Ko te paparanga epitaxial he kiriata angiangi kotahi-kiriata motuhake e whakatipuria ana ki runga i te papa wafer mā te tukanga epitaxial; ko te papa wafer me te kiriata epitaxial e kiia ana ko te papa wafer epitaxial. I roto i ēnei, ko te whakatipu i te paparanga epitaxial silicon carbide ki runga i te papa wafer silicon carbide e arahi ana ka puta he papa wafer epitaxial silicon carbide ōrite, ka taea te hanga anō hei taputapu hiko pēnei i ngā diode Schottky, MOSFET, me IGBT. Ko te momo papa e whakamahia whānuitia ana ko te papa 4H-SiC.
I te mea he mea hanga te nuinga o ngā taputapu ki runga i ngā paparanga epitaxial, he pānga nui tō te kounga o te paparanga epitaxial ki te mahi a te taputapu. Heoi, ka pāngia te kounga o te paparanga epitaxial e te tukatuka tioata me te papa, ka waiho i a ia ki tētahi wāhi tino nui i roto i te umanga, ā, he tūranga nui hoki tōna i roto i tōna whanaketanga.
Ko ngā tikanga matua mō te whakarite i ngā paparanga epitaxial silicon carbide ko: te whakatakotoranga kohu; te epitaxy wāhanga wai (LPE); te epitaxy hihi ngota (MBE); me te whakatakotoranga kohu matū (CVD). I roto i ēnei, ko te whakatakotoranga kohu matū (CVD) te tikanga e whakamahia whānuitia ana mō te epitaxy ōrite 4H-SiC. Ko te epitaxy CVD 4H-SiC e whakamahi ana i ngā taputapu CVD, e whakarite ana i te haere tonu o te hanganga tioata 4H-SiC i raro i ngā pāmahana tipu teitei.
I roto i ngā taputapu CVD, kāore e taea te whakatakoto tika i te papa ki runga i te mata whakarewa, te whakatakoto noa rānei ki runga i te turanga mō te whakatakoto epitaxial, nā te mea he maha ngā āhuatanga e pā ana ki tēnei, pērā i te ahunga rere o te hau (whakapae, poutū), te pāmahana, te pēhanga, te whakau, me te poke mai i ngā matūriki e maringi ana. Nō reira, me whai turanga tautoko; ka whakatakotoria te papa ki runga i te paepae, kātahi ka mahia te whakatakoto epitaxial ki runga i te papa mā te whakamahi i te hangarau CVD. He turanga karāti kua pania ki te SiC tēnei turanga tautoko.
Hei wāhanga matua, he kaha motuhake me te modulus motuhake te papa kauwhata, me te ātete pai ki te ru wera me te waikura. Heoi, i te wā e hangaia ana, ka pāngia te kauwhata e te waikura me te maturuturunga paura nā ngā hau waikura me ngā matū organometallic toenga, ka whakaiti nui i te roa o te mahi a te papa. I taua wā anō, ka taea e te paura kauwhata kua whakahekehia te poke i ngā maramara. I te hanga o ngā papa epitaxial silicon carbide, kua uaua haere te whakatutuki i ngā whakaritenga tino kaha mō ngā rauemi kauwhata, ka tino whakawhāiti i tō rātou whanaketanga me te whakamahinga mahi. Nō reira,hangarau paningakua puta ake hei otinga.
Ngā Painga o ngā Paninga SiC i roto i te Ahumahi Ārahi-Haumaru
Me tutuki i ngā āhuatanga ā-tinana me ā-matū o ngā paninga ngā whakaritenga pakari mō te ātete ki te pāmahana teitei me te waikura, nā te mea ka pā tika ēnei ki te hua me te roa o te oranga o te hua. He kaha teitei te rauemi SiC, he pakeke teitei, he iti te tauwehenga o te whakawhānui wera, ā, he pai te kawe wera, ka waiho hei rauemi hanganga pāmahana teitei me te rauemi haurua-ira. Ina whakamahia ki ngā papa karāhe, ko ōna painga ko:
1) He ātete te SiC ki te waikura, ā, ka taea e ia te kapi katoa i te papa graphite. Nā tōna matotorutanga teitei ka ārai i te kino mai i ngā hau waikura.
