Loj Hlob EpitaxialCov txheej txheem zoo li Metal-Organic Chemical Vapor Deposition (MOCVD) kim heev thiab xav tau kev tswj hwm meej. Hydride Vapor Phase Epitaxy (HVPE) muaj kev loj hlob sai dua tab sis ua rau cov tshuaj tiv thaiv roj thiab qhov zoo ntawm qhov chaw nyuaj.
• Doping thiab UniformityKev ua tiav cov theem doping sib xws, tshwj xeeb tshaj yog rau p-hom GaN, yog qhov nyuaj. Qhov no yog vim cov khoom siv thiab cov txheej txheem tshuaj lom neeg nyuaj.
• Kev Muaj Khoom Siv Thiab Tus NqiQhov muaj thiab tus nqi ntawm cov substrates cuam tshuam rau GaN scalability. Silicon substrates pheej yig dua tab sis ua rau muaj kev tsis sib haum xeeb ntau dua.

Kev tsim khoom siv SiC kuj ntsib teeb meem loj heev:

• Kev Nyuaj Siab thiab Kev Nyuaj Siab HeevSiC qhov nyuaj (Mohs 9) thiab brittleness ua rau kev tsim khoom nyuaj. Wafer polishing qeeb thiab tsis ua haujlwm zoo, xav tau cov slurries tshwj xeeb.
• Kev Tswj Xyuas WaferKev tuav SiC wafers nyuaj vim lawv qhov brittleness. Qhov no ua rau chipping, tawg, thiab cov khoom me me ua qias tuaj.
• Cov Kev Cai Epitaxy: Epitaxy rau SiC xav tau qhov kub siab dua li silicon. Qhov no ua rau lub neej ntawm cov khoom hauv chav luv dua thiab ua rau cov nqi kho dua tshiab nce ntxiv.
• Kev cog ionKev cog txhuas rau p-hom doping ntsib teeb meem kev ruaj khov ntawm cov ion. Cov dopants tsis yooj yim diffuse thiab tuaj yeem tsim cov qhov av. Qhov kub siab annealing (1800 ° C) tuaj yeem carbonize qhov chaw.

Qhov Teeb Meem Tseem Ceeb: Kev puas tsuaj ntawm cov khoom siv thiab kev ua qias tuaj hauv kev ua khoom

Kev Xeb thiab Kev Yaig ntawm Cov Khoom Siv Hauv Ib puag ncig Nyuaj Siab

Cov khoom siv tsim khoom semiconductor ntsib kev puas tsuaj thiab kev hnav ntawm cov khoom siv. Cov chaw ib puag ncig hnyav, suav nrog kev raug cov tshuaj lom neeg thiab cov txheej txheem abrasive, ua rau muaj cov teeb meem no. Qhov no ua rau lub neej ntawm cov khoom siv luv dua thiab ua rau kev tsim khoom tsis zoo. Cov cuab yeej etching thiab deposition, tshwj xeeb, ua rau muaj kev kub ntxhov heev. Lawv ntsib plasma, kub siab, thiab cov tshuaj lom neeg reactive. Cov yam no ua rau muaj kev yaig thiab kev tawm tsam tshuaj lom neeg. Cov xwm txheej zoo li no ua rau cov khoom siv tsis ua haujlwm los ntawm kev puas tsuaj cov khoom siv thiab txo cov cuab yeej ua haujlwm.

Feem ntau muaj "kev puas tsuaj los ntawm kev xeb." Cov xov xwm xeb ua rau lub zog sib txuas ntawm cov noob tsis muaj zog. Qhov kev qaug zog no ua rau cov kab nrib pleb uas ua rau muaj kev sib txhuam kis tau sai. Cov kab nrib pleb no kis tau raws cov cheeb tsam sib sau ua ke uas muaj tin-enriched. Hom kev puas tsuaj sib xyaw no nyuaj rau kev tswj hwm nrog cov thev naus laus zis ib txwm muaj, tshwj xeeb tshaj yog nyob rau hauv cov chaw muaj kev sib txhuam hnyav.

Kev Cuam Tshuam ntawm Kev Ua Phem rau GaN thiab SiC Device Performance

Kev ua qias tuaj yeem cuam tshuam loj heev rau kev ua haujlwm thiab cov txiaj ntsig ntawm GaN thiab SiC cov khoom siv. Txawm tias cov khoom tsis huv me me tuaj yeem tsim cov teeb meem, ua rau lub cuab yeej ua haujlwm tsis zoo lossis txo qis kev ua haujlwm. Rau cov khoom siv GaN, cov khoom tsis huv tshwj xeeb feem ntau ua rau muaj teeb meem:

• Cov cuab yeej cuab tam electron tob (E2 thiab E4)Cov ntxiab no nce ntxiv tom qab proton thiab electron irradiation. Lawv ua rau muaj qhov rooj vag thiab ntws-lag phenomena, ua rau tam sim no tawg thiab puas tsuaj hauv AlGaN/GaN HEMTs.
• Kev tawg pob qij txha: Qhov qhib-core ntsia hlau dislocations txhawb nqa lub rooj vag xau hauv AlGaN/GaN HEMTs. Dislocations dai kom zoo nkauj los ntawm Indium (In) cuam tshuam rau InAlN/GaN HEMTs. Lawv kuj txuas rau cov cuab yeej hluav taws xob tob, kev ntes, subthreshold tam sim no xau, thiab kev puas tsuaj tag nrho.
• Gallium vacancies sib xyaw nrog Silicon (Si) lossis Oxygen (O)Cov complexes no ua haujlwm ua cov qhov loj hauv n-GaN thiab n-AlGaN.
• Cov pa roj carbon (C)Cov pa roj carbon kuj ua haujlwm ua lub qhov loj hauv n-GaN thiab n-AlGaN.
• HydrogenQhov kev tsis huv ntawm keeb kwm yav dhau los no, uas feem ntau pom muaj nyob rau hauv MOCVD thiab NH3-nplua nuj MBE cov ntaub ntawv cog qoob loo, cuam tshuam rau qhov hloov pauv ntawm qhov hluav taws xob thiab kev puas tsuaj ntawm transconductance nyob rau hauv proton irradiation.
• Cov neeg txais tob tobKev qhia txog cov neeg txais tob hauv cov txheej txheem thaiv piav qhia txog kev hloov pauv ntawm qhov hluav taws xob threshold thiab kev txav mus los ntawm cov channel hauv AlGaN / GaN transistors.
• Cov ntxiab tob hauv GaN buffer txheejCov ntxiab no tuaj yeem ua rau muaj cov teebmeem zoo sib xws li cov neeg txais tob. Lawv pab txhawb rau qhov txo qis 2DEG thiab kev tawg ntawm 2DEG electron.

Yuav Ua Li Cas TaC Txheej Txheem Daws Cov Teeb Meem Tseem Ceeb Hauv Kev Tsim Khoom

Kev Tshuaj Lom Zem Tshwj Xeeb ntawm TaC Txheej

Txheej TaC muaj cov tshuaj lom neeg tsis muaj zog. Cov yam ntxwv no ua rau nws muaj txiaj ntsig zoo hauv kev tsim khoom semiconductor. Nws tiv taus kev yaig los ntawm cov pa roj corrosive xws li chlorides thiab fluorides. Cov txheej txheem no tswj hwm qhov tsis tshua muaj zog hauv qhov chaw kub siab. Qhov no tiv thaiv cov tshuaj tsis xav tau nrog cov pa roj reactive. Cov yam ntxwv no yog qhov tseem ceeb rau kev ua kom cov txheej txheem huv thiab cov khoom siv zoo. Nws tshwj xeeb tshaj yog pab cov ntawv thov uas muaj Silicon Carbide Wafer Boats thiab lwm yam khoom tseem ceeb.

Piv nrog rau SiC txheej, TaC muaj kev tsis sib haum xeeb ntawm cov tshuaj lom neeg thiab kev tiv taus corrosion ntau dua.

Cov txheej txheej TaC tiv taus cov ammonia kub. Lawv kuj tiv taus cov pa hydrogen, cov pa silicon, thiab cov hlau yaj. Cov txheej txheej no muab kev tiv thaiv tiv thaiv H2, NH3, SiH4, thiab Si hauv cov chaw muaj tshuaj lom neeg hnyav.

