E ai ki te Pikitia 3, e toru ngā tikanga matua e whai ana ki te whakarato i te tioata kotahi SiC me te kounga teitei me te whai hua: te epitaxy wāhanga wai (LPE), te kawe kohu ā-tinana (PVT), me te whakatakotoranga kohu matū pāmahana-teitei (HTCVD). He tukanga kua roa te PVT mō te whakaputa tioata kotahi SiC, e whakamahia whānuitia ana i roto i ngā kaihanga wafer nui.
Heoi, kei te tere te whanake me te auaha o ngā tukanga e toru. Kāore anō kia taea te whakatau ko tēhea tukanga ka whakamahia whānuitia ā muri ake nei. Ina koa, kua pūrongohia i ngā tau tata nei te tioata kotahi SiC kounga teitei i hangaia mā te tipu otinga i te tere nui, ko te tipu nui o te SiC i roto i te wāhanga wai e hiahia ana ki te pāmahana iti iho i te tukanga whakapūmau, te tukanga whakatakotoranga rānei, ā, e whakaatu ana i te hiranga o te whakaputa i ngā papa SiC momo-P (Ripanga 3) [33, 34].
Pikitia 3: Te hoahoa o ngā tikanga whakatipu tioata kotahi SiC matua e toru: (a) te epitaxy wāhanga wai; (b) te kawe kohu ā-tinana; (c) te whakatakotoranga kohu matū pāmahana teitei
Ripanga 3: Whakataurite o te LPE, PVT me te HTCVD mō te whakatipu tioata takitahi SiC [33, 34]
Ko te tipu otinga he hangarau paerewa mō te whakarite i ngā haurua-ā-ira matū [36]. Mai i te tekau tau atu i 1960, kua ngana ngā kairangahau ki te whakawhanake i tētahi tioata i roto i te otinga [37]. Kia whakawhanakehia te hangarau, ka taea te whakahaere pai i te matotoru o te mata tipu, ā, ka waiho te tikanga otinga hei hangarau whai hua mō te whiwhi i ngā poro tioata kotahi kounga teitei.
Mō te tipu o te otinga o te tioata kotahi SiC, ka puta te pūtake Si mai i te rewa Si tino parakore, ko te ipu karāpeti e mahi ana i ngā mahi e rua: te whakamahana me te pūtake matūriki C. He nui ake te tūponotanga o te tipu o ngā tioata kotahi SiC i raro i te ōwehenga stoichiometric pai ina tata te ōwehenga o te C me te Si ki te 1, e tohu ana i te iti o te kiato hapa [28]. Heoi, i te pēhanga hauhautanga, kāore te SiC e whakaatu i te ira rewa, ā, ka pirau tika mā te mimiti i ngā pāmahana neke atu i te 2,000 °C. E ai ki ngā tumanakohanga ariā, ka taea anake te hanga i ngā rewa SiC i raro i te kaha kino e kitea ana mai i te tūtohi wāhanga rua Si-C (Pikitia 4) e kitea ana i runga i te pikinga pāmahana me te pūnaha otinga. Ko te teitei ake o te C i roto i te rewa Si ka rerekē mai i te 1at.% ki te 13at.%. Ko te C supersaturation e akiaki ana, ko te tere ake o te tere tipu, ko te kaha C iti o te tipu ko te C supersaturation e whakahaerehia ana e te pēhanga o te 109 Pa me ngā pāmahana neke atu i te 3,200 °C. Ka taea e te nui o te saturation te whakaputa i tētahi mata maeneene [22, 36-38]. I ngā pāmahana i waenga i te 1,400 me te 2,800 °C, ka rerekē te wairewa o te C i roto i te Si rewa mai i te 1at.% ki te 13at.%. Ko te kaha akiaki o te tipu ko te nui o te saturation C e whakahaerehia ana e te pikinga pāmahana me te pūnaha otinga. Ko te teitei ake o te nui o te saturation C, ko te tere ake o te tere tipu, ko te iti o te nui o te C ka whakaputa i tētahi mata maeneene [22, 36-38].
Pikitia 4: Te hoahoa ā-rua Si-C [40]
Ko te tāpiri i ngā huānga konganuku whakawhiti, ngā huānga whenua-onge rānei, ehara i te mea ka whakaiti i te pāmahana tipu anake, engari ko te āhua nei koinei anake te huarahi hei whakapai ake i te wairewatanga waro i roto i te rewa Si. Mā te tāpiri i ngā konganuku rōpū whakawhiti, pērā i te Ti [8, 14-16, 19, 40-52], Cr [29, 30, 43, 50, 53-75], Co [63, 76], Fe [77-80], me ētahi atu, ngā konganuku whenua onge rānei, pērā i te Ce [81], Y [82], Sc, me ētahi atu, ki te rewa Si ka taea te wairewatanga waro kia neke ake i te 50at.% i roto i te āhua e tata ana ki te taurite thermodynamic. Heoi anō, he pai te tikanga LPE mō te tāpiritanga momo-P o te SiC, ka taea te whakatutuki mā te whakakotahi i te Al ki roto i te
whakarewa [50, 53, 56, 59, 64, 71-73, 82, 83]. Heoi, ko te whakaurunga o te Al ka arahi ki te pikinga o te ātete o ngā tioata takitahi SiC momo-P [49, 56]. Haunga te tipu momo-N i raro i te tāpiri hauota,
Ko te tipu o te otinga ka puta i roto i te āhuarangi hau kore mahi. Ahakoa he nui ake te utu o te helium (He) i te argon, he pai ki te tini o ngā tohunga nā te mea he iti ake te matotoru me te kawe wera teitei ake (8 ngā wā o te argon) [85]. He rite tonu te tere hekenga me te ihirangi Cr i roto i te 4H-SiC i raro i te āhuarangi He me te Ar, kua whakamātauhia ko te tipu i raro i te Here ka hua ake he tere tipu teitei ake i te tipu i raro i te Ar nā te nui ake o te wera e marara ana o te kaipupuri purapura [68]. Ka ārai te He i te hanganga o ngā āputa i roto i te tioata kua tipu me te hanganga ohorere i roto i te otinga, kātahi ka taea te whiwhi i te āhua mata maeneene [86].
I roto i tēnei pepa, i whakaurua te whanaketanga, ngā tono, me ngā āhuatanga o ngā taputapu SiC, me ngā tikanga matua e toru mō te whakatipu i te tioata kotahi SiC. I ngā wāhanga e whai ake nei, i arotakehia ngā tikanga whakatipu otinga o nāianei me ngā tawhā matua e pā ana. Hei whakamutunga, i whakaarohia he tirohanga e matapaki ana i ngā wero me ngā mahi ā muri ake nei e pā ana ki te whakatipu nui o ngā tioata kotahi SiC mā te tikanga otinga.
Te wā tuku: Hōngongoi-01-2024