SiC Txheej / Txheej Graphite Substrate / Tais rau Semiconductor

Kev Piav Qhia Luv:

VET Zog SiC Coated Graphite Susceptor rau Epitaxial Loj Hlob yog cov khoom ua tau zoo tsim los muab kev ua tau zoo tas mus li thiab txhim khu kev qha rau lub sijhawm ntev. Nws muaj kev tiv taus cua sov zoo heev thiab thermal uniformity, purity siab, tiv taus kev yaig, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau kev siv wafer.

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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

SiC txheej / coated ntawm Graphite susceptor rau Semiconductor

LubSiC Txheej Graphite Substrateyog ib qho kev daws teeb meem ruaj khov thiab ua haujlwm tau zoo uas tsim los ua kom tau raws li qhov xav tau ntawm kev lag luam ua cov khoom siv semiconductor. Muaj ib txheej ntawm cov khoom siv huv sisilicon carbide (SiC) txheej, cov substrate no muab kev ruaj khov thermal zoo heev, tiv taus oxidation, thiab lub neej ntev, ua rau nws zoo tagnrho rau kev siv hauv MOCVD cov txheej txheem, graphite wafer carriers, thiab lwm qhov chaw kub siab.

Nta:
· Kev Tiv Thaiv Kev Kub Siab Zoo heev
· Kev Tiv Thaiv Kev Poob Siab Zoo heev
· Kev Tiv Thaiv Tshuaj Zoo heev
· Kev Ntshiab Siab Tshaj Plaws
· Muaj nyob rau hauv Cov Duab Sib Txawv
Siv tau rau hauv qab huab cua Oxidizing

Daim Ntawv Thov:

Cov yam ntxwv ntawm cov khoom thiab cov txiaj ntsig:

1. Kev Tiv Thaiv Thermal Zoo Tshaj Plaws:Nrog lub siab dawb paugSiC txheej, lub substrate tiv taus qhov kub thiab txias heev, ua kom muaj kev ua tau zoo tas li hauv cov chaw nyuaj xws li epitaxy thiab semiconductor fabrication.

2. Kev Ruaj Khov Zoo Dua:Cov khoom siv graphite uas tau coated nrog SiC yog tsim los tiv taus kev xeb thiab kev oxidation ntawm cov tshuaj lom neeg, ua rau lub substrate siv tau ntev dua piv rau cov graphite substrates txheem.

3. Vitreous Coated Graphite:Lub qauv tshwj xeeb ntawm lub vitreousSiC txheejmuab qhov tawv ntawm qhov chaw zoo heev, txo qhov hnav thiab tsim kua muag thaum lub sijhawm ua haujlwm kub siab.

4. Kev Txheej Txheem SiC Siab:Peb lub substrate ua kom muaj kev sib kis tsawg kawg nkaus hauv cov txheej txheem semiconductor rhiab heev, muab kev ntseeg siab rau cov lag luam uas xav tau cov khoom siv huv si.

5. Daim Ntawv Thov Lag Luam Dav Dav:LubSiC coated graphite susceptorKev ua lag luam txuas ntxiv mus raws li qhov kev thov rau cov khoom siv SiC coated siab heev hauv kev tsim khoom semiconductor nce ntxiv, tso cov substrate no ua tus neeg ua si tseem ceeb hauv kev ua lag luam graphite wafer thiab kev ua lag luam silicon carbide coated graphite trays.

Cov Khoom Siv Graphite Uas Muaj Cov Qauv:

Qhov Ceev Pom Tseeb:	1.85 g/cm3
Kev Tiv Thaiv Hluav Taws Xob:	11 μΩm
Flexural Zog:	49 MPa (500kgf/cm2)
Ntug dej Hardness:	58
Tshauv:	<5ppm
Kev Ua Kub:	116 W/mK (100 kcal/mhr-℃)

CVD SiC薄膜基本物理性能 Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej
性质 / Khoom	典型数值 / Tus nqi zoo
晶体结构 / Crystal Structure	FCC β theem 多晶，主要为 (111) 取向
密度 / Ceev	3.21 g/cm³
硬度 / Hardness	2500 维氏硬度 (500g load)
晶粒大小 / Grain SiZe	2 ~ 10μm
纯度 / Tshuaj Purity	99.99995%
热ა / Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700 ℃
抗弯强度 / Flexural zog	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt khoov, 1300 ℃
Kev Siv Hluav Taws Xob / Thermal conductivity	300W·m^-1·K^-1
热膨胀系数 / Thermal Expansion (CTE)	4.5 × 10^-6K^-1

VET Energy yog lub chaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide uas muaj ntau yam coatings xws li SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, thiab lwm yam, tuaj yeem muab ntau yam khoom siv rau kev lag luam semiconductor thiab photovoltaic.

Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.

Peb pheej tsim cov txheej txheem siab heev los muab cov ntaub ntawv zoo dua, thiab tau ua haujlwm tawm ib txoj kev siv tshuab tshwj xeeb uas tau txais patent, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis yooj yim tawg.

Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!