SiC Coating Carrier Rau RTP / RTA yog ib qho tseem ceeb uas siv rau hauv cov txheej txheem tsim khoom semiconductor hu ua Rapid Thermal Processing & Annealing, peb siv peb cov thev naus laus zis patented los ua cov silicon carbide carrier nrog purity siab heev, zoo txheej uniformity thiab lub neej zoo heev, nrog rau cov tshuaj tiv thaiv siab thiab thermal stability zog.
Cov yam ntxwv ntawm peb cov khoom:
1. Kev tiv thaiv oxidation kub siab txog li 1700 ℃.
2. Kev huv siab thiab kev sib npaug ntawm thermal
3. Kev tiv thaiv xeb zoo heev: kua qaub, alkali, ntsev thiab cov tshuaj reagents organic.
4. Kev nyuaj siab, qhov chaw me me, cov khoom me me.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua
| CVD SiC薄膜基本物理性能 Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej | |
| 性质 / Khoom vaj khoom tsev | 典型数值 / Tus nqi ib txwm muaj |
| 晶体结构 / Cov Qauv Siv Crystal | FCC β theem多晶, 主要为(111) Ib |
| 密度 / Qhov Ceev | 3.21 g/cm³ |
| 硬度 / Qhov nyuaj | 2500 维氏硬度 (500g load) |
| 晶粒大小 / Cov nplej loj | 2 ~ 10μm |
| 纯度 / Kev Ntshiab Tshuaj | 99.99995% |
| Cov duab / Peev Xwm Kub | 640 J·kg-1·K-1 |
| 升华温度 Kub Sublimation | 2700 ℃ |
| 抗弯强度 Lub zog flexural | 415 MPa RT 4-point |
| 杨氏模量 / Cov Modulus Hluas | 430 Gpa 4pt khoov, 1300 ℃ |
| 导热系数 / ThermalKev coj ua hluav taws xob | 300W·m-1·K-1 |
| 热膨胀系数 / Kev nthuav dav thermal (CTE) | 4.5 × 10-6K-1 |
VET Energy yog lub chaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide uas muaj ntau yam coatings xws li SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, thiab lwm yam, tuaj yeem muab ntau yam khoom siv rau kev lag luam semiconductor thiab photovoltaic.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.
Peb pheej tsim cov txheej txheem siab heev los muab cov ntaub ntawv zoo dua, thiab tau ua haujlwm tawm ib txoj kev siv tshuab tshwj xeeb uas tau txais patent, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis yooj yim tawg.
Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!
