1. Tekinoroji yekushandisa silicon carbide powder doping
Kuisa huwandu hwakakodzera hweCe element musilicon carbide powder kunogona kuita kuti kukura kwakasimba kwechimiro chimwe chete chekristaro che4H-SiC kukure. Ruzivo rwekushanda rwaratidza kuti kuisa zvinhu zveCe muzvinhu zvehupfu kunogona kuwedzera kukura kwemakristaro esilicon carbide, zvichiita kuti makristaro akure nekukurumidza. Kurongeka kwesilicon carbide kunogona kudzorwa, zvichiita kuti nzira yekukura kwekristaro ive yakafanana uye yakajairika. Kudzivirira kugadzirwa kwetsvina mumakristaro, kuderedza kuumbwa kwezvikanganiso, uye kuita kuti zvive nyore kuwana makristaro echimiro chimwe chete uye makristaro emhando yepamusoro. Zvinogona kudzivirira ngura iri kumashure kwekristaro uye kuwedzera chiyero chimwe chete chekristaro.
2. Tekinoroji yekudzora gradient yemunda wekupisa ne radial uye radial
Kukwira kwekushisa kweaxial kunonyanya kukanganisa chimiro chekukura kwekristaro uye kushanda zvakanaka kwekukura kwekristaro. Kukwira kwekushisa kudiki kwazvo kunotungamira pakuonekwa kwemakristalo eheterocrystals panguva yekukura kwekristaro uye zvakare kukanganisa mwero wekutakura kwezvinhu zvine gasi, zvichikonzera kudzikira kwemwero wekukura kwekristaro. Kukwira kwekushisa kweaxial neradial kwakakodzera kunobatsira kukura nekukurumidza kwekristaro yeSiC uye kuchengetedza kugadzikana kwemhando yekristaro.
3. Tekinoroji yekudzora dislocation yendege (BPD) yeBasis plane
Chikonzero chikuru chekuumbwa kweBPD defect ndechekuti shear stress iri mukristaro inodarika critical shear stress yeKiristaro yeSiC, zvichikonzera kuti system yekutsvedza ishande. Nekuti BPD yakatarisana nekwainobva kristalo kukura, inonyanya kugadzirwa panguva yekukura kwekristalo uye panguva yekutonhodza kwekristaro gare gare.
4. Gas phase component ratio regulation uye control technology
Mukukura kwekristaro, kuwedzera chiyero chekabhoni-silicon uye chiyero chegasi-phase component munzvimbo yekukura inzira inoshanda yekuwana kukura kwakasimba kwechimiro chimwe chete chekristaro. Nekuti chiyero chepamusoro chekabhoni-silicon chinogona kuderedza kubatana kukuru uye kuchengetedza nhaka yeruzivo rwekukura pamusoro pekristaro yembeu, inogona kudzvinyirira polymorphism.
5.Kudzora tekinoroji yekudzvinyirira yakaderera
Munguva yekukura kwekristaro, kuvapo kwekushushikana kunogona kukonzera mapuraneti emukati ekristaroSiCkukotama, zvichikonzera kristaro isina kunaka uye kutotsemuka kwekristaro. Uyezve, kushushikana kukuru kunogona kukonzera kuwedzera kwekutsemuka kwepasi pewafer. Kukanganisika uku kunogona kupinda muchikamu cheepitaxial panguva yekushanda kweepitaxial, zvichikanganisa zvakanyanya mashandiro emudziyo padanho rekupedzisira.
Heano nzira dzinoverengeka dzekuvandudza maitiro ekuderedza kushushikana mukati mekristaro:
1. Gadzirisa kugoverwa kwemunda wetembiricha uye maparamita ekugadzirisa kuti ugonese SiC imwe chetekukura kwekristarokuenderera mberi mumamiriro ezvinhu ari pedyo nekuenzana sezvinobvira.
2.Gadzirisa chimiro chemuchina wekupisa kuti kristaro ikure zvakasununguka sezvinobvira mumamiriro asina kumanikidzwa.
3. Nezvekugadzirisa kristalo yembeu, chinja maitiro ekugadzirisa kuti uderedze mutsauko mukuwedzera kwekushisa pakati pekristalo yembeu nechibati chegraphite panguva yekupisa, nokudaro kuderedza kushushikana kwemukati mukati mekristaro imwe chete ye4H-SiC. Nzira yakajairika ndeyekusiya mukaha we 2 mm pakati pekristaro yembeu nechibati chegraphite.
4. Chinja maitiro ekugadzira kristalo nekushandisa crystal-cooled annealing. Gadzirisa tembiricha yekuisa crystal uye nguva kuti ibudise kushushikana kwemukati mukati mekristaro zvizere.
Tichitarisa mberi, tekinoroji yepamusoro yekugadzirira silicon carbide (SiC) single crystal ichakura munzira dzakasiyana siyana:
1. Kukwidza saizi yewafer: SiC crystal dhayamita yakawedzera kubva pamamilimita ekutanga kusvika kumawafers emazuva ano ane 6-inch, 8-inch, uye akatokura ane 12-inch. Kugadzira makristaro makuru eSiC kunowedzera kushanda zvakanaka kwekugadzira, kunoderedza mitengo, uye kunosangana nezvinodiwa nemidziyo ine simba guru.
2.Kuvandudza hunhu hwekristaro: Makristaro eSiC emhando yepamusoro akakosha pamidziyo inoshanda zvakanyanya. Kunyangwe paine kufambira mberi kukuru kwakaitwa, zvikanganiso zvakaita sema micropipes, dislocations, uye tsvina zvichiripo, zvichikanganisa mashandiro emidziyo uye kuvimbika kwayo.
3. Kuderedza mari yekugadzira: Mutengo wakakwira wekugadzira SiC crystal unoderedza kushandiswa kwayo mune dzimwe nzvimbo. Kuderedza mari kunogona kuitwa nekuvandudza maitiro ekukura, kuvandudza mashandiro ekugadzira, uye kuderedza mari yekushandisa zvinhu zvisina kugadzirwa.
4. Kugadzira zvinhu zvine hungwaru: Nekufambira mberi muAI nedata guru, tekinoroji yekukura kweSiC crystal icharamba ichinyanya kugamuchira hungwaru. Kutarisa nekudzora panguva chaiyo kuburikidza nemasensa uye masisitimu ekutonga otomatiki kunovandudza kugadzikana kwemaitiro uye kudzora. Panguva imwe chete, kushandisa big data analytics kunogadzirisa data rekukura, nokudaro zvichivandudza mhando yekristaro uye kushanda zvakanaka kwekugadzira.
Tekinoroji yekugadzirira makristaro emhando yepamusoro esilicon carbide imwe yenzvimbo dzinonyanya kukosha mukutsvaga zvinhu zve semiconductor. Nekufambira mberi kuri kuita tekinoroji, tekinoroji yekukura kwesilicon carbide crystal icharamba ichikura uye ichivandudza, zvichipa hwaro hwakasimba hwekushandiswa kwesilicon carbide munzvimbo dzinopisa zvakanyanya, dzinogara dzichishandiswa kakawanda, dzine simba rakawanda nedzimwe nzvimbo.
Nguva yekutumira: Chikunguru-10-2025