Maitiro ekukura kweSilicon carbide crystal uye tekinoroji yemidziyo

1. Nzira yekukura kwetekinoroji yeSiC crystal

PVT (nzira ye sublimation),

HTCVD (CVD yekupisa kwakanyanya),

LPE(nzira yechikamu chemvura)

zvitatu zvakajairikaKiristaro yeSiCnzira dzekukura;

Nzira inonyanya kuzivikanwa muindasitiri iyi inzira yePVT, uye anopfuura 95% emakristaro eSiC single anorimwa nenzira yePVT;

Yakagadzirwa nemaindasitiriKiristaro yeSiCChitofu chekukura chinoshandisa nzira huru yetekinoroji yePVT muindasitiri.

2. Maitiro ekukura kweSiC crystal

Kugadzira upfu-kurapa kwekristaro yembeu-kukura kwekristaro-kunyungudutsa kweingot-chifukidzirokugadzirisa.

3. Nzira yePVT yekukuraMakristaro eSiC

Zvinhu zveSiC zvinoiswa pasi pechinopisirwa chegraphite, uye kristaro yembeu yeSiC iri pamusoro pechinopisirwa chegraphite. Nekugadzirisa insulation, tembiricha paSiC zvinhu zvemhando yepamusoro inokwira uye tembiricha pakristaro yembeu inoderera. Zvinhu zveSiC pakupisa kwakanyanya zvinonyungudika uye zvinoora kuita gas phase substances, izvo zvinotakurwa kuenda kukristaro yembeu nekupisa kwakaderera uye zvinoumba makristaro eSiC. Maitiro ekutanga ekukura anosanganisira maitiro matatu: kuora uye sublimation yezvinhu zvemhando yepamusoro, kutamiswa kwehuwandu, uye crystallization pakristaro yembeu.

Kuora uye kupatsanurwa kwezvinhu zvakagadzirwa:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Munguva yekufambisa zvinhu zvakawanda, Si vapor inosangana zvakare nemadziro e graphite crucible kuti igadzire SiC2 neSi2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Pamusoro pekristaro yembeu, zvikamu zvitatu zvegasi zvinokura kuburikidza nenzira mbiri dzinotevera kugadzira makristaro esilicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. Nzira yePVT yekukura michina yeSiC crystal kukura

Parizvino, kupisa kwe induction inzira yakajairika yePVT nzira yeSiC crystal growth furnaces;

Kupisa kwekunze kwe induction coil uye kupisa kwe graphite resistance ndiyo nzira yekuvandudzaKiristaro yeSiCmavira ekukurira.

5. 8-inch SiC induction heating growth furnace

(1) Kupisachipfuro chegrafiti chinhu chinodziisakuburikidza ne induction yemagineti; kudzora tembiricha yemunda nekugadzirisa simba rekudziyisa, nzvimbo ye coil, uye chimiro che insulation;

(2) Kupisa graphite crucible kuburikidza nekupisa kunodzivirira graphite uye kupisa nemwaranzi; kudzora tembiricha nekugadziridza magetsi e graphite heater, chimiro che heater, uye kudzora magetsi enzvimbo;