Graphite tare da shafi na TaC

I. Binciken sigogin tsari

1. Tsarin TaCl5-C3H6-H2-Ar

2. Zafin ajiya:

Bisa ga tsarin thermodynamic, ana ƙididdige cewa idan zafin ya fi 1273K, kuzarin Gibbs na amsawar ya yi ƙasa sosai kuma amsawar ta cika. Matsayin amsawar KP yana da girma sosai a 1273K kuma yana ƙaruwa da sauri tare da zafin jiki, kuma ƙimar girma tana raguwa a hankali a 1773K.

Tasiri ga yanayin saman murfin: Lokacin da zafin jiki bai dace ba (mai yawa ko ƙasa da haka), saman yana nuna yanayin carbon kyauta ko ramukan da ba su da kyau.

(1) A yanayin zafi mai yawa, saurin motsi na ƙwayoyin amsawa masu aiki ko ƙungiyoyi yana da sauri sosai, wanda zai haifar da rarrabawa mara daidaituwa yayin tarin kayan aiki, kuma yankuna masu wadata da marasa wadata ba za su iya canzawa cikin sauƙi ba, wanda ke haifar da ramuka.

(2) Akwai bambanci tsakanin yawan amsawar pyrolysis na alkanes da kuma raguwar amsawar tantalum pentachloride. Carbon pyrolysis yana da yawa kuma ba za a iya haɗa shi da tantalum a kan lokaci ba, wanda hakan ke haifar da naɗe saman da carbon.

Idan zafin jiki ya dace, samanShafi na TaCyana da yawa.

TaCƘwayoyin suna narkewa suna taruwa da juna, siffar lu'ulu'u ta cika, kuma iyakar hatsi tana canzawa cikin sauƙi.

3. Rabon Hydrogen:

Bugu da ƙari, akwai abubuwa da yawa da ke shafar ingancin shafi:

-Ingancin saman ƙasa

- Filin fitar da iskar gas

-Matsayin daidaito na haɗakar iskar gas mai amsawa

II. Kurakuran da aka saba ganishafi na tantalum carbide

1. Fashewa da kuma cire fata

Layin CTE mai layi mai ma'aunin faɗaɗa zafi mai layi:

2. Binciken lahani:

(1) Dalili:

(2) Hanyar Halayyar Halitta

① Yi amfani da fasahar rarraba hasken X-ray don auna ragowar nau'in.

② Yi amfani da dokar Hu Ke don kimanta matsin da ya rage.

(3) Dabaru masu alaƙa

3. Inganta daidaiton injina na shafi da kuma substrate

(1) Rufin girma a saman da ke ciki

Fasahar adanawa da watsawa ta hanyar zafi TRD

Tsarin gishirin da aka narkar

Sauƙaƙa tsarin samarwa

Rage zafin jiki na amsawa

Ƙananan farashi

Mai sauƙin lalata muhalli

Ya dace da manyan masana'antu

(2) Rufin sauyawa mai hade

Tsarin haɗakar bayanai

CVDtsari

Shafi mai sassa da yawa

Haɗa fa'idodin kowane ɓangare

Daidaita yanayin shafi da rabon sa cikin sauƙi

4. Fasahar adanawa da watsawa ta hanyar zafi TRD

(1) Tsarin Amsawa

Ana kuma kiran fasahar TRD da tsarin sakawa, wanda ke amfani da tsarin boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide don shiryawa.shafi na tantalum carbide.

① Narkewar boric acid yana narkar da tantalum pentoxide;

② Tantalum pentoxide an rage shi zuwa ƙwayoyin tantalum masu aiki kuma yana yaɗuwa akan saman graphite;

③ Ana shanye ƙwayoyin tantalum masu aiki a saman graphite kuma suna amsawa da ƙwayoyin carbon don samar da su.shafi na tantalum carbide.

(2) Maɓallin Amsawa

Nau'in murfin carbide dole ne ya cika buƙatun cewa samar da iskar shaka ta sinadarin da ke samar da carbide ya fi na boron oxide girma.

Makamashin da babu iskar carbide a cikin Gibbs yana da ƙarancin kuzari (in ba haka ba, ana iya samun boron ko borode).

Tantalum pentoxide wani sinadari ne mai tsaka-tsaki. A cikin borax mai narkewa mai zafi sosai, yana iya amsawa tare da sinadarin sodium oxide mai ƙarfi na alkaline don samar da sodium tantalate, ta haka yana rage zafin amsawar farko.