I-Graphite ene-TaC coating

I. Ukuhlola ipharamitha yenqubo

1. Uhlelo lwe-TaCl5-C3H6-H2-Ar

2. Izinga lokushisa lokufakwa:

Ngokwefomula ye-thermodynamic, kubalwa ukuthi uma izinga lokushisa lingaphezu kuka-1273K, amandla amahhala e-Gibbs okusabela aphansi kakhulu futhi ukusabela kuphelele. I-KP engaguquki yokusabela inkulu kakhulu ku-1273K futhi ikhula ngokushesha ngokushisa, futhi izinga lokukhula liyehla kancane kancane ku-1773K.

Ithonya ekubunjweni kobuso bengubo: Uma izinga lokushisa lingafaneleki (liphezulu kakhulu noma liphansi kakhulu), ubuso buveza ukubunjwa kwekhabhoni yamahhala noma ama-pores akhululekile.

(1) Emazingeni okushisa aphezulu, ijubane lokunyakaza kwama-athomu noma amaqembu e-reactant asebenzayo lishesha kakhulu, okuzoholela ekusabalaleni okungalingani ngesikhathi sokuqongelela kwezinto, futhi izindawo ezicebile nezimpofu azikwazi ukuguquka kahle, okuholela ezimbotsheni.

(2) Kukhona umehluko phakathi kwesilinganiso sokusabela kwe-pyrolysis yama-alkanes kanye nesilinganiso sokunciphisa ukusabela kwe-tantalum pentachloride. I-pyrolysis carbon ingaphezu kwamandla futhi ayikwazi ukuhlanganiswa ne-tantalum ngokuhamba kwesikhathi, okuholela ekutheni ubuso bugoqwe yi-carbon.

Uma izinga lokushisa lifanele, ubuso be-Ukugqoka kwe-TaCiminyene.

I-TaCIzinhlayiya ziyancibilika futhi zihlangane, isimo sekristalu siphelele, futhi umngcele wokusanhlamvu ushintsha kahle.

3. Isilinganiso se-hydrogen:

Ngaphezu kwalokho, kunezici eziningi ezithinta ikhwalithi yokumboza:

-Ikhwalithi yobuso be-substrate

-Insimu yegesi yokukhipha

-Izinga lokufana kokuxubana kwegesi ephendulayo

II. Amaphutha ajwayelekilei-tantalum carbide coating

1. Ukumboza nokuqhekeka

I-CTE eqondile yokwandisa ukushisa:

2. Ukuhlaziywa kwamaphutha:

(1) Imbangela:

(2) Indlela yokwenza izinhlamvu

① Sebenzisa ubuchwepheshe be-X-ray diffraction ukukala uhlobo olusele.

② Sebenzisa umthetho kaHu Ke ukuze ulinganisele ukucindezeleka okusele.

(3) Amafomula ahlobene

3. Thuthukisa ukuhambisana kwemishini kwengubo kanye ne-substrate

(1) Ukwembozwa kokukhula okungaphakathi kwendawo

Ubuchwepheshe bokufaka ukusabela kokushisa kanye nokusabalalisa kwe-TRD

Inqubo kasawoti oncibilikisiwe

Yenza inqubo yokukhiqiza ibe lula

Yehlisa izinga lokushisa lokusabela

Izindleko eziphansi kakhulu

Inobungani kakhulu nemvelo

Ifanele ukukhiqizwa kwezimboni ezinkulu

(2) Ukwembozwa kokuguquka okuhlanganisiwe

Inqubo yokubambisana

I-CVDinqubo

Ukugqoka okunezingxenye eziningi

Ukuhlanganisa izinzuzo zengxenye ngayinye

Lungisa kalula ukwakheka kwengubo kanye nesilinganiso sayo

4. Ubuchwepheshe bokufaka ukusabela kokushisa kanye nokusabalalisa i-TRD

(1) Indlela Yokusabela

Ubuchwepheshe be-TRD bubizwa nangokuthi inqubo yokushumeka, esebenzisa uhlelo lwe-boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide ukulungiselelai-tantalum carbide coating.

① I-boric acid encibilikisiwe incibilikisa i-tantalum pentoxide;

② I-Tantalum pentoxide incishiswa ibe ama-athomu e-tantalum asebenzayo futhi isakazeka ebusweni be-graphite;

③ Ama-athomu e-tantalum asebenzayo afakwa ebusweni be-graphite bese esabela nama-athomu e-carbon ukuze akheke.i-tantalum carbide coating.

(2) Isihluthulelo Sokusabela

Uhlobo lokugqoka i-carbide kumele luhlangabezane nesidingo sokuthi amandla angenawo ukwakheka kwe-oxidation we-element eyakha i-carbide aphezulu kunalawo e-boron oxide.

Amandla angenawo ama-Gibbs e-carbide aphansi ngokwanele (ngaphandle kwalokho, i-boron noma i-boride ingakheka).

I-Tantalum pentoxide iyi-oxide engathathi hlangothi. Ku-borax encibilikisiwe enokushisa okuphezulu, ingasabela ne-sodium oxide enamandla ye-alkaline oxide ukuze yakhe i-sodium tantalate, ngaleyo ndlela inciphise izinga lokushisa lokuqala lokusabela.