Ko ngā turanga karāpeti kua pania ki te SiC e whakamahia whānuitia ana hei tautoko me te whakamahana i ngā papa tioata kotahi i roto i ngā taputapu MOCVD (whakatakotoranga kohu matū whakarewa-organika). Ko te pumau wera, te ōritetanga wera me ētahi atu tawhā mahi o te turanga karāpeti kua pania ki te SiC he mea nui ki te kounga o te tipu rauemi epitaxial, nō reira koinei te wāhanga matua o ngā taputapu MOCVD.
I roto i te tukanga hanga paparanga, ka hangaia anō ngā paparanga epitaxial ki runga i ētahi paparanga paparanga hei whakahaere i te hanga taputapu. Me whakarite e ngā taputapu tuku rama LED noa ngā paparanga epitaxial o GaAs ki runga i ngā paparanga silicon; ka whakatupuhia te paparanga epitaxial SiC ki runga i te paparanga SiC kawe hiko hei hanga i ngā taputapu pēnei i te SBD, MOSFET, me ētahi atu, mō ngā tono hiko teitei, te iahiko teitei me ētahi atu tono mana; ka hangaia te paparanga epitaxial GaN ki runga i te paparanga SiC haurua-whakamaroke hei hanga anō i te HEMT me ētahi atu taputapu mō ngā tono RF pēnei i te whakawhitiwhiti kōrero. Kāore e taea te wehe i tēnei tukanga mai i ngā taputapu CVD.
I roto i ngā taputapu CVD, kāore e taea te whakatakoto tika i te papa ki runga i te konganuku, te whakatakoto noa rānei ki runga i te turanga hei whakatakoto epitaxial, nā te mea kei roto ko te rere o te hau (whakapae, poutū), te pāmahana, te pēhanga, te whakau, te whakahekenga o ngā poke me ētahi atu āhuatanga o ngā āhuatanga awe. Nō reira, me whakamahi he turanga, kātahi ka whakatakoto i te papa ki runga i te kōpae, kātahi ka whakamahi i te hangarau CVD hei whakatakoto epitaxial ki runga i te papa, arā, te turanga graphite kua pania ki te SiC (e mōhiotia ana ko te paepae).
Ko ngā turanga karāpeti kua pania ki te SiC e whakamahia whānuitia ana hei tautoko me te whakamahana i ngā papa tioata kotahi i roto i ngā taputapu MOCVD (whakatakotoranga kohu matū whakarewa-organika). Ko te pumau wera, te ōritetanga wera me ētahi atu tawhā mahi o te turanga karāpeti kua pania ki te SiC he mea nui ki te kounga o te tipu rauemi epitaxial, nō reira koinei te wāhanga matua o ngā taputapu MOCVD.
Ko te MOCVD te hangarau matua mō te tipu epitaxial o ngā kiriata GaN i roto i te LED kikorangi. He ngāwari te whakahaere, he tere tipu ka taea te whakahaere, ā, he parakore teitei ngā kiriata GaN. Hei wāhanga nui i roto i te rūma tauhohenga o ngā taputapu MOCVD, me whai painga te turanga whāriki e whakamahia ana mō te tipu epitaxial kiriata GaN ki te ātete pāmahana teitei, te kawe wera ōrite, te pumau matū pai, te ātete ru wera kaha, me ētahi atu. Ka taea e te rauemi graphite te whakatutuki i ngā tikanga o runga ake nei.
Hei tētahi o ngā wāhanga matua o ngā taputapu MOCVD, ko te turanga graphite te tinana kawe me te whakamahana o te papa, e whakatau tika ana i te ōritetanga me te parakore o te rauemi kiriata, nō reira ka pā tika tōna kounga ki te whakarite o te pepa epitaxial, ā, i te wa ano, me te pikinga ake o te maha o ngā whakamahinga me te huringa o ngā tikanga mahi, he tino ngāwari ki te mau, nō roto i ngā taonga pau.
Ahakoa he pai te kawe wera me te pumau o te karāpeti, he painga pai tōna hei wāhanga turanga o ngā taputapu MOCVD, engari i roto i te tukanga whakaputa, ka waikura te paura e te karāpeti nā te toenga o ngā hau waikura me ngā matū whakarewa, ā, ka tino whakaitihia te roa o te ora o te turanga karāpeti. I taua wā anō, ka pāngia te maramara e te paura karāpeti e te parahanga.
Mā te putanga mai o te hangarau paninga ka taea te whakarite i te pumau o te paura mata, te whakarei ake i te kawe wera, me te whakataurite i te tohatoha wera, kua waiho hei hangarau matua hei whakaoti i tēnei raruraru. I roto i te taiao whakamahi taputapu MOCVD, me tutuki i te paninga mata mata papa papa ngā āhuatanga e whai ake nei:
(1) Ka taea te takai katoa i te turanga karāpeti, ā, he pai te mātotoru, ki te kore ka ngāwari te waikura o te turanga karāpeti i roto i te hau waikura.
(2) He teitei te kaha o te whakakotahitanga me te turanga karāpeti kia kore ai e ngawari te taka o te paninga i muri i ētahi huringa pāmahana teitei me te pāmahana iti.
(3) He pai te pumau matū hei karo i te pakaru o te paninga i te pāmahana tiketike me te hau waikura.
He pai ngā painga o te SiC mō te ātete ki te waikura, te kawe wera nui, te ātete ki ngā ru wera me te pumau matū teitei, ā, ka taea te mahi pai i roto i te hau epitaxial GaN. Hei tāpiri, he iti noa te rerekētanga o te tauwehenga whānui wera o te SiC i tērā o te karāpeti, nō reira ko te SiC te rauemi pai mō te paninga mata o te turanga karāpeti.
I tēnei wā, ko te SiC noa ko te momo 3C, 4H me te 6H, ā, he rerekē ngā whakamahinga SiC o ngā momo tioata rerekē. Hei tauira, ka taea e te 4H-SiC te hanga taputapu mana-teitei; ko te 6H-SiC te mea tino pumau, ā, ka taea te hanga taputapu hiko-whakaahua; nā te mea he rite te hanganga ki te GaN, ka taea te whakamahi i te 3C-SiC ki te hanga paparanga epitaxial GaN me te hanga taputapu RF SiC-GaN. E mōhiotia whānuitia ana te 3C-SiC ko te β-SiC, ā, ko tētahi whakamahinga nui o te β-SiC ko te kiriata me te rauemi paninga, nō reira ko te β-SiC te rauemi matua mō te paninga i tēnei wā.
Wā tuku: Akuhata-04-2023