Sekoahelo/se koahetsoeng ka SiC sa substrate ea Graphite bakeng sa Semiconductor，Literei tsa GraphiteGraphite ea Sicli-susceptor tsa epitaxy,
Lisebelisoa tsa khabone tse thusang ho boloka matla, EPITAXY LE MOCVD, li-susceptor tsa epitaxy, Literei tsa Graphite, Li-Susceptor tsa Wafer,

Seaparo sa CVD-SiC se na le litšobotsi tsa sebopeho se ts'oanang, thepa e nyane, khanyetso ea mocheso o phahameng, khanyetso ea oxidation, bohloeki bo phahameng, khanyetso ea asiti le alkali le reagent ea organic, e nang le thepa e tsitsitseng ea 'mele le ea lik'hemik'hale.

Ha ho bapisoa le thepa ea graphite e hloekileng haholo, graphite e qala ho oxidation ho 400C, e leng se tla baka tahlehelo ea phofo ka lebaka la oxidation, e leng se fellang ka tšilafalo ea tikoloho ho lisebelisoa tsa kantle le likamore tsa vacuum, le ho eketsa litšila tsa tikoloho e hloekileng haholo.

Leha ho le jwalo, ho kwahela SiC ho ka boloka botsitso ba mmele le ba dikhemikhale ho di-degree tse 1600, E sebediswa haholo indastering ya sejwalejwale, haholoholo indastering ya semiconductor.

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho koahela SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li arabele mochesong o phahameng ho fumana limolek'hule tsa SiC tse hloekileng haholo, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, li theha lera le sireletsang la SIC. SIC e entsoeng e hokahane ka thata le motheo oa graphite, e fa motheo oa graphite thepa e ikhethang, kahoo e etsa hore bokaholimo ba graphite bo be bo kopaneng, bo se nang Porosity, bo hane mocheso o phahameng, bo hane ho ts'enyeha le ho haneloa ke oxidation.

Likarolo tse ka sehloohong:

1. Khanyetso ea ho chesoa ha oxidation mochesong o phahameng:

Khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho fihla ho 1700 C.

2. Bohloeki bo phahameng: bo entsoe ka ho kenngoa ha mouoane ka lik'hemik'hale tlas'a boemo ba chlorination bo phahameng ba mocheso.

3. Khanyetso ea khoholeho ea mobu: ho thatafala ho hoholo, bokaholimo bo kopaneng, likaroloana tse tšesaane.

4. Ho hanyetsa mafome: asiti, alkali, letsoai le li-reagent tsa tlhaho.

Litlhaloso tse ka Sehloohong tsa Liaparo tsa CVD-SIC:

Bokhoni ba ho Phepelo:

Sengoathoana/Likarolo tse 10000 ka Khoeli
Sephutheloana le Phano:
Ho paka: Ho paka ho tloaelehileng le ho matla
Mokotlana o mongata + Lebokose + Lebokose + Pallet
Kou:
Ningbo/Shenzhen/Shanghai
Lead time: