Txheej CVD

CVD Txheej Txheem rau Kev Ua Haujlwm Semiconductor Siab Tshaj Plaws

Tsim los rau cov chaw tsim khoom semiconductor tseem ceeb, peb cov Chemical Vapor Deposition (CVD) Silicon Carbide (SiC), Tantalum Carbide (TaC), thiab Pyrolytic Carbon (PyC) coatings muab cov tshuaj lom neeg zoo heev, kev ruaj khov thermal heev, thiab kev ntshiab siab heev (< 5 ppm). Tsim los tiv thaiv cov graphite thiab ceramic substrates uas muaj kev ntshiab siab los ntawm cov plasma uas muaj zog, cov pa roj reactive, thiab kev hloov pauv thermal siab, peb cov coatings siab heev txo cov khoom me me thiab ua kom lub neej ntawm cov khoom siv ntev dua.Silicon/SiC Epitaxy, MOCVD, Plasma Etching, thiab Monocrystal Growthcov ntawv thov.

Kev Ntshiab Siab Tshaj Plaws (< 5 ppm)

GDMS-tau txheeb xyuas cov khoom tsis muaj hlau tsawg kom tiv thaiv kev ua qias tuaj ntawm wafer hauv cov txheej txheem tseem ceeb.

Kev Tiv Thaiv Plasma & Gas Zoo Tshaj Plaws

Cov qauv crystalline ntom ntom tiv thaiv cov halogen plasma (CF₄, NF₃, Cl₂) thiab cov pa roj corrosive.

Kev Sib Tw Thermal Zoo Tshaj Plaws

Kev tswj hwm CTE nruj heev tshem tawm cov kab nrib pleb me me thiab cov txheej txheem delamination nyob rau hauv kev poob siab thermal hnyav.

Hom txheej	Qhov Zoo Tshaj Plaws ntawm Kev Siv Tshuab	Daim Ntawv Thov Txheej Txheem Tseem Ceeb
CVD SiC Txheej	Kev ua tau zoo ntawm thermal conductivity, zoo heev plasma erosion tsis kam	Qhuav Etch, Si Epitaxy, MOCVD, Crystal Growth
CVD TaC Txheej	Kev tiv taus kub heev (>2000°C), H₂/SiH₄ tiv taus xeb	SiC Epitaxy, Ib Leeg-Crystal SiC PVT Kev Loj Hlob
PyC Txheej	Kev sib khi roj hermetic, qhov chaw carbon anisotropic du heev	Kev rwb thaiv tsev thermal, CZ Monocrystalline Silicon