Silicon carbide wafer carrier SiC wafer holder

Short Description:

Discover VET Energy’s SiC Carrier—engineered for high-precision wafer processing in semiconductor and optoelectronic applications. With superior thermal conductivity, uniform pore distribution, and resistance to acids and alkalis, it ensures stable, efficient support during waxing, thinning, and dicing. Custom sizes, fast delivery, and reliable quality make VET the preferred partner for advanced wafer processing lines.

 

 

 

 

 


  • Product name: SiC Carrier
  • Material: Semiconductor grade silicon carbide
  • Coating: CVD-SiC coating
  • Sample: Available
  • Advantages: Superior quality, faster delivery.
  • Product Detail

    Product Tags

    In semiconductor and optoelectronic industries, the SiC (Silicon Carbide) carrier plays a critical role in processing ultra-thin wafers. The wafer is placed on the porous SiC carrier and securely fixed via vacuum suction, enabling seamless integration into key steps such as:

    ● Waxing: Applying a protective layer.
    ● Thinning: Reducing the wafer's thickness.
    ● Dewaxing: Removing the protective layer.
    ● Cleaning: Ensuring a pristine surface.
    ● Cutting (Dicing): Separating the wafer into individual dies.

    SiC carriers streamline these intricate steps, contributing significantly to the efficiency and quality of your production line.

     

    Key Features Your SiC Carrier Must Possess

     

    When selecting a SiC carrier, certain features are paramount to ensuring optimal performance and maximizing your return on investment. We understand that technical personnel and purchasing managers prioritize specific characteristics that directly impact process efficiency and product quality.

     

    1.Exceptional Thermal Conductivity
    A superior SiC carrier boasts excellent thermal conductivity. This property is crucial for:

    ●Shortening Waxing and Dewaxing Times: Efficient heat transfer accelerates these thermal processes, drastically reducing overall cycle times.
    ●Improving Production Rate: Faster processing directly translates to a higher throughput of wafers.
    ●Increasing Production Efficiency: Optimized thermal management contributes to a more streamlined and productive manufacturing flow.

    2.Small and Uniformly Distributed Pore Size:
    The effectiveness of vacuum suction heavily relies on the carrier's pore structure. An ideal SiC carrier features:

    ●Small Pore Size: Prevents damage to delicate wafers and ensures even vacuum distribution.
    ●Well-Distributed Pores: Guarantees uniform adsorption across every localized region of the entire wafer, preventing bowing, warping, or displacement during processing.

    3.Outstanding Acid and Alkali Resistance:

    Given the chemical-intensive nature of wafer processing, your SiC carrier must withstand corrosive environments. High acid and alkali resistance ensures:

    ●Durability and Longevity: The carrier maintains its structural integrity and performance over extended periods.
    ●Reduced Contamination Risk: Resistance to chemical degradation minimizes the potential for impurities leaching onto the wafer.

    Why Choose VET Energy for Your SiC Carriers?

     

    At VET Energy, we are committed to providing SiC carriers that not only meet but exceed the stringent demands of the semiconductor and optoelectronic industries. Our focus on quality, customization, and reliable delivery sets us apart.

    Various Sizes and Specifications: Our SiC carriers can be customized to perfectly match your specific wafer dimensions and equipment requirements.

    Smooth Surface Finish: Meticulously polished to prevent any scratching or damage to delicate wafers, safeguarding your valuable products.

    Fast Delivery: We pride ourselves on efficient production and logistics, ensuring your orders are delivered promptly to keep your operations running smoothly.

    CVD SiC

    Basic physical properties of CVD SiC coating

    Property

    Typical Value

    Crystal Structure

    FCC β phase polycrystalline, mainly (111) orientation

    Density

    3.21 g/cm³

    Hardness

    2500 Vickers hardness (500g load)

    Grain SiZe

    2~10μm

    Chemical Purity

    99.99995%

    Heat Capacity

    640 J·kg-1·K-1

    Sublimation Temperature

    2700℃

    Flexural Strength

    415 MPa RT 4-point

    Young' s Modulus

    430 Gpa 4pt bend, 1300℃

    Thermal Conductivity

    300W·m-1·K-1

    Thermal Expansion(CTE)

    4.5×10-6K-1

    VET Energy is a professional manufacturer focusing on the R&D and production of high-end advanced materials such as graphite, silicon carbide, quartz, as well as the material treatment like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

    Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

    VET Energy advantages includes:
    • Own factory and professional laboratory;
    • Industry-leading purity levels and quality;
    • Competive price & Fast delivery time;
    • Multiple industry partnerships worldwide;

     

    We welcome you to vist our factory and laboratory at any time!

    公司客户

     


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