I-Graphite ene-TaC coating

I. Ukuhlolwa kweeparameter zenkqubo

1. Inkqubo yeTaCl5-C3H6-H2-Ar

2. Ubushushu bokufakwa:

Ngokwefomula ye-thermodynamic, kubalwa ukuba xa ubushushu bungaphezulu kwe-1273K, amandla asimahla e-Gibbs e-reaction aphantsi kakhulu kwaye i-reaction iphelele. I-reaction constant KP inkulu kakhulu kwi-1273K kwaye iyanda ngokukhawuleza ngobushushu, kwaye izinga lokukhula liyehla kancinci kwi-1773K.

Impembelelo kwimo yomphezulu wengubo: Xa ubushushu bungafanelekanga (buphezulu kakhulu okanye buphantsi kakhulu), umphezulu ubonisa imo yekhabhoni ekhululekileyo okanye iimbobo ezikhululekileyo.

(1) Kumaqondo obushushu aphezulu, isantya sokuhamba kweeathom ezisebenzayo okanye amaqela sikhawuleza kakhulu, nto leyo eya kukhokelela ekusasazweni okungalinganiyo ngexesha lokuqokelelana kwezinto, kwaye iindawo ezityebileyo nezihlwempuzekileyo azikwazi ukuguquka kakuhle, nto leyo ebangela iimbobo.

(2) Kukho umahluko phakathi kwesantya sokusabela kwe-pyrolysis yee-alkanes kunye nesantya sokunciphisa sokusabela kwe-tantalum pentachloride. I-pyrolysis carbon igqithisile kwaye ayinakudityaniswa ne-tantalum ngexesha, nto leyo ebangela ukuba umphezulu ugqunywe yi-carbon.

Xa ubushushu bufanelekile, umphezulu we-Ukwaleka kweTaCixinene.

I-TaCAmasuntswana ayanyibilika aze ahlangane, imo yekristale igqityiwe, kwaye umda weenkozo uguquka kakuhle.

3. Umlinganiselo we-hydrogen:

Ukongeza, kukho izinto ezininzi ezichaphazela umgangatho wokugquma:

-Umgangatho womphezulu we-substrate

-Intsimi yegesi yokukhupha

-Inqanaba lokufana kokuxuba igesi ye-reactant

II. Iziphene eziqhelekileyoi-tantalum carbide coating

1. Ukwaleka nokuqhekeka

I-coefficient yokwandiswa kobushushu obucwangcisiweyo i-CTE ecwangcisiweyo:

2. Uhlalutyo olupheleleyo lweziphene:

(1) Isizathu:

(2) Indlela yokwenza abalinganiswa

① Sebenzisa iteknoloji ye-X-ray diffraction ukulinganisa uxinzelelo olushiyekileyo.

② Sebenzisa umthetho kaHu Ke ukuze uqikelele uxinzelelo olushiyekileyo.

(3) Iifomula ezinxulumene noko

3. Ukuphucula ukuhambelana koomatshini kwengubo kunye nesiseko

(1) Ugquma lokukhula olukwindawo ephezulu

Ukufakwa kwe-thermal reaction kunye netekhnoloji yokusasazwa kwe-TRD

Inkqubo yetyuwa enyibilikisiweyo

Yenza lula inkqubo yemveliso

Yehlisa ubushushu bokusabela

Ixabiso eliphantsi kakhulu

Inobuhlobo ngakumbi nokusingqongileyo

Ifanelekile kwimveliso yemizi-mveliso emikhulu

(2) Ukwaleka kwenguquko edityanisiweyo

Inkqubo yokudibanisa abantu

I-CVDinkqubo

Ukwambathisa izinto ezininzi

Ukudibanisa iingenelo zecandelo ngalinye

Lungisa ngokulula ukwakheka kwengubo kunye nomlinganiselo wayo

4. Ukufakwa kwe-thermal reaction kunye neteknoloji yokusasazwa kwe-TRD

(1) Indlela yokusabela

Itekhnoloji ye-TRD ikwabizwa ngokuba yinkqubo yokubethela, esebenzisa inkqubo ye-boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide ukulungiselelai-tantalum carbide coating.

① I-boric acid enyibilikisiweyo iyayinyibilikisa i-tantalum pentoxide;

② I-Tantalum pentoxide iyancipha ibe zii-athomu ze-tantalum ezisebenzayo kwaye isasazeka kumphezulu wegrafiti;

③ Iiathom ze-tantalum ezisebenzayo zifunxwa kumphezulu wegrafiti kwaye zisabela kunye neeathom zekhabhoni ukuze zenzekei-tantalum carbide coating.

(2) Isitshixo Sokuphendula

Uhlobo lwe-carbide coating kufuneka luhlangabezane nemfuneko yokuba amandla angenawo ukwakheka kwe-oxidation we-element eyenza i-carbide aphezulu kunalawo e-boron oxide.

Amandla asimahla e-Gibbs kwi-carbide aphantsi ngokwaneleyo (kungenjalo, i-boron okanye i-boride inokwenziwa).

I-Tantalum pentoxide yi-oxide engathathi cala. Kwi-borax enyibilikisiweyo enobushushu obuphezulu, inokusabela kunye ne-alkaline oxide sodium oxide enamandla ukuze yenze i-sodium tantalate, ngaloo ndlela inciphisa ubushushu bokuqala bokusabela.