Ko te hangarau matua mō te tipu oSiC epitaxialKo ngā rauemi tuatahi ko te hangarau whakahaere hapa, inā koa mō ngā hangarau whakahaere hapa e ngāwari ana ki te rahunga o te taputapu, ki te heke rānei o te pono. Ko te ako i te tikanga o ngā hapa o te papa e toro atu ana ki te paparanga epitaxial i te wā o te tukanga tipu epitaxial, ko ngā ture whakawhiti me te whakarerekētanga o ngā hapa i te atanga i waenga i te papa me te paparanga epitaxial, me te tikanga nucleation o ngā hapa te pūtake mō te whakamārama i te hononga i waenga i ngā hapa o te papa me ngā hapa hanganga epitaxial, e taea ai te ārahi pai i te tirotiro papa me te arotautanga tukanga epitaxial.
Ngā hapa ongā paparanga epitaxial silicon carbidee rua ngā wāhanga matua: ngā hapa karaihe me ngā hapa āhua o te mata. Ko ngā hapa karaihe, tae atu ki ngā hapa pūwāhi, ngā nekehanga tīwiri, ngā hapa microtubule, ngā nekehanga taha, me ētahi atu, ka ahu mai i ngā hapa i runga i ngā papa SiC ka horapa ki roto i te paparanga epitaxial. Ka taea te tirotiro tika i ngā hapa āhua o te mata ki te kanohi tahanga mā te whakamahi i te karuārai, ā, he āhuatanga āhua noa iho ō rātou. Ko ngā hapa āhua o te mata ko: Te rakuraku, te hapa tapatoru, te hapa kāreti, te hinganga, me te matūriki, e whakaaturia ana i te Pikitia 4. I te wā o te tukanga epitaxial, ka pā pea ngā matūriki ke, ngā hapa papa, te kino o te mata, me ngā pekapeka tukanga epitaxial ki te aratau tipu rere hikoinga ā-rohe, ka hua ake he hapa āhua o te mata.
Ripanga 1. Ngā take mō te hanganga o ngā hapa matrix noa me ngā hapa āhua mata i roto i ngā paparanga epitaxial SiC
Ngā hapa o te ira
Ka puta ngā hapa pūwāhi i ngā takotoranga kore, i ngā āputa rānei i tētahi pūwāhi whatunga kotahi, i ētahi pūwāhi whatunga rānei, ā, kāore he toronga ā-wāhi. Tērā pea ka puta ngā hapa pūwāhi i roto i ngā tukanga whakaputa katoa, inā koa i roto i te whakaurunga katote. Heoi, he uaua ki te kite, ā, he tino uaua hoki te whanaungatanga i waenga i te whakawhiti o ngā hapa pūwāhi me ētahi atu hapa.
Ngā Paipa Maikoro (MP)
Ko ngā paipa iti he piko tīwiri tuwhera e horapa ana i te tuaka tipu, me te tohu Burgers <0001>. Ko te whānui o ngā paipa iti kei waenga i te haurua o te maikoroni ki ngā tekau maikoroni. Ka whakaatuhia e ngā paipa iti ngā āhuatanga mata nui, he rite ki te poka, i runga i te mata o ngā papa SiC. I te nuinga o te wā, ko te mātotoru o ngā paipa iti he tata ki te 0.1~1cm-2, ā, ka heke tonu i roto i te aroturukitanga kounga whakaputa papa arumoni.
Ngā nekehanga tīwiri (TSD) me ngā nekehanga taha (TED)
Ko ngā nekehanga i roto i te SiC te pūtake matua o te pirau me te rahunga o te taputapu. Ko ngā nekehanga tīwiri (TSD) me ngā nekehanga taha (TED) e rere ana i te tuaka tipu, me ngā weketere Burgers o <0001> me 1/3<11–20>, ia.
Ka taea e ngā nekehanga tīwiri (TSD) me ngā nekehanga taha (TED) te toro atu i te papa ki te mata o te papa angiangi, ā, ka puta mai ngā āhuatanga mata iti rite ki te poka (Pikitia 4b). I te nuinga o te wā, ko te mātotoru o ngā nekehanga taha he tata ki te 10 ngā wā o ngā nekehanga tīwiri. Ko ngā nekehanga tīwiri roa, arā, e toro atu ana i te papa ki te paparanga epi, ka huri pea hei ētahi atu hapa, ā, ka horapa haere i te tuaka tipu. I roto i te wāSiC epitaxialI te tipu, ka hurihia ngā nekehanga tīwiri hei hapa whakarārangi (SF) hei hapa kāreti rānei, ko ngā nekehanga taha i roto i ngā paparanga epi e whakaatuhia ana he mea huri mai i ngā nekehanga papa basal (BPD) i riro mai i te papa i te wā o te tipu epitaxial.
