1. Kev siv tshuab doping hmoov silicon carbide
Kev ntxiv cov Ce element kom txaus rau hauv silicon carbide hmoov tuaj yeem ua rau cov 4H-SiC loj hlob ruaj khov. Kev paub dhau los tau qhia tias kev ntxiv cov Ce element rau hauv cov hmoov tuaj yeem ua rau cov silicon carbide crystals loj hlob sai dua, ua rau cov crystals loj hlob sai dua. Kev teeb tsa silicon carbide tuaj yeem tswj tau, ua rau kev teeb tsa crystals loj hlob zoo ib yam thiab tsis tu ncua. Tiv thaiv kom tsis txhob muaj cov khoom tsis huv hauv cov crystals, txo qhov tsis zoo, thiab ua rau yooj yim dua kom tau cov crystals thiab cov crystals zoo. Nws tuaj yeem tiv thaiv kev xeb ntawm sab nraub qaum ntawm cov crystal thiab ua rau cov crystals loj hlob sai dua.
2. Kev tswj hwm qhov kub thiab txias ntawm thaj chaw axial thiab radial
Qhov kub axial gradient feem ntau cuam tshuam rau cov qauv siv lead ua thiab kev ua haujlwm ntawm kev loj hlob ntawm cov siv lead ua. Qhov kub gradient me dhau yuav ua rau muaj cov heterocrystals tshwm sim thaum lub sijhawm loj hlob ntawm cov siv lead ua thiab tseem cuam tshuam rau qhov kev thauj mus los ntawm cov pa roj, ua rau qhov kev loj hlob ntawm cov siv lead ua txo qis. Qhov kub axial thiab radial gradients tsim nyog pab txhawb kev loj hlob sai ntawm SiC siv lead ua thiab tswj kev ruaj khov ntawm cov siv lead ua zoo.
3. Kev tswj hwm lub dav hlau dislocation (BPD) thev naus laus zis
Qhov ua rau muaj qhov tsis zoo ntawm BPD yog vim qhov kev ntxhov siab ntawm cov siv lead ua ke ntau dua qhov kev ntxhov siab tseem ceeb ntawmSiC siv lead ua, ua rau lub kaw lus slip ua haujlwm. Vim tias BPD yog perpendicular rau qhov kev loj hlob ntawm crystal, nws feem ntau yog tsim tawm thaum lub sijhawm loj hlob ntawm crystal thiab cov txheej txheem txias tom qab.
4. Kev tswj hwm thiab tswj cov thev naus laus zis ntawm cov khoom siv roj theem
Hauv cov txheej txheem loj hlob ntawm cov siv lead ua, kev nce qhov sib piv ntawm cov pa roj carbon-silicon thiab qhov sib piv ntawm cov pa roj hauv qhov chaw loj hlob yog ib qho kev ntsuas zoo los ua kom muaj kev loj hlob ruaj khov ntawm ib daim ntawv siv lead ua. Vim tias qhov sib piv ntawm cov pa roj carbon-silicon siab tuaj yeem txo cov kauj ruam loj coalescence thiab tswj cov ntaub ntawv loj hlob ntawm cov noob siv lead ua, nws tuaj yeem tiv thaiv polymorphism.
5. Kev siv tshuab tswj kev ntxhov siab tsawg
Thaum lub sijhawm ua cov txheej txheem loj hlob ntawm cov siv lead ua, qhov muaj kev ntxhov siab tuaj yeem ua rau cov dav hlau siv lead ua sab hauv ntawmSiCkom khoov, ua rau cov khoom siv lead ua tsis zoo thiab txawm tias cov khoom siv lead ua tawg. Ntxiv mus, kev ntxhov siab loj tuaj yeem ua rau muaj kev nce ntxiv ntawm kev tawg hauv lub dav hlau ntawm lub wafer. Cov qhov tsis zoo no tuaj yeem nkag mus rau hauv txheej epitaxial thaum lub sijhawm epitaxial, cuam tshuam loj heev rau kev ua haujlwm ntawm lub cuab yeej hauv theem tom qab.