2) He nui te kawe wera o te SiC, ā, he kaha te hono atu ki te papa graphite, e whakarite ana kia mau tonu te paninga ahakoa ngā huringa pāmahana teitei-iti e whakahokia ana.
3) He tino pai te pumau matū o te SiC, e ārai ana i te pakaru o te paninga i roto i ngā āhuarangi waikura, pāmahana teitei.
Hei tāpiri atu, ko ngā oumu epitaxial i hangaia mai i ngā rauemi rerekē me whai paepae karāpeti me ngā whakaritenga mahi motuhake. Me hototahi te tauwehenga whānui wera o te rauemi karāpeti ki te pāmahana tipu o te oumu epitaxial. Hei tauira, nā te mea he teitei te pāmahana tipu mō te epitaxy silicon carbide, me whai paepae he nui te taurite o te tauwehenga whānui wera. He iti noa te rerekētanga o te tauwehenga whānui wera o te SiC mai i te karāpeti, koia te rauemi pai mō te paninga i te mata o ngā papa karāpeti.
He maha ngā āhua tioata o te SiC, ko ngā momo 3C, 4H, me te 6H te mea e whakamahia ana i tēnei wā, ā, he rerekē ngā whakamahinga o ia momo. Hei tauira, ka whakamahia te 4H-SiC hei hanga i ngā taputapu hiko-teitei; ko te 6H-SiC te mea tino pumau, ā, ka whakamahia hei hanga i ngā taputapu hiko-whakaata; ā, nā te rite o te hanganga o te 3C-SiC ki te GaN, ka whakamahia hei hanga i ngā paparanga epitaxial GaN mō te hanga i ngā taputapu RF SiC-GaN. E mōhiotia whānuitia ana te 3C-SiC ko te β-SiC. Ko tētahi whakamahinga matua o te β-SiC he mea hanga hei kiriata angiangi me te paninga; nō reira, ko te β-SiC te rauemi matua e whakamahia ana mō ngā paninga i tēnei wā.
Hei mea e pau ana i roto i te hanga haurua-ira, ka whakamahia nuitia ngā paninga SiC i roto i ngā tukanga pēnei i te whakarite papa, te epitaxy, te waikura me te horapa, te whakairo, me te whakaurunga katote. Me tutuki i ngā āhuatanga ā-tinana me te matū o te paninga ngā whakaritenga pakari mō te ātete ki te pāmahana teitei me te ātete ki te waikura, nā te mea ka pā tika ēnei ki te hua me te roa o te ora o te hua. Nō reira, he mea nui te whakarite i ngā paninga SiC.
Te Tukanga mō te Whakarite i ngā Paninga Silicon Carbide
I tēnei wā, ko ngā tikanga matua mō te whakarite i ngā paninga SiC ko te tikanga sol-gel, te tikanga tāmau, te paninga paraihe, te rehu plasma, te tauhohenga kohu matū (CVR), me te whakatakotoranga kohu matū (CVD).
Tikanga Tāmau
He momo whakapūtanga totoka pāmahana-teitei tēnei tikanga. Ko te nuinga o te wā ka whakamahia he ranunga o te paura silicon (Si) me te paura waro (C) hei paura whakauru. Ka whakanohoia he papa graphite ki roto i te paura whakauru, ka whakapūtangahia ki ngā pāmahana teitei i roto i te hau hau kore mahi, ā, ka puta he paninga SiC ki runga i te mata o te papa graphite. He tukanga māmā tēnei tikanga, ā, he pai te piri i waenga i te paninga me te papa; heoi, he iti te ōritetanga o te paninga i te ahunga matotoru, ā, he ngāwari ki te whakawhanake i ngā pore maha, ka hua ake he ātete waikura ngoikore.
Tikanga Paninga Paraihe
Ko te tikanga paninga paraihe ko te paninga rauemi mata wai ki te mata o te papa graphite, ā, muri iho ka whakamaroke i te rauemi i tētahi pāmahana motuhake hei hanga i te paninga. He māmā tēnei tikanga, ā, he iti te utu; heoi, he ngoikore te piri o te paninga ki te papa, he ngoikore te ōritetanga, ā, he angiangi te āhua me te iti o te ātete ki te waikura, me whai tikanga tāpiri.
