Cov khoom siv semiconductor - SiC coated graphite puag

Cov hauv paus graphite uas tau coated nrog SiC feem ntau yog siv los txhawb thiab ua kom sov cov khoom siv crystal hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Kev ruaj khov thermal, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite hauv paus ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.

Hauv cov txheej txheem ntawm kev tsim cov wafer, cov txheej epitaxial tau tsim ntxiv rau qee cov wafer substrates los pab txhawb kev tsim cov khoom siv. Cov khoom siv LED teeb pom kev zoo ib txwm yuav tsum npaj cov txheej epitaxial ntawm GaAs ntawm silicon substrates; Cov txheej SiC epitaxial yog loj hlob ntawm cov khoom siv SiC conductive rau kev tsim cov khoom siv xws li SBD, MOSFET, thiab lwm yam, rau qhov hluav taws xob siab, tam sim no siab thiab lwm yam kev siv hluav taws xob; GaN epitaxial txheej yog tsim rau ntawm cov khoom siv SiC semi-insulated los tsim HEMT thiab lwm yam khoom siv rau kev siv RF xws li kev sib txuas lus. Cov txheej txheem no tsis tuaj yeem sib cais los ntawm cov khoom siv CVD.

Hauv cov khoom siv CVD, lub substrate tsis tuaj yeem muab tso ncaj qha rau ntawm cov hlau lossis tsuas yog muab tso rau ntawm lub hauv paus rau epitaxial deposition, vim nws cuam tshuam nrog cov pa roj ntws (kab rov tav, ntsug), kub, siab, kho, tshem tawm cov pa phem thiab lwm yam ntawm cov yam ntxwv cuam tshuam. Yog li ntawd, nws yog qhov tsim nyog siv lub hauv paus, thiab tom qab ntawd muab lub substrate tso rau ntawm lub disc, thiab tom qab ntawd siv CVD thev naus laus zis los epitaxial deposition ntawm lub substrate, uas yog SiC coated graphite puag (tseem hu ua lub tais).

Cov hauv paus graphite uas tau coated nrog SiC feem ntau yog siv los txhawb thiab ua kom sov cov khoom siv crystal hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Kev ruaj khov thermal, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite hauv paus ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.

Cov hlau-organic tshuaj vapor deposition (MOCVD) yog cov thev naus laus zis tseem ceeb rau kev loj hlob epitaxial ntawm GaN zaj duab xis hauv xiav LED. Nws muaj qhov zoo ntawm kev ua haujlwm yooj yim, kev loj hlob tswj tau thiab kev ntshiab siab ntawm GaN zaj duab xis. Raws li ib qho tseem ceeb hauv chav tshuaj tiv thaiv ntawm MOCVD cov khoom siv, lub hauv paus bearing siv rau GaN zaj duab xis epitaxial kev loj hlob yuav tsum muaj qhov zoo ntawm kev tiv taus kub siab, kev ua haujlwm thermal conductivity sib xws, kev ruaj khov tshuaj zoo, muaj zog thermal shock tiv taus, thiab lwm yam. Cov khoom siv graphite tuaj yeem ua tau raws li cov xwm txheej saum toj no.

Raws li ib qho ntawm cov khoom tseem ceeb ntawm MOCVD cov khoom siv, graphite puag yog tus nqa khoom thiab lub cev cua sov ntawm lub substrate, uas ncaj qha txiav txim siab qhov sib xws thiab kev huv ntawm cov khoom siv zaj duab xis, yog li nws qhov zoo ncaj qha cuam tshuam rau kev npaj ntawm daim ntawv epitaxial, thiab tib lub sijhawm, nrog rau kev nce ntawm tus lej ntawm kev siv thiab kev hloov pauv ntawm cov xwm txheej ua haujlwm, nws yooj yim heev rau hnav, koom nrog cov khoom siv tau.

Txawm hais tias graphite muaj kev ua tau zoo heev ntawm thermal conductivity thiab kev ruaj khov, nws muaj qhov zoo dua li lub hauv paus ntawm MOCVD cov khoom siv, tab sis nyob rau hauv cov txheej txheem ntau lawm, graphite yuav corrode cov hmoov vim yog cov seem ntawm cov pa roj corrosive thiab cov organic hlau, thiab lub neej ua haujlwm ntawm graphite puag yuav raug txo qis heev. Tib lub sijhawm, cov hmoov graphite poob yuav ua rau muaj kuab paug rau lub nti.

Kev tshwm sim ntawm cov txheej txheem txheej txheem tuaj yeem muab cov hmoov kho rau saum npoo, txhim kho kev ua kom sov, thiab sib npaug ntawm kev faib cua sov, uas tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no. Lub hauv paus graphite hauv MOCVD cov khoom siv ib puag ncig, txheej txheej graphite yuav tsum ua tau raws li cov yam ntxwv hauv qab no:

(1) Lub hauv paus graphite tuaj yeem qhwv tag nrho, thiab qhov ceev yog qhov zoo, txwv tsis pub lub hauv paus graphite yooj yim rau corroded hauv cov roj corrosive.

(2) Lub zog ua ke nrog lub hauv paus graphite siab kom ntseeg tau tias lub txheej tsis yooj yim poob tom qab ntau qhov kub thiab txias thiab qis kub.

(3) Nws muaj kev ruaj khov tshuaj zoo kom tsis txhob muaj kev ua tsis tiav hauv qhov kub thiab txias thiab huab cua corrosive.

SiC muaj qhov zoo ntawm kev tiv taus corrosion, siab thermal conductivity, thermal shock tsis kam thiab siab tshuaj stability, thiab tuaj yeem ua haujlwm zoo hauv GaN epitaxial huab cua. Tsis tas li ntawd, qhov thermal expansion coefficient ntawm SiC txawv me ntsis ntawm graphite, yog li SiC yog cov khoom siv nyiam rau txheej saum npoo ntawm graphite puag.

Tam sim no, feem ntau SiC yog hom 3C, 4H thiab 6H, thiab SiC siv ntawm ntau hom siv lead ua sib txawv. Piv txwv li, 4H-SiC tuaj yeem tsim cov khoom siv hluav taws xob siab; 6H-SiC yog qhov ruaj khov tshaj plaws thiab tuaj yeem tsim cov khoom siv photoelectric; Vim nws cov qauv zoo sib xws rau GaN, 3C-SiC tuaj yeem siv los tsim GaN epitaxial txheej thiab tsim cov khoom siv SiC-GaN RF. 3C-SiC kuj tseem hu ua β-SiC, thiab kev siv tseem ceeb ntawm β-SiC yog ua cov khoom siv zaj duab xis thiab txheej, yog li β-SiC tam sim no yog cov khoom siv tseem ceeb rau txheej.