Nov yog ob peb txoj hauv kev los txhim kho cov txheej txheem rau kev txo kev ntxhov siab hauv cov siv lead ua:
1. Kho qhov kev faib tawm ntawm qhov kub thiab txias thiab cov txheej txheem kom ua rau SiC ib leegkev loj hlob ntawm cov siv lead uamus ntxiv rau hauv cov xwm txheej ze li ntawm qhov sib npaug li sai tau.
2. Txhim kho cov qauv crucible thiab cov duab kom tso cai rau cov siv lead ua kom loj hlob tau yooj yim li sai tau hauv lub xeev tsis muaj kev txwv.
3. Hais txog kev kho cov noob siv lead ua, hloov kho cov txheej txheem kho kom txo qhov sib txawv ntawm cov coefficients thermal expansion ntawm cov noob siv lead ua thiab lub graphite tuav thaum lub sijhawm cua sov, yog li txo qhov kev ntxhov siab sab hauv hauv 4H-SiC ib leeg siv lead ua. Ib txoj hauv kev uas feem ntau yog tawm hauv 2 hli qhov sib txawv ntawm cov noob siv lead ua thiab lub graphite tuav.
4. Hloov cov txheej txheem annealing siv lead ua los ntawm kev siv lub cub tawg txias annealing rau cov siv lead ua. Kho qhov kub thiab lub sijhawm annealing kom tso tawm tag nrho kev ntxhov siab sab hauv hauv cov siv lead ua.
Saib mus tom ntej, cov thev naus laus zis zoo silicon carbide (SiC) ib leeg siv lead ua ke yuav tsim kho ntau yam tseem ceeb:
1. Kev nthuav dav qhov loj ntawm cov wafer: Txoj kab uas hla ntawm SiC crystal tau nce ntxiv los ntawm cov millimeters pib mus rau tam sim no 6-nti, 8-nti, thiab txawm tias loj dua 12-nti wafers. Kev npaj cov SiC crystals loj dua txhim kho kev ua haujlwm zoo, txo cov nqi, thiab ua tau raws li qhov xav tau ntawm cov khoom siv hluav taws xob siab.
2. Txhim kho qhov zoo ntawm cov siv lead ua: Cov siv lead ua SiC zoo yog qhov tseem ceeb rau cov khoom siv ua haujlwm siab. Txawm hais tias muaj kev vam meej tseem ceeb, qhov tsis zoo xws li cov kav dej me me, kev tawg, thiab cov khoom tsis huv tseem muaj, cuam tshuam rau kev ua haujlwm thiab kev ntseeg siab ntawm cov khoom siv.
3. Txo cov nqi tsim khoom: Tus nqi siab ntawm kev npaj SiC siv lead ua rau nws siv tsis tau rau qee qhov chaw. Kev txo nqi tuaj yeem ua tiav los ntawm kev ua kom zoo dua cov txheej txheem kev loj hlob, txhim kho kev ua haujlwm zoo, thiab txo cov nqi siv khoom siv raw.
4. Siv kev tsim khoom ntse: Nrog kev nce qib hauv AI thiab cov ntaub ntawv loj, SiC siv lead ua kom loj hlob thev naus laus zis yuav siv kev txawj ntse ntau ntxiv. Kev saib xyuas thiab tswj hwm lub sijhawm tiag tiag los ntawm cov sensors thiab cov tshuab tswj hwm tsis siv neeg txhim kho kev ruaj khov thiab kev tswj hwm. Tib lub sijhawm, kev siv cov ntaub ntawv loj analytics ua kom zoo dua cov ntaub ntawv loj hlob, yog li txhim kho qhov zoo ntawm siv lead ua thiab kev ua haujlwm ntau lawm.
Cov txheej txheem npaj cov khoom siv silicon carbide zoo yog ib qho ntawm cov kub kub tam sim no hauv kev tshawb fawb txog cov khoom siv semiconductor. Nrog rau kev nce qib tas mus li ntawm thev naus laus zis, cov thev naus laus zis loj hlob ntawm silicon carbide crystal yuav txuas ntxiv mus tsim thiab txhim kho, muab lub hauv paus ruaj khov rau kev siv silicon carbide hauv kev kub siab, zaus siab, lub zog siab thiab lwm yam teb.
Lub sijhawm tshaj tawm: Lub Xya Hli-10-2025