Site n'ịgbaso ozizi nke "ịdị mma, ọrụ, arụmọrụ na uto", anyị enwetala ntụkwasị obi na otuto site n'aka ndị na-azụ ahịa n'ime obodo na n'ụwa niile maka Asambodo IOS China 99.5%Ihe mgbaru ọsọ seramiiki sicSilicon Carbide Sputtering Target maka mkpuchi, Ebumnuche anyị bụ isi bụ inye ndị ahịa anyị n'ụwa niile ezigbo mma, ọnụahịa asọmpi, nnyefe afọ ojuju na ọrụ magburu onwe ya.
Site n'ịgbaso ozizi nke "ịdị mma, ọrụ, arụmọrụ na uto", anyị enwetala ntụkwasị obi na otuto site n'aka ndị na-azụ ahịa n'ime obodo na n'ụwa niile makaChina Silicon Carbide Sputtering Target, Ihe mgbaru ọsọ seramiiki sicUgbu a, anyị nwere usoro njikwa mma siri ike ma zuru oke, nke na-eme ka ngwaahịa ọ bụla nwee ike iru ihe achọrọ maka ịdị mma nke ndị ahịa. E wezụga nke ahụ, a na-enyocha ihe anyị niile nke ọma tupu ebuga ha.
Ngwakọta carbon / carbon(nke a ga-akpọ ""C/C ma ọ bụ CFC") bụ ụdị ihe mejupụtara nke dabere na carbon ma ejiri eriri carbon na ngwaahịa ya mee ka ọ sie ike (usoro ihe eji eme ka carbon sie ike). O nwere ma ike nke carbon na ike dị elu nke eriri carbon. O nwere ezigbo ihe eji arụ ọrụ, iguzogide okpomọkụ, iguzogide nchara, mgbochi esemokwu na njirimara ike na ike eletriki.
CVD-SiCmkpuchi ahụ nwere njirimara nke nhazi otu, ihe dị obere, iguzogide okpomọkụ dị elu, iguzogide oxidation, ịdị ọcha dị elu, iguzogide acid & alkali na ihe ndị sitere na organic reagent, yana ihe onwunwe anụ ahụ na kemịkalụ kwụsiri ike.
Ma e jiri ya tụnyere ihe ndị dị na graphite dị ọcha nke ukwuu, graphite na-amalite ịgbaze na 400C, nke ga-eme ka ntụ ntụ daa n'ihi mgbaze, na-ebute mmetọ gburugburu ebe obibi na ngwaọrụ ndị dị n'akụkụ na ụlọ ndị na-anaghị amị amị, ma na-eme ka ihe ndị na-adịghị ọcha nke gburugburu ebe obibi dịkwuo elu.
Agbanyeghị, mkpuchi SiC nwere ike idobe nkwụsi ike anụ ahụ na kemịkalụ na ogo 1600. A na-ejikarị ya eme ihe n'ụlọ ọrụ ọgbara ọhụrụ, ọkachasị na ụlọ ọrụ semiconductor.
Ụlọ ọrụ anyị na-enye ọrụ nhazi mkpuchi SiC site na usoro CVD n'elu graphite, seramiiki na ihe ndị ọzọ, ka gas pụrụ iche nwere carbon na silicon meghachi omume na okpomọkụ dị elu iji nweta molekul SiC dị ọcha, molekul ndị a na-etinye n'elu ihe ndị a kpuchiri ekpuchi, na-emepụta oyi akwa nchebe SIC. SIC e guzobere na-ejikọta nke ọma na ntọala graphite, na-enye ntọala graphite ihe pụrụ iche, si otú a na-eme ka elu nke graphite dị obere, enweghị Porosity, oke okpomọkụ, iguzogide nchara na iguzogide oxidation.
Isi atụmatụ:
1. Nguzogide oxidation okpomọkụ dị elu:
Nguzogide oxidation ka dị mma nke ukwuu mgbe okpomọkụ dị elu ruo 1600 Celsius.
2. Ịdị ọcha dị elu: emere site na itinye anwụrụ kemịkalụ n'okpuru ọnọdụ okpomọkụ dị elu nke chlorine.
3. Mgbochi mbuze: ike siri ike, elu dị obere, obere ihe.
4. Mgbochi nke ire ere: asịd, alkali, nnu na ihe ndị sitere n'okike.
Nkọwapụta Isi nke Mkpuchi CVD-SIC:
| SiC-CVD | ||
| Njupụta | (g/cc)
| 3.21 |
| Ike flexural | (Mpa)
| 470 |
| Mgbasawanye okpomọkụ | (10-6/K) | 4
|
| Ọkwa okpomọkụ | (W/mK) | 300
|