Te nekehanga papa taketake (BPD)
Kei runga i te papa turanga SiC, me te wetetā Burgers o te 1/3 <11–20>. Kāore i te maha ngā BPD e puta mai ana i runga i te mata o ngā papa SiC. I te nuinga o te wā ka kukū ki runga i te papa me te kiato o te 1500 cm-2, ko tō rātou kiato i roto i te epilayer he tata ki te 10 cm-2 noa iho. Ko te kitenga o ngā BPD mā te whakamahi i te photoluminescence (PL) e whakaatu ana i ngā āhuatanga raina, e whakaaturia ana i te Pikitia 4c. I roto iSiC epitaxialI roto i te tipu, ka taea te huri i ngā BPD kua whakawhānuihia hei hapa whakarārangi (SF) hei hapa taha rānei (TED).
Ngā hapa whakarārangi (SF)
Ngā hapa i roto i te raupapatanga whakarārangi o te papa turanga SiC. Ka puta pea ngā hapa whakarārangi i roto i te paparanga epitaxial mā te tuku iho i ngā SF i roto i te papa, ka pā rānei ki te toronga me te whakawhiti o ngā nekehanga papa turanga (BPD) me ngā nekehanga tīwiri miro (TSD). I te nuinga o te wā, he iti iho i te 1 cm-2 te kiato o ngā SF, ā, he āhua tapatoru tō rātou ina kitea mā te whakamahi i te PL, e whakaaturia ana i te Pikitia 4e. Heoi, ka taea te hanga i ngā momo hapa whakarārangi i roto i te SiC, pērā i te momo Shockley me te momo Frank, nā te mea ahakoa he iti noa te raruraru pūngao whakarārangi i waenga i ngā papa ka arahi pea ki te koretake nui o te raupapatanga whakarārangi.
Te hinganga
Ko te hapa o te hinganga ka ahu mai i te maturuturunga o te matūriki ki ngā pakitara o runga me ngā pakitara taha o te rūma tauhohe i te wā o te tukanga tipu, ka taea te whakapai ake mā te whakapai ake i te tukanga tiaki ā-wā o ngā taonga pau o te karāhe o te rūma tauhohe.
Koha tapatoru
He whakaurunga momo-maha 3C-SiC tēnei e toro atu ana ki te mata o te paparanga SiC i te ahunga papa turanga, e whakaaturia ana i te Pikitia 4g. Tērā pea ka puta mai i ngā matūriki e hinga ana i runga i te mata o te paparanga SiC i te wā e tipu ana te epitaxial. Ka whakaurua ngā matūriki ki roto i te paparanga epita, ā, ka whakararuraru i te tukanga tipu, ka hua ake he whakaurunga momo-maha 3C-SiC, e whakaatu ana i ngā āhuatanga mata tapatoru koi me ngā matūriki kei ngā pito o te rohe tapatoru. He maha ngā rangahau kua kī ko te takenga mai o ngā whakaurunga momo-maha nā ngā karawarawa mata, ngā paipa iti, me ngā tawhā hē o te tukanga tipu.
Koha kāreti
He matatini hapa tāpae te hapa kāreti, e rua ngā pito kei ngā papa karaihe taketake TSD me SF, ka mutu mā te nekehanga momo-Frank, ā, e pā ana te rahi o te hapa kāreti ki te hapa tāpae prismatic. Mā te whakakotahitanga o ēnei āhuatanga ka hanga te āhua o te mata o te hapa kāreti, e āhua ana ki te āhua kāreti me te mātotoru iti iho i te 1 cm-2, e whakaaturia ana i te Pikitia 4f. Ka ngāwari te hanga i ngā hapa kāreti i ngā karawarawa whakakanapa, ngā TSD, ngā hapa papa rānei.
Ngā karawarawa
Ko ngā karawarawa he pakaru ā-mīhini i runga i te mata o ngā anga SiC i hangaia i te wā o te tukanga whakaputa, e whakaaturia ana i te Pikitia 4h. Tērā pea ka whakararuraru ngā karawarawa i runga i te papa SiC i te tipu o te paparanga epi, ka puta he rarangi o ngā nekehanga matotoru i roto i te paparanga epi, ka noho rānei ngā karawarawa hei pūtake mō te hanganga o ngā hapa kāreti. Nō reira, he mea nui kia whakakanapahia tika ngā anga SiC nā te mea ka pā nui ēnei karawarawa ki te mahi a te taputapu ina puta mai i te wāhi hohe o te taputapu.
Ētahi atu hapa āhua o te mata
Ko te pikinga takahanga he hapa mata i hangaia i te wā o te tukanga tipu epitaxial SiC, e puta ai he tapatoru pūngoi, he āhuatanga trapezoidal rānei i runga i te mata o te paparanga epi SiC. He maha atu anō ngā hapa mata, pērā i ngā poka mata, ngā pupuhi me ngā paru. Ko te nuinga o te wā ka puta mai ēnei hapa i ngā tukanga tipu kāore i tino pai me te tango katoa i te kino oro, ka pā kino ki te mahi a te taputapu.
Wā tuku: Pipiri-05-2024