Paninga/paninga SiC o te papa Graphite mō te Semiconductor,Ngā Paepae Karāpiti,Karāpiti Sicngā ārai epitaxy,
Ka tukuna e te waro ngā pūngao, Te Epitaxy me te MoCVD, ngā ārai epitaxy, Ngā Paepae Karāpiti, Ngā Pūwero Wafer,
Ko ngā āhuatanga o te paninga CVD-SiC he hanganga ōrite, he rauemi kiato, he ātete pāmahana teitei, he ātete waikura, he parakore teitei, he ātete waikawa me te kawakore me te matū matū waro, me ngā āhuatanga ā-tinana me te matū pumau.
Ki te whakatauritea ki ngā rauemi karāpeti parakore-teitei, ka tīmata te karāpeti ki te waikura i te 400C, ka ngaro te paura nā te waikura, ka hua ake te parahanga taiao ki ngā taputapu taha me ngā rūma korehau, ka piki ake hoki ngā poke o te taiao parakore-teitei.
Heoi, ka taea e te paninga SiC te pupuri i te pumau ā-tinana me te matū i te 1600 nekehanga, he mea whakamahi whānuitia i roto i te ahumahi hou, inā koa i roto i te ahumahi semiconductor.
Ka whakaratohia e tā mātou kamupene ngā ratonga tukanga paninga SiC mā te tikanga CVD i runga i te mata o te karāpeti, te uku me ētahi atu rauemi, kia tauhohe ai ngā hau motuhake kei roto te waro me te silicon i te pāmahana teitei hei whiwhi i ngā ngota SiC parakore teitei, ka whakatakotoria ngā ngota ki runga i te mata o ngā rauemi pania, ka hanga he paparanga tiaki SIC. Ka piri pūmau te SIC i hangaia ki te turanga karāpeti, ka hoatu he āhuatanga motuhake ki te turanga karāpeti, nā reira ka hanga te mata o te karāpeti kia kiato, kia kore he porosity, kia ātete ki te pāmahana teitei, kia ātete ki te waikura me te ātete ki te waikura.
Ngā āhuatanga matua:
1. Ātete waikura pāmahana teitei:
He tino pai tonu te ātete ki te waikura ahakoa te teitei o te pāmahana ki te 1700 C.
2. Teitei o te parakore: i hangaia mā te whakatakotoranga kohu matū i raro i te āhuatanga whakapūkara pāmahana teitei.
3. Ātete ki te horo: he pakeke teitei, he mata kiato, he matūriki angiangi.
4. Ātete ki te waikura: waikawa, kawakore, tote me ngā matū waro.
Ngā Whakatakotoranga Matua o ngā Paninga CVD-SIC:
| SiC-CVD | ||
| Kiato | (karamu/cc)
| 3.21 |
| Kaha piko | (Mpa)
| 470 |
| Te whakawhānui wera | (10-6/K) | 4
|
| Te kawe wera | (W/mK) | 300 |
Te āheinga tuku:
10000 Ngā Wāhanga/Ngā Wāhanga ia Marama
Te Tākai me te Tukunga:
Te Tākai: Te Tākai Paerewa me te Kaha
Pēke Poly + Pouaka + Kātene + Papa
Tauranga:
Ningbo/Shenzhen/Shanghai
Wā Arataki:
| Rahinga (Ngā Wāhanga) | 1 – 1000 | >1000 |
| Te Wā Tata (ngā Rā) | 15 | Hei whiriwhiringa |
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