Garaafit oo leh dahaadh TaC ah

I. Sahaminta halbeegyada habka

1. Nidaamka TaCl5-C3H6-H2-Ar

2. Heerkulka dhigista:

Sida ku cad qaacidada thermodynamic, waxaa la xisaabiyaa marka heerkulku ka badan yahay 1273K, tamarta xorta ah ee Gibbs ee falgalka aad ayay u hooseysaa falgalkuna waa mid dhammaystiran. Joogtada falgalka KP aad buu u weyn yahay 1273K wuxuuna si degdeg ah u kordhaa heerkulka, heerka koritaankuna si tartiib tartiib ah ayuu hoos ugu dhacaa 1773K.

Saamaynta qaabka dusha sare ee dahaarka: Marka heerkulku aanu ku habboonayn (aad u sarreeya ama aad u hooseeya), dusha sare waxay soo bandhigaysaa qaab-dhismeed kaarboon oo bilaash ah ama daloolo dabacsan.

(1) Heerkulka sare, xawaaraha dhaqdhaqaaqa ee atamka ama kooxaha fal-celinta firfircoon ayaa aad u dheereeya, taas oo horseedi doonta qaybinta aan sinnayn inta lagu jiro ururinta agabka, meelaha hodanka ah iyo kuwa saboolka ahna si habsami leh uma gudbi karaan, taasoo keenta daloollo.

(2) Waxaa jira farqi u dhexeeya heerka falcelinta pyrolysis ee alkanes iyo heerka falcelinta dhimista ee tantalum pentachloride. Kaarboonka pyrolysis-ku waa mid xad dhaaf ah mana lagu dari karo tantalum waqti ka dib, taasoo keentay in dusha sare lagu duubo kaarboon.

Marka heerkulku ku habboon yahay, dusha sare eeDahaarka TaCwaa cufan yahay.

TaCWalxaha ayaa isku milma oo isku urursada, qaabka kiristaalka waa dhammaystiran yahay, xadka hadhuudhkuna si habsami leh ayuu u gudbaa.

3. Saamiga haydarojiin:

Intaa waxaa dheer, waxaa jira arrimo badan oo saameeya tayada dahaarka:

-Tayada dusha sare ee substrate-ka

-Gaaska dhigista kaydka

- Heerka isku-darka isku-darka gaaska falgalka ah

II. Cilladaha caadiga ah eedahaarka tantalum carbide

1. Dahaarka dildilaaca iyo diirka

CTE toosan ee isku-dhafka ballaarinta kulaylka toosan:

2. Falanqaynta cilladaha:

(1) Sababta:

(2) Habka Astaamaha

① Adeegso tignoolajiyada kala-soocidda raajada X-ray si aad u cabbirto cadaadiska haray.

② Adeegso sharciga Hu Ke si aad u qiyaasto cadaadiska haray.

(3) Qaacido la xiriira

3. Kordhi iswaafajinta farsamada ee dahaarka iyo substrate-ka

(1) Dahaarka koritaanka ee dusha sare ee goobta

Tiknoolajiyadda dhigista falgalka kulaylka iyo faafinta TRD

Habka milixda la shubay

Fududee habka wax soo saarka

Hoos u dhig heerkulka falgalka

Kharash yar

Deegaan ahaan u wanaagsan

Ku habboon wax soo saarka warshadaha ee baaxadda weyn

(2) Dahaarka kala-guurka ee isku-dhafan

Geedi socodka dhigista wadajirka ah

CVDhabka

Dahaarka qaybaha badan

Isku darka faa'iidooyinka qayb kasta

Si dabacsan u hagaaji halabuurka dahaarka iyo saamiga

4. Tiknoolajiyadda dhigista falgalka kulaylka iyo faafinta TRD

(1) Habka Falcelinta

Tiknoolajiyadda TRD waxaa sidoo kale loo yaqaan habka gelinta, kaas oo adeegsada nidaamka boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide si loo diyaariyo.dahaarka tantalum carbide.

① Aashitada boric ee la dhalaaliyay waxay miisaamisaa tantalum pentoxide;

② Tantalum pentoxide waxaa loo yareeyaa atamka tantalum firfircoon wuxuuna ku faafaa dusha sare ee garaafka;

③ Atamyada firfircoon ee tantalum-ka ayaa lagu nuugaa dusha sare ee garaafka waxayna la falgalaan atamka kaarboon si ay u sameysmaandahaarka tantalum carbide.

(2) Furaha Falcelinta

Nooca dahaarka carbide-ka waa inuu buuxiyaa shuruudaha ah in tamar xor ah oo sameynta oksaydheynta ee curiyaha sameeya carbide-ka ay ka sarreyso tan boron oksaydhka.

Tamarta xorta ah ee Gibbs ee carbide-ka waa mid ku filan oo yar (haddii kale, boron ama borode ayaa la samayn karaa).

Tantalum pentoxide waa oksaydh dhexdhexaad ah. Borax-ga dhalaalay ee heerkulka sare leh, wuxuu la falgeli karaa oksaydhka sodium oksaydhka alkaline ee xooggan si uu u sameeyo sodium tantalate, taasoo hoos u dhigaysa heerkulka falcelinta bilowga ah.