Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "khotsofatso ea bareki ea 100% ka sehlahisoa kapa tšebeletso ea rona e ntle, theko e rekisoang le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo boholo har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e fapaneng ea litheko tse theotsoeng tsa GaN-Baseddepitaxial ho Sic Substrates 4′′, Re amohela ka mofuthu balekane ba likhoebo tse nyane ho tsoa mefuteng eohle ea bophelo, re tšepa ho theha khoebo e mosa le e sebelisanang 'moho, ho ikopanya le uena le ho fihlela sepheo sa bohle.
Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "100% khotsofalo ea bareki ka sehlahisoa kapa tšebeletso ea rona e ntle, theko e ntle ea thekiso le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo boholo har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e fapaneng eaLi-substrate tsa China GaN le Filimi ea GaN, Re labalabela ka tieo ho sebelisana le bareki lefatšeng ka bophara. Re lumela hore re ka u khotsofatsa ka lihlahisoa tsa rona tsa boleng bo holimo le tšebeletso e phethahetseng. Re boetse re amohela bareki ka mofuthu ho etela k'hamphani ea rona le ho reka lihlahisoa tsa rona.

SiC coating graphite MOCVD Wafer carriers

Li-susceptor tsohle tsa rona li entsoe ka graphite e matla e nang le isostatic e phahameng. Rua molemo ho hloekeng ho hoholo ha li-graphite tsa rona - tse etselitsoeng haholo-holo lits'ebetso tse thata joalo ka epitaxy, ho holisa kristale, ho kenngoa ha ion le ho etching ka plasma, hammoho le tlhahiso ea li-chip tsa LED.

Tlhaloso ea Sehlahisoa
Ho koahela SiC ha karolo e ka tlas'a Graphite bakeng sa lits'ebetso tsa Semiconductor ho hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka se oxidizing.
CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Sekoahelo se ka sebelisoa ka botenya bo fapaneng le likarolong tse kholo haholo.

Karolo

Melemo e ikhethang ea li-susceptor tsa rona tsa graphite tse koahetsoeng ke SiC e kenyelletsa bohloeki bo phahameng haholo, ho koahela ka ho tšoana le bophelo bo botle ba ts'ebeletso. Li boetse li na le khanyetso e phahameng ea lik'hemik'hale le litšobotsi tsa botsitso ba mocheso.

Re boloka mamello e haufi haholo ha re sebelisa sekoahelo sa SiC, re sebelisa mochini o nepahetseng haholo ho netefatsa boemo bo ts'oanang ba susceptor. Re boetse re hlahisa thepa e nang le thepa e ntle ea ho hanyetsa motlakase bakeng sa ts'ebeliso lits'ebetsong tse futhumetseng ka mokhoa oa inductive. Likarolo tsohle tse felileng li tla le setifikeiti sa ho latela melao ea bohloeki le ea boholo bo itseng.

Kopo:

Likaroloana:
· Khanyetso e Hlollang ea Thermal Shock
· Khanyetso e Hlollang ea 'Mele ea ho Tšoaroa ke Tšabo
· Khanyetso e Hlollang ea Lik'hemik'hale
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Rarahaneng
· E ka sebelisoa tlas'a Oxidizing AtmosphereMatlotlo a Tloaelehileng a Thepa ea Motheo ea Graphite:

Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "khotsofatso ea bareki ea 100% ka sehlahisoa kapa tšebeletso ea rona e ntle, theko e rekisoang le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo boholo har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e fapaneng ea litheko tse theotsoeng tsa GaN-Baseddepitaxial ho Sic Substrates 4′′, Re amohela ka mofuthu balekane ba likhoebo tse nyane ho tsoa mefuteng eohle ea bophelo, re tšepa ho theha khoebo e mosa le e sebelisanang 'moho, ho ikopanya le uena le ho fihlela sepheo sa bohle.
Theko e theotsoengLi-substrate tsa China GaN le Filimi ea GaN, Re labalabela ka tieo ho sebelisana le bareki lefatšeng ka bophara. Re lumela hore re ka u khotsofatsa ka lihlahisoa tsa rona tsa boleng bo holimo le tšebeletso e phethahetseng. Re boetse re amohela bareki ka mofuthu ho etela k'hamphani ea rona le ho reka lihlahisoa tsa rona.