Tikanga Rehu Plasma
Ko te tikanga rehu plasma ko te whakamahi i te pū plasma hei rehu i ngā rauemi mata rewa, rewa-haurua rānei ki runga i te mata o te papa graphite, kātahi ka totoka, ka piri hei hanga i tētahi paninga. He māmā noa iho tēnei tikanga ki te whakahaere, ā, ka taea te whakaputa i ngā paninga silicon carbide matotoru; heoi, he angiangi rawa ngā paninga ka puta, ā, he iti te ātete ki te waikura. Nō reira, e whakamahia whānuitia ana i roto i te whakarite i ngā paninga hiato SiC hei whakapai ake i te kounga o te paninga.
Tikanga Whakarewa-Hau
Ko te tikanga gel-sol te tikanga matua ko te whakarite i tētahi otinga sol mārama, ōrite hei paninga i te mata o te papa. I muri i te maroke hei gel, ka whakakorikoria te rauemi hei hanga i te paninga. He māmā te whakahaere i tēnei tikanga, ā, he iti te utu; heoi, he ngoikoretanga ngā paninga e puta mai ana, pērā i te iti o te ātete ki te ru wera me te āhua o te pakaru, e whakawhāiti ana i tā rātou whakamahinga whānui.
Tikanga Tauhohenga Kohu Matū (CVR)
Ko te nuinga o te wā, ka whakamahia e te CVR ngā paura Si me te SiO₂ hei whakaputa i te kohu SiO₂ i ngā pāmahana teitei, ka whakaoho i te raupapa o ngā tauhohenga matū ki te mata o te papa Si hei hanga i te paninga SiC. Ka piri pūmau te paninga SiC i hangaia mā tēnei tikanga ki te papa; heoi, he teitei te pāmahana tauhohenga, ā, he nui hoki te utu.
Te Whakatakotoranga Kohu Matū (CVD)
Ko te CVD te hangarau matua mō te whakarite i ngā paninga SiC ki runga i ngā mata o te papa. Ko te tukanga matua he raupapa o ngā tauhohenga ā-tinana, ā-matū hoki i waenga i ngā matū tauhohenga hau me te mata o te papa, ā, ka mutu, ka puta he paninga SiC. Ka piri pūmau ngā paninga SiC i hangaia e te hangarau CVD ki te mata o te papa, ā, ka taea te whakapai ake i te ātete waikura me te ātete mimiti o te rauemi papa; heoi, he roa te wā whakatakotoranga e hiahiatia ana mō tēnei tikanga, ā, kei roto i ngā hau tauhohenga ētahi wāhanga paitini.
Ngā Auahatanga o ngā Paninga SiC
Ko ngā paninga SiC e whakamahia nuitia ana hei paunga i roto i te hanga haurua-ira, me ngā inenga mahi matua tae atu ki te ōritetanga o te paninga, te tauwehenga o te whakawhānui wera, me te kawe wera. Ahakoa he nui te tono ā-rohe mō ngā paninga SiC i Haina, kei te koretake tonu te hangarau. I tāwāhi, kotahi anake te kamupene o Amerika e mahi ana i tēnei mara, ā, he utu nui ana hua.
Ngā poti karaihehe mea pau e whakamahia ana i roto i te hanga epitaxial ka taea te whakakapi i te karāpeti pania-SiC, ahakoa he iti te rahinga mākete. Ko te karāpeti pania-TaC e whai ake nei, he pai ake te ātete ki te waikura matū i te karāpeti tahanga, i te karāpeti pania-SiC rānei, engari he tino utu nui, ā, kei roto tonu i ngā wāhanga tīmatanga o te whanaketanga. I tēnei wā, ko ngā kamupene ā-rohe pēnei iLiufang semiconductor, Hemikara, meVetek Semiconductorkei te mahi i te R&D i tēnei mara.
Wā tuku: Mei-20-2026