Kev Ruaj Ntseg Thermal Siab thiab Kev Kho Mob Hardness ntawm TaC Txheej

Kev ruaj khov thermal thiab kev kho tshuab hardness yog qhov tseem ceeb rau cov khoom hauv GaN thiab SiC ntau lawm. TaC-coated graphite qhia tau tias muaj kev tiv thaiv corrosion zoo dua piv rau bare graphite lossis SiC-coated graphite. Nws tseem ruaj khov ntawm qhov kub siab, ncav cuag 2600 ° C. Nws tsis cuam tshuam nrog ntau yam hlau. Qhov no ua rau nws yog qhov txheej txheem nyiam rau kev loj hlob ntawm semiconductor ib leeg siv lead ua ke thiab wafer etching tiam peb. Nws yog qhov tshwj xeeb tshaj yog rau cov khoom siv MOCVD hauv GaN lossis AlN ib leeg siv lead ua ke thiab cov khoom siv PVT hauv SiC ib leeg siv lead ua ke. Qhov no ua rau cov khoom siv lead ua zoo dua.

Cov txheej txheej Tantalum Carbide (TaC) tuaj yeem siv tau ruaj khov ntawm qhov kub siab txog li 2600 ° C. Lawv tsis cuam tshuam nrog ntau yam khoom siv hlau. Cov txheej txheej no suav tias yog qhov zoo tshaj plaws rau kev loj hlob ntawm cov khoom siv semiconductor ib leeg thiab wafer etching. Tshwj xeeb, nws pab tau rau MOCVD cov khoom siv loj hlob ntawm GaN lossis AlN ib leeg thiab PVT cov khoom siv loj hlob ntawm SiC ib leeg.

Qhov tawv ntawm cov khoom no kuj ua rau nws ruaj khov. Nws muaj Vickers hardness ntawm kwv yees li 1,880 HV.

Kev Ntshiab Siab Tshaj Plaws thiab Kev Tsim Khoom Me Me nrog TaC Txheej

Kev tswj hwm qhov huv siab heev thiab txo qis kev tsim cov khoom me me yog qhov tseem ceeb hauv kev tsim khoom semiconductor. Cov neeg nqa khoom uas tau coated nrog CVD TaC tau sau tseg rau lawv cov nqi tsim cov khoom me me qis heev. Lawv cov yam ntxwv ntawm qhov chaw du txo qhov muaj peev xwm ua rau muaj kev sib kis ntawm cov khoom me me. Qhov no, ua rau, pab txhim kho qhov huv thiab cov txiaj ntsig thaum lub sijhawm loj hlob epitaxial.

Txhim Kho Cov Txheej Txheem Rov Ua Dua thiab Cov Txiaj Ntsig nrogTxheej TaC

Txheej TaC ua rau cov txheej txheem rov ua dua hauv GaN thiab SiC cov khoom siv tsim khoom. Lub txheej txheem ruaj khov thiab tiv taus rau qhov chaw ua haujlwm hnyav ua kom ntseeg tau tias cov khoom siv reactor tswj hwm lawv qhov kev ncaj ncees thiab cov yam ntxwv ntawm qhov chaw ua haujlwm ntev. Qhov kev sib xws no yog qhov tseem ceeb rau kev ua tiav cov yeeb yaj kiab sib xws, cov ntaub ntawv doping meej, thiab cov xwm txheej thermal ruaj khov thoob plaws ntau qhov kev khiav ntau lawm. Thaum cov khoom siv tseem ruaj khov thiab tsis muaj kev puas tsuaj, cov chaw tsim khoom tuaj yeem tsim cov txheej txheem xav tau. Qhov kev kwv yees no txo ​​qis qhov sib txawv ntawm cov yam ntxwv ntawm cov khoom siv los ntawm wafer mus rau wafer thiab batch rau batch.

