Cov txheej txheem loj hlob ntawm silicon carbide crystal thiab cov cuab yeej siv tshuab

1. Txoj kev siv tshuab SiC siv lead ua kom loj hlob

PVT (txuj kev sublimation),

HTCVD (CVD kub siab),

LPE(txuj kev ua kua theem)

yog peb yam sib xwsSiC siv lead uacov txheej txheem kev loj hlob;

Txoj kev lees paub tshaj plaws hauv kev lag luam yog txoj kev PVT, thiab ntau dua 95% ntawm SiC cov siv lead ua ke yog loj hlob los ntawm txoj kev PVT;

Kev Lag LuamSiC siv lead ualub cub tawg loj hlob siv txoj kev siv tshuab PVT hauv kev lag luam.

2. Cov txheej txheem loj hlob ntawm SiC siv lead ua

Kev tsim cov hmoov-kev kho cov noob siv lead ua-kev loj hlob ntawm cov siv lead ua-kev ua kom cov ingot annealing-ncuav mog qab zibkev ua tiav.

3. Txoj kev PVT kom loj hlobSiC cov siv lead ua

Cov khoom siv SiC raw muab tso rau hauv qab ntawm lub graphite crucible, thiab cov SiC noob siv lead ua nyob rau sab saum toj ntawm lub graphite crucible. Los ntawm kev kho qhov rwb thaiv tsev, qhov kub ntawm cov khoom siv SiC raw siab dua thiab qhov kub ntawm cov noob siv lead ua qis dua. Cov khoom siv SiC raw ntawm qhov kub siab sublimates thiab decomposes rau hauv cov roj theem tshuaj, uas raug thauj mus rau cov noob siv lead ua nrog qhov kub qis dua thiab crystallize los ua SiC siv lead ua. Cov txheej txheem kev loj hlob yooj yim suav nrog peb cov txheej txheem: decomposition thiab sublimation ntawm cov khoom siv raw, hloov pauv loj, thiab crystallization ntawm cov noob siv lead ua.

Kev puas tsuaj thiab sublimation ntawm cov ntaub ntawv raw:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Thaum lub sijhawm hloov pauv loj, Si vapor ntxiv reacts nrog phab ntsa graphite crucible los tsim SiC2 thiab Si2C:

Si(g)+2C(S) = SiC2(g)

2Si(g) + C(S)=Si2C(g)

Nyob rau saum npoo ntawm cov noob siv lead ua, peb theem roj loj hlob los ntawm ob hom mis hauv qab no los tsim cov siv lead ua silicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(cov)

Si_(g)+SiC2_(g)=2SiC_(S)

4. Txoj kev PVT los cog SiC siv lead ua kom cov khoom siv thev naus laus zis loj hlob

Tam sim no, cua sov induction yog ib txoj hauv kev siv tshuab rau PVT txoj kev SiC siv lead ua kom loj hlob;

Coil sab nraud induction cua sov thiab graphite tsis kam cua sov yog qhov kev coj ua ntawm kev txhim khoSiC siv lead uacov cub tawg loj hlob.

5. 8-nti SiC induction cua sov loj hlob cub tawg

(1) Ua kom sovgraphite crucible cov khoom cua sovlos ntawm kev siv lub zog sib nqus induction; tswj qhov kub thiab txias los ntawm kev kho lub zog cua sov, qhov chaw ntawm lub kauj, thiab cov qauv rwb thaiv tsev;

(2) Ua kom lub graphite crucible sov los ntawm graphite tsis kam cua sov thiab thermal radiation conduction; tswj qhov kub thiab txias los ntawm kev kho qhov tam sim no ntawm lub tshuab cua sov graphite, cov qauv ntawm lub tshuab cua sov, thiab thaj chaw tswj tam sim no;