I te whanaketanga tonu o ngā tukanga hanga haurua-ira ki ngā rahi wafer nui ake, ngā tahua wera pakari ake, me ngā manawanui hapa iti ake, kua piki haere te hiranga o ngā rauemi e whakamahia ana i roto i ngā taputapu tukatuka pāmahana-tiketike. I roto i ēnei taonga whakapau me ngā wāhanga hanganga matua, kua puta ake ngā poti wafer uku silicon carbide (SiC) hei tētahi o ngā hangarau whakahohe tino nui i roto i ngā pūnaha oumu horapa me te waikura hou.
I roto i ngā taiao hanga haurua-ā-ira matatau, ka pā tika atu rātou ki te ōritetanga o te wera, te whakaputa matūriki, te tohatoha ahotea o te wafer, te pumau o te tukanga, ā, i te mutunga, te hua o te taputapu.
Ina koa i roto i te hanga anga 300mm, te hanga haurua hiko, me te hanga haurua o te whakatupuranga tuatoru, kei te tere whakakapia ngā poti anga uku silicon carbide i ngā pūnaha kawe quartz tuku iho nā ō rātou āhuatanga wera me te hangarau pai rawa atu.
He aha te poti angiangi uku silicon carbide?
He hanganga kawe-waha pāmahana teitei te poti wafer uku silicon carbide i hangaia mai i ngā uku silicon carbide matatau. Ko tōna kaupapa matua he tautoko me te kawe haumaru i ngā wafer haurua-ira maha mā roto i ngā pūnaha oumu poutū, whakapae rānei i te wā e whakahaerehia ana te maimoatanga wera.
He maha ngā mokowā mokowā o tētahi poti waferi kua hangaia kia tino tika, kua hangaia hei pupuri i te tawhiti mokowā i te wā e tukatukahia ana. I runga anō i te whakamahinga, ka uru pea ki te hanganga ngā kurupae tautoko, ngā ringaringa cantilever, ngā āhuahanga kua arotauhia te rere o te hau, me ngā wāhanga whakapakari mama kua hangaia hei whakaiti i te papatipu wera.
I roto i ngā pūnaha oumu haurua-haurua, ka mahi ngā poti wafer hei hononga i waenga i ngā wafer me te taiao tukatuka wera. I te mea ka haere tonu te whakaiti i ngā rahi o te taputapu ki ngā pūnga hangarau matatau, ahakoa ngā kore pumau moroiti i roto i te hanganga tautoko wafer ka pā ki te auautanga o te tukanga me te mahi hapa.
Koinei tētahi o ngā take e piki haere ana te whakamahi a ngā kaihanga oumu matatau i ngā wāhanga uku silicon carbide parakore-teitei, kaua ki ngā pūnaha quartz hanumi tuku iho.
Te Tūrangasi roto i ngā Pūnaha Oumu Horoho me te Waikura
Ko te horapa me te waikura kei roto tonu i ngā tukanga wera tino taketake i roto i te hanga haurua-ā-ira. E whakamahia whānuitia ana ēnei tukanga mō te whakahohenga ira-whakauru, te tipu waikura wera, te whakamahana, te horapa taraiwa-roto, me te hanganga dielectric.
Ko ngā pāmahana whakahaere noa kei waenganui i te 900°C me te 1200°C, i runga i te matū tukanga me ngā whakaritenga taputapu. I roto i ētahi tono taputapu semiconductor hiko matatau, taputapu SiC rānei, ka neke ake pea ngā huringa wera i te 1300°C.
I raro i ēnei tikanga, me pupuri tonu e te poti angaanga te pumau o ngā āhuatanga mō ngā huringa wera roa me te whakaiti i te poke me te pupuri i te tawhiti ōrite o ngā angaangaanga.
Kua roa ngā poti angiangi quartz tuku iho e whakamahia ana i roto i ngā oumu horapa nā te mea he tino parakore, he iti hoki te utu. Heoi, he iti te kawe wera o ngā rauemi quartz — tata ki te 1.4 W/m·K i te pāmahana rūma.