Qhov kev rov ua dua tshiab no ncaj qha txhais tau tias muaj cov txiaj ntsig zoo dua ntawm kev tsim khoom. Ib puag ncig ruaj khov txo qhov tshwm sim ntawm qhov tsis zoo uas tshwm sim los ntawm kev puas tsuaj ntawm cov khoom siv, kev ua qias tuaj, lossis cov xwm txheej ua tsis sib xws. Piv txwv li, cov tshuaj lom neeg tsis muaj zog ntawm TaC txheej tiv thaiv cov tshuaj tiv thaiv tsis xav tau ntawm cov pa roj txheej txheem thiab phab ntsa reactor, uas tuaj yeem ua rau muaj kev tsis huv lossis hloov pauv cov pa roj ntws. Nws qhov kev ruaj khov thermal siab ua kom cov khoom tsis warp lossis degrade nyob rau hauv qhov kub thiab txias heev, tswj cov geometries meej tseem ceeb rau kev loj hlob sib xws. Ntxiv mus, qhov kev ntshiab siab heev thiab cov khoom me me uas cuam tshuam nrog TaC txheej txo qis cov khoom me me, uas yog qhov ua rau cov khoom siv tsis ua haujlwm. Los ntawm kev txo cov chaw sib txawv thiab cov qhov tsis zoo no, cov chaw tsim khoom tsim ntau dua ntawm cov khoom siv GaN thiab SiC ua haujlwm ib wafer, ua kom zoo dua tag nrho cov txiaj ntsig ntawm kev tsim khoom thiab txo cov khib nyiab.

Cov Ntawv Thov Tseem Ceeb ntawm TaC Txheej hauv GaN thiab SiC Ntau Lawm

TaC Txheej rau Cov Cheebtsam Reactor

Txheej TaC ua lub luag haujlwm tseem ceeb hauv kev tiv thaiv ntau yam khoom siv reactor hauv GaN thiab SiC tsim tawm. Cov khoom tshwj xeeb uas tau txais txiaj ntsig los ntawm cov txheej txheem siab heev no suav nrog cov wafer carriers, injectors, susceptors, thiab heaters. Hauv SiC CVD reactors, cov khoom tseem ceeb uas tau coated nrog Tantalum Carbide qhia txog kev txhim kho kev ua tau zoo. Cov txheej txheem no sawv tawm rau nws qhov nyuaj heev thiab kev coj ua hlau. Nws muaj kev tiv thaiv zoo rau halogen thiab hydrogen corrosion, ua rau nws zoo tagnrho rau cov plasma hnyav thiab qhov kub thiab txias.

Cov txheej txheej no kuj muab cov thermal conductivity siab, ua kom cov cua sov ploj mus thiab tiv thaiv kom tsis txhob kub dhau thaum lub sijhawm kub siab. Nws tiv thaiv cov khoom siv hluav taws xob tseem ceeb thiab cov khoom siv reactor ntawm qhov kub txog li 2200 ° C, tswj kev ruaj khov tshuaj lom neeg thiab kev kho tshuab. Tantalum carbide muaj kev tiv thaiv corrosion zoo rau feem ntau cov kua qaub thiab alkalis, tiv thaiv kev puas tsuaj rau cov khoom hauv cov chaw corrosive. Nws tiv taus hydrogen, ammonia, monosilane, thiab silicon, muab kev tiv thaiv hauv cov chaw tshuaj lom neeg hnyav. Qhov kev tiv thaiv zoo no ua rau lub neej ntev ntawm cov khoom. TaC txheej kuj muaj kev ntshiab siab heev, nrog rau cov qib impurity feem ntau qis dua 5 ppm. Qhov no txo ​​​​​​cov qhov tsis zoo xws li micropores thiab etch pits hauv SiC crystals, txhim kho qhov zoo ntawm crystal.

Txheej TaC rau Etch Chambers thiab Plasma Processing Equipment

Txheej TaC tseem ceeb heev rau cov chaw etch thiab cov khoom siv ua plasma. Nws qhov nyuaj tshwj xeeb thiab kev tsis muaj zog tshuaj tiv taus kev hnav thiab xeb los ntawm cov chaw ua haujlwm plasma abrasive thiab cov tshuaj lom neeg hnyav. Qhov no ua kom cov khoom tseem ua haujlwm tau zoo hauv qab qhov xwm txheej hnyav. Qhov huv siab heev ntawm txheej txheej, nrog rau qib impurity qis dua 5 ppm, txo qis kev pheej hmoo ntawm kev ua qias tuaj hauv cov txheej txheem loj hlob ntawm cov siv lead ua.

Kev nplaum zoo thiab kev nthuav dav thermal tsawg tiv thaiv kev tawg lossis delamination thaum lub sijhawm thermal cycling. Qhov no yog qhov tseem ceeb rau kev tswj hwm qhov tseeb thiab kev sib xws hauv kev tsim khoom semiconductor. Hauv GaN / SiC epitaxial kev loj hlob, lub txheej tiv thaiv cov pa roj thiab txo qhov tsis zoo, txhim kho tag nrho cov txiaj ntsig. Cov ntaub ntawv purity siab thiab lub txheej TaC ruaj khov txo cov khoom me me thiab outgassing. Qhov no txo ​​qhov kev pheej hmoo ntawm wafer contamination thiab qhov tsis zoo. Lub txheej robust muab kev tiv thaiv zoo heev rau plasma erosion thiab tshuaj lom neeg tawm tsam, txuas ntxiv lub neej ua haujlwm ntawm cov khoom.

Kev txheej TaC tsis yog tsuas yog muaj txiaj ntsig xwb; nws tseem ceeb heev rau kev ua kom muaj kev ntseeg siab, kev ua haujlwm siab, thiab kev tsim khoom ntawm GaN thiab SiC cov khoom siv. Nws txo cov teeb meem kev ua qias tuaj thiab kev puas tsuaj uas muaj nyob hauv lawv cov txheej txheem tsim khoom. Nws lub luag haujlwm tsuas yog yuav loj hlob thaum cov thev naus laus zis siab heev no txuas ntxiv mus. Qhov no ua kom muaj kev tsim kho tshiab thiab kev nthuav dav ntawm kev lag luam.

Cov Lus Nug Feem Ntau

Txheej TaC yog dab tsi?

Txheej TaC yog ib txheej tiv thaiv ntawm Tantalum Carbide siv rau cov khoom graphite. Cov chaw tsim khoom siv cov txheej txheem Chemical Vapor Deposition (CVD). Cov khoom siv ceramic tawv no ua rau muaj kev ruaj khov thiab tiv taus tshuaj lom neeg rau cov ntawv thov semiconductor.

Cov txheej txheem TaC txhim kho cov txiaj ntsig ntawm kev tsim khoom li cas?

Txheej TaC ua kom muaj cov txheej txheem ua haujlwm zoo sib xws. Nws tiv thaiv kev puas tsuaj thiab kev ua qias tuaj ntawm cov khoom siv. Qhov kev ruaj khov no txo ​​qhov tsis zoo thiab kev hloov pauv ntawm cov yam ntxwv ntawm cov khoom siv. Cov chaw tsim khoom ua tiav cov lej ntau dua ntawm cov khoom siv GaN thiab SiC ua haujlwm ib lub wafer.

Vim li cas TaC txheej thiaj li nyiam dua SiC txheej hauv qee daim ntawv thov?

Txheej txheej TaC muaj kev tiv thaiv tshuaj lom neeg zoo dua thiab tiv taus xeb piv rau txheej txheej SiC. Nws tiv taus cov chaw muaj tshuaj lom neeg hnyav dua thiab kub dua. Qhov no ua rau nws tsim nyog dua rau cov txheej txheem tshwj xeeb hauv kev tsim khoom GaN thiab SiC.

Cov khoom tshwj xeeb twg tau txais txiaj ntsig los ntawm TaC txheej hauv GaN / SiC ntau lawm?

Cov khoom siv reactor xws li wafer carriers, injectors, susceptors, thiab heaters tau txais txiaj ntsig zoo heev. Cov chav etch thiab cov khoom siv ua plasma kuj siv TaC txheej. Nws tiv thaiv cov khoom no los ntawm cov pa roj corrosive, kub siab, thiab abrasive plasma.

Ua Kauj Ruam Tom Ntej

Npaj txhij los coj kev ruaj khov thiab cov txiaj ntsig tsis tau muaj dua los rau koj cov txheej txheem GaN thiab SiC?

Tiv tauj peb cov kws tshaj lij txog kev tshawb fawb txog cov ntaub ntawv hnub nolos tham txog seb cov tshuaj pleev xim TaC tuaj yeem hloov pauv koj qhov kev ua tau zoo ntawm MOCVD lossis CVD reactor li cas.