Hei whakataurite, ko ngā uku silicon carbide e whakaatu ana i ngā uara kawe wera mai i te 120 ~ 200 W/m·K i runga i te momo me te hanganga moroiti.
Mā tēnei rerekētanga nui ka tino pai ake te ōritetanga o te pāmahana puta noa i te kawenga oumu.
Mā te kawe wera teitei ake ka taea:
● He rite tonu te whakamahana o te papa
● Ngā pikinga wera kua whakaitihia
● Te pai ake o te ōritetanga o te wafer ki te wafer
● He iti ake te kohikohinga ahotea wera
● Ngā pānga taha kua whakaitihia i te wā o te waikura, te horapa rānei
I roto i te ahumahi haurua-ā-ira matatau, i te wā e whaiti haere tonu ana ngā matapihi tukanga, ka pā tika ēnei whakapainga ki te ōritetanga o te kiriata me te pumau o te mahi hiko.
He nui ake te pakari ā-mīhini o ngā poti wafer SiC ki te whakaritea ki ngā hanganga quartz. Ka piki haere te hiranga o tēnei i roto i ngā pūnaha oumu poutū e tukatuka ana i ngā puranga nui o ngā wafer 300 mm, ka nui ake te roa o te poti me te kawenga ā-mīhini.
Mā te whakaiti i te rerekētanga e āwhina ki te pupuri i te mokowā tika o te angaanga me te whanonga rere hau pumau puta noa i te huringa wera.
Ngā Āhuatanga Matua o ngā Waka Angiangi Ukume Silicon Carbide
Ko te rongonui haere o ngā poti angiangi silicon carbide i ahu mai i te huinga ahurei o ngā āhuatanga wera, miihini, me te matū o ngā uku silicon carbide.
Ngā Āhuatanga Matua o te Tinana
| Taonga | Mahi SiC Noa |
| Te pāmahana whakahaere mōrahi | >1400°C i roto i ngā taiao waikura |
| Te kawe wera | ~120–200 W/m·K |
| Kiato | ~3.0–3.2 karamu/cm³ |
| Te pakeketanga o te Mohs | ~9.2 |
| Te tauwehenga rapa | ~410 GPa |
| Ātete ru wera | Tino pai |
| Ātete matū | He ātete teitei ki ngā waikawa, ngā kawakore, me ngā hau tukatuka |
| Te pakari o te mīhini | Tino teitei |
| Te au o te whakaputa matūriki | He iti me te whakaotinga mata kua arotauhia |
Mā ēnei āhuatanga ka taea e ngā hanganga uku silicon carbide te pupuri i te pumau o ngā āhuatanga i raro i te huringa wera roa, engari ko ngā wāhanga quartz tuku iho ka tīmata ki te whakangawari, ki te whakapēpē rānei.
Ka whakaitihia hoki e te pakari teitei o te silicon carbide te wiri me te kore pumau ā-mīhini i te wā e utaina ana, e tangohia ana hoki ngā anga i roto i te oumu.
Ngā Momo Rauemi Matua mō ngā Waka Wafer Silicon Carbide
E hangaia ana ngā poti angiangi silicon carbide hou mā te whakamahi i ngā momo hangarau rauemi rerekē, ia mea i arotauhia mō ngā taiao tukanga motuhake me ngā whakaritenga utu-whai hua.
He whānuitia te whakamahinga o te karawiti silicon kua whakakākanotia anō (RSiC) i roto i ngā oumu pāmahana teitei nā tōna parakore me te pumau wera. Kāore e hiahiatia he tāpiri nui o ngā āwhina sintering mō te tukanga hanga mō te RSiC, e āwhina ana ki te whakaiti i te mōrearea o te poke i roto i ngā taiao semiconductor.
He nui ake te kaha ā-ringa o te silicon carbide i whakatōkia ki te tauhohenga (RBSC, RBSiC rānei) me te iti iho o ngā utu hanga. Heoi anō, mā te silicon kore utu e toe ana i roto i te hanganga ka whakaiti i tōna ātete ki te waikura i roto i ētahi taiao tukanga waikura.
Mō ngā tono haurua-ā-ira matatau, kei te piki haere te rongonui o ngā pūnaha karāpiti kua pania ki te karāpiti silicon CVD. I roto i ēnei hanganga, ka whakaratohia e te papa karāpiti he tautoko ā-mīhini māmā, ko te paninga karāpiti silicon CVD te mea hanga hei atanga tukanga.
He tino iti ngā tere whakaputa matūriki o ngā paninga silicon carbide CVD, ā, he tino parakore hoki, e tino ātaahua ai mō te hanga hangarau arorau me te hiko matatau. Heoi anō, me āta whakahaere te kounga o te paninga me ngā tauwehenga whānui wera kāore i te ōrite kia kore ai e pakaru, e wehea rānei i te wā e huri haere ana te huringa wera.
Ngā Wero Tukanga Noa
Ahakoa ngā painga o te mahi a ngā poti angiangi uku silicon carbide, he maha tonu ngā wero hangarau e pā ana ki a rātou i roto i ngā taiao hanga semiconductor tūturu.
Ko te poke o ngā matūriki tētahi o ngā take tino nui. I te mea e iti haere ana te rahi o ngā taputapu, kei te kino haere ngā ngaronga hua e puta mai ana i ngā matūriki. Ahakoa ngā para iti iho i te iti o te maikoroni e puta mai ana i ngā kapiti moroiti, te wehenga o te paninga, te pirau rānei o te mata, ka taea te whakaputa i ngā hapa kino ki ngā papa matotoru.
Ko te pakaru o te ahotea wera tētahi atu wero roa. Ahakoa he tino pai te pumau o te silicon carbide, he rauemi uku pakarukaru tonu. Ko te tere o te wera, te kore ōrite rānei o te pāmahana ā-rohe ka arahi pea ki ngā pakaru i ngā kokonga hanganga, i ngā awaawa wafer, i ngā whakawhitinga kurupae rānei.
Ka taea hoki e te huringa wera roa te arahi ki te whakarerekētanga āta, te ngoki rānei, inā koa i roto i ngā poti wafer rahi nui e whakamahia ana i roto i ngā pūnaha oumu poutū. Ahakoa ngā huringa āhuahanga iti ka taea te whakarerekē i te mokowā wafer me te ōritetanga o te rere hau, ka pā ki te whakahaere matotoru waikura me te ōritetanga o te tohatoha ira.
Ko te wehewehenga o te paninga CVD tētahi atu take pono nui i roto i ngā pūnaha SiC pania. Nā te mea he rerekē ngā whanonga whakawhānui wera o te papa graphite me te paninga SiC, ko te huringa pāmahana teitei e auau ana ka arahi ki te kohikohinga ahotea i te atanga.
Whakamutunga
I roto i ngā pūnaha oumu horapa me te oumu whakahāngai haurua-haurua, he mea nui te mahi a ngā poti uku wafer silicon carbide ki te pupuri i te pumau o te wera, te whakahaere i te poke, me te whakarite i te ōritetanga o te tukanga i raro i ngā āhuatanga mahi tino uaua. Nā te kaha o te kawe wera, te pakari miihini pai rawa atu, te ātete pāmahana teitei, me te pumau matū, ka nui haere te hiranga o ēnei poti i roto i te hanga haurua-haurua matatau.
I te whanaketanga tonu o ngā hangarau tukanga haurua-ira, me te uaua haere, me te kaha haere o ngā whakaritenga whakahaere hapa, ka piki haere tonu te hiranga o ngā pūnaha kawe papa uku matatau. I roto i ngā whare hanga hou, he maha ngā wero e pā ana ki te whakahaere matūriki, te ōritetanga wera, me te pono ka taea te whai i te mutunga ki te taunekeneke i waenga i te whanonga huringa wera, te pumau rauemi, me te hoahoa o te pūnaha kawe papa.
Nō reira, kei te tere whanake haere ngā poti angiangi uku silicon carbide mai i ngā taputapu oumu āwhina ki ngā wāhanga nui mō te hanga semiconductor o te whakatupuranga e whai ake nei.
Wā tuku: Mei-